TW428087B - Capacitance circuit for measuring the coverage error - Google Patents
Capacitance circuit for measuring the coverage errorInfo
- Publication number
- TW428087B TW428087B TW88109962A TW88109962A TW428087B TW 428087 B TW428087 B TW 428087B TW 88109962 A TW88109962 A TW 88109962A TW 88109962 A TW88109962 A TW 88109962A TW 428087 B TW428087 B TW 428087B
- Authority
- TW
- Taiwan
- Prior art keywords
- measuring
- coverage error
- capacitance circuit
- pair
- coverage
- Prior art date
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
A capacitance circuit for measuring the coverage error mainly comprises the first structure, the second structure and the third structure; the said first structure is the first conducting layer structure, which has at least one pair of sensing arms; the said second structure is formed on the said first structure, the said second structure is an insulation structure which covers the said first structure completely; the said third structure is formed on the second structure, which is a second conducting layer structure having the first main body and at least one pair of second sensing arms corresponding to the first sensing arm. The present invention is suitable to be used in measuring the coverage error of conducting layers with an insulation layer in between.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW88109962A TW428087B (en) | 1999-06-15 | 1999-06-15 | Capacitance circuit for measuring the coverage error |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW88109962A TW428087B (en) | 1999-06-15 | 1999-06-15 | Capacitance circuit for measuring the coverage error |
Publications (1)
Publication Number | Publication Date |
---|---|
TW428087B true TW428087B (en) | 2001-04-01 |
Family
ID=21641121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW88109962A TW428087B (en) | 1999-06-15 | 1999-06-15 | Capacitance circuit for measuring the coverage error |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW428087B (en) |
-
1999
- 1999-06-15 TW TW88109962A patent/TW428087B/en not_active IP Right Cessation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4A | Issue of patent certificate for granted invention patent | ||
MK4A | Expiration of patent term of an invention patent |