TW428087B - Capacitance circuit for measuring the coverage error - Google Patents

Capacitance circuit for measuring the coverage error

Info

Publication number
TW428087B
TW428087B TW88109962A TW88109962A TW428087B TW 428087 B TW428087 B TW 428087B TW 88109962 A TW88109962 A TW 88109962A TW 88109962 A TW88109962 A TW 88109962A TW 428087 B TW428087 B TW 428087B
Authority
TW
Taiwan
Prior art keywords
measuring
coverage error
capacitance circuit
pair
coverage
Prior art date
Application number
TW88109962A
Other languages
Chinese (zh)
Inventor
Guo-Chiuan Tzeng
Wen-Jie Jung
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW88109962A priority Critical patent/TW428087B/en
Application granted granted Critical
Publication of TW428087B publication Critical patent/TW428087B/en

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

A capacitance circuit for measuring the coverage error mainly comprises the first structure, the second structure and the third structure; the said first structure is the first conducting layer structure, which has at least one pair of sensing arms; the said second structure is formed on the said first structure, the said second structure is an insulation structure which covers the said first structure completely; the said third structure is formed on the second structure, which is a second conducting layer structure having the first main body and at least one pair of second sensing arms corresponding to the first sensing arm. The present invention is suitable to be used in measuring the coverage error of conducting layers with an insulation layer in between.
TW88109962A 1999-06-15 1999-06-15 Capacitance circuit for measuring the coverage error TW428087B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW88109962A TW428087B (en) 1999-06-15 1999-06-15 Capacitance circuit for measuring the coverage error

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW88109962A TW428087B (en) 1999-06-15 1999-06-15 Capacitance circuit for measuring the coverage error

Publications (1)

Publication Number Publication Date
TW428087B true TW428087B (en) 2001-04-01

Family

ID=21641121

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88109962A TW428087B (en) 1999-06-15 1999-06-15 Capacitance circuit for measuring the coverage error

Country Status (1)

Country Link
TW (1) TW428087B (en)

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Legal Events

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MK4A Expiration of patent term of an invention patent