DE60035572D1 - Bewegungsvorrichtung - Google Patents

Bewegungsvorrichtung

Info

Publication number
DE60035572D1
DE60035572D1 DE60035572T DE60035572T DE60035572D1 DE 60035572 D1 DE60035572 D1 DE 60035572D1 DE 60035572 T DE60035572 T DE 60035572T DE 60035572 T DE60035572 T DE 60035572T DE 60035572 D1 DE60035572 D1 DE 60035572D1
Authority
DE
Germany
Prior art keywords
motion device
motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60035572T
Other languages
English (en)
Other versions
DE60035572T2 (de
Inventor
Petrus C Frissen
Johan C Compter
Antonius T Peijnenburg
Erik R Loopstra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
ASML Netherlands BV
Original Assignee
ASML Netherlands BV
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Netherlands BV, Koninklijke Philips Electronics NV filed Critical ASML Netherlands BV
Publication of DE60035572D1 publication Critical patent/DE60035572D1/de
Application granted granted Critical
Publication of DE60035572T2 publication Critical patent/DE60035572T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
DE60035572T 1999-09-02 2000-08-15 Bewegungsvorrichtung Expired - Lifetime DE60035572T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP99202847 1999-09-02
EP99202847 1999-09-02
PCT/EP2000/007970 WO2001018944A1 (en) 1999-09-02 2000-08-15 Displacement device

Publications (2)

Publication Number Publication Date
DE60035572D1 true DE60035572D1 (de) 2007-08-30
DE60035572T2 DE60035572T2 (de) 2008-04-10

Family

ID=8240599

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60035572T Expired - Lifetime DE60035572T2 (de) 1999-09-02 2000-08-15 Bewegungsvorrichtung

Country Status (7)

Country Link
US (2) US6531793B1 (de)
EP (1) EP1135846B1 (de)
JP (1) JP4562336B2 (de)
KR (1) KR100673804B1 (de)
DE (1) DE60035572T2 (de)
TW (1) TWI248718B (de)
WO (1) WO2001018944A1 (de)

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CN103891114B (zh) 2011-10-27 2018-01-02 不列颠哥伦比亚大学 位移装置及其制造、使用和控制方法
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WO2015179962A1 (en) 2014-05-30 2015-12-03 The University Of British Columbia Displacement devices and methods for fabrication, use and control of same
EP3584913B1 (de) 2014-06-07 2023-08-02 The University of British Columbia Systeme zur kontrollierten bewegung von mehrerer beweglicher stufen in einer verdrängervorrichtung
WO2015188281A1 (en) 2014-06-14 2015-12-17 The University Of British Columbia Displacement devices, moveable stages for displacement devices and methods for fabrication, use and control of same
EP2963497B1 (de) 2014-06-30 2019-10-16 Dr. Johannes Heidenhain GmbH Antrieb für einen XY-Tisch sowie XY-Tisch
EP2963790B1 (de) 2014-06-30 2019-06-26 Dr. Johannes Heidenhain GmbH XY-Tisch
CN105811730B (zh) * 2014-12-30 2018-06-29 上海微电子装备（集团）股份有限公司 一种六自由度直线电机
US10861627B2 (en) 2015-04-20 2020-12-08 Sri International Microrobot and microrobotic train self-assembly with end-effectors
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US11368060B2 (en) * 2015-07-29 2022-06-21 Chevron U.S.A. Inc. Motors including tessellating semi-Halbach stators
CN108350976A (zh) * 2015-11-05 2018-07-31 Asml荷兰有限公司 磁体阵列、电线圈装置、移位系统、光刻设备及器件制造方法
WO2017109013A1 (en) * 2015-12-22 2017-06-29 Koninklijke Philips N.V. Method and apparatus for manufacturing 1d and 2d multipole magnet array's
CN109789977B (zh) 2016-10-05 2021-07-23 莱特拉姆有限责任公司 线性电机输送机系统
JP7177785B2 (ja) 2017-05-02 2022-11-24 レイトラム，エル．エル．シー． ブラシレス直流モータによって駆動されるトレイコンベヤ
JP2020524119A (ja) 2017-06-19 2020-08-13 レイトラム，エル．エル．シー． モノレールトレイコンベア
JP7161524B2 (ja) 2017-09-13 2022-10-26 レイトラム，エル．エル．シー． 受動ガイドレールを有するモノレールトレイコンベヤ
CN109991814B (zh) * 2017-12-29 2020-07-21 广东极迅精密仪器有限公司 一种位移装置
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US10807803B2 (en) 2018-01-31 2020-10-20 Laitram, L.L.C. Hygienic low-friction magnetic tray and conveyor

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Also Published As

Publication number Publication date
WO2001018944A1 (en) 2001-03-15
JP4562336B2 (ja) 2010-10-13
US6531793B1 (en) 2003-03-11
TWI248718B (en) 2006-02-01
JP2003509992A (ja) 2003-03-11
US6879063B2 (en) 2005-04-12
KR20010085989A (ko) 2001-09-07
KR100673804B1 (ko) 2007-01-25
DE60035572T2 (de) 2008-04-10
EP1135846A1 (de) 2001-09-26
EP1135846B1 (de) 2007-07-18
US20030155821A1 (en) 2003-08-21

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