DE60033999D1 - Waferhaltevorrichtung mit einer staubdichter Schichtabdeckung und Herstellungsverfahren - Google Patents
Waferhaltevorrichtung mit einer staubdichter Schichtabdeckung und HerstellungsverfahrenInfo
- Publication number
- DE60033999D1 DE60033999D1 DE60033999T DE60033999T DE60033999D1 DE 60033999 D1 DE60033999 D1 DE 60033999D1 DE 60033999 T DE60033999 T DE 60033999T DE 60033999 T DE60033999 T DE 60033999T DE 60033999 D1 DE60033999 D1 DE 60033999D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- holding device
- wafer holding
- coating cover
- dustproof coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68359—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used as a support during manufacture of interconnect decals or build up layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/14—Layer or component removable to expose adhesive
- Y10T428/1481—Dissimilar adhesives
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2813—Heat or solvent activated or sealable
- Y10T428/2817—Heat sealable
- Y10T428/2826—Synthetic resin or polymer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2848—Three or more layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
- Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
- Y10T428/31692—Next to addition polymer from unsaturated monomers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27621699A JP3763710B2 (ja) | 1999-09-29 | 1999-09-29 | 防塵用カバーフィルム付きウエハ支持台及びその製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60033999D1 true DE60033999D1 (de) | 2007-05-03 |
Family
ID=17566311
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60033999T Expired - Lifetime DE60033999D1 (de) | 1999-09-29 | 2000-09-28 | Waferhaltevorrichtung mit einer staubdichter Schichtabdeckung und Herstellungsverfahren |
Country Status (5)
Country | Link |
---|---|
US (1) | US6563195B1 (de) |
EP (1) | EP1089326B1 (de) |
JP (1) | JP3763710B2 (de) |
DE (1) | DE60033999D1 (de) |
TW (1) | TW490786B (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6807328B2 (en) * | 1998-04-17 | 2004-10-19 | John Farah | Polished polyimide substrate |
KR20020061737A (ko) * | 2001-01-17 | 2002-07-25 | 삼성전자 주식회사 | 반도체 제조장치 및 반도체 제조장치의 웨이퍼 가공방법 |
JP4199485B2 (ja) * | 2002-06-07 | 2008-12-17 | 久光製薬株式会社 | 貼付剤 |
US7512297B2 (en) * | 2003-05-02 | 2009-03-31 | John Farah | Polymide substrate bonded to other substrate |
JP2005236082A (ja) * | 2004-02-20 | 2005-09-02 | Nitto Denko Corp | レーザーダイシング用粘着シート及びその製造方法 |
TWI420579B (zh) * | 2005-07-12 | 2013-12-21 | Creative Tech Corp | And a foreign matter removing method for a substrate |
US8107777B2 (en) * | 2005-11-02 | 2012-01-31 | John Farah | Polyimide substrate bonded to other substrate |
JP4381393B2 (ja) * | 2006-04-28 | 2009-12-09 | 信越化学工業株式会社 | 静電チャック |
JP5744386B2 (ja) * | 2009-10-07 | 2015-07-08 | 日東電工株式会社 | 光半導体封止材 |
JP5781381B2 (ja) * | 2011-06-28 | 2015-09-24 | ローランドディー.ジー.株式会社 | 固定治具 |
DE102011079687A1 (de) | 2011-07-22 | 2013-01-24 | Wacker Chemie Ag | Temporäre Verklebung von chemisch ähnlichen Substraten |
JP5830377B2 (ja) * | 2011-12-28 | 2015-12-09 | リンテック株式会社 | シート貼付装置、およびシート貼付方法 |
DE102012220954A1 (de) | 2012-11-16 | 2014-05-22 | Wacker Chemie Ag | Schleifbare Siliconelastomerzusammensetzung und deren Verwendung |
CN112599463B (zh) * | 2019-10-02 | 2024-01-19 | 佳能株式会社 | 晶片卡盘、其生产方法和曝光装置 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57179268A (en) * | 1981-04-27 | 1982-11-04 | Semedain Kk | Epoxy resin adhesive composition |
US4393130A (en) * | 1982-01-11 | 1983-07-12 | Critikon, Inc. | System for encapsulation of semiconductor chips |
DE3462799D1 (en) * | 1983-12-12 | 1987-04-30 | Takeda Chemical Industries Ltd | Heat adherable resin compositions and aluminum sheet laminated with the compositions |
JPH0697676B2 (ja) * | 1985-11-26 | 1994-11-30 | 忠弘 大見 | ウエハサセプタ装置 |
JPS63193450A (ja) * | 1987-02-03 | 1988-08-10 | Nissin Electric Co Ltd | 試料保持装置 |
US4832781A (en) * | 1988-01-07 | 1989-05-23 | Varian Associates, Inc. | Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum |
KR920702018A (ko) * | 1989-08-01 | 1992-08-12 | 미시마 마사요시 | 웨이퍼 가공용 필름 |
WO1992005954A1 (fr) * | 1990-09-28 | 1992-04-16 | Daicel Chemical Industries, Ltd. | Film composite |
TW230830B (de) * | 1991-11-01 | 1994-09-21 | Furukawa Electric Co Ltd | |
US5268065A (en) * | 1992-12-21 | 1993-12-07 | Motorola, Inc. | Method for thinning a semiconductor wafer |
JP3308672B2 (ja) * | 1993-02-26 | 2002-07-29 | 日東電工株式会社 | 接着シート |
JP3121213B2 (ja) * | 1994-07-27 | 2000-12-25 | 株式会社日立製作所 | 感光性樹脂組成物 |
US6258196B1 (en) * | 1995-07-10 | 2001-07-10 | Paragon Trade Brands, Inc. | Porous composite sheet and process for the production thereof |
JP3563863B2 (ja) * | 1996-02-09 | 2004-09-08 | 大日本印刷株式会社 | カバーテープ |
US6071630A (en) * | 1996-03-04 | 2000-06-06 | Shin-Etsu Chemical Co., Ltd. | Electrostatic chuck |
JP3123491B2 (ja) * | 1997-12-04 | 2001-01-09 | 松下電器産業株式会社 | コンデンサ |
JP3903447B2 (ja) * | 1998-01-21 | 2007-04-11 | リンテック株式会社 | 粘着シート |
JP3871453B2 (ja) * | 1998-03-12 | 2007-01-24 | 株式会社クラレ | 熱可塑性重合体組成物 |
JP2000081514A (ja) * | 1998-09-03 | 2000-03-21 | Nitto Denko Corp | 光学部材、セル基板及び液晶表示装置 |
US6263941B1 (en) * | 1999-08-10 | 2001-07-24 | Silicon Genesis Corporation | Nozzle for cleaving substrates |
-
1999
- 1999-09-29 JP JP27621699A patent/JP3763710B2/ja not_active Expired - Fee Related
-
2000
- 2000-07-07 TW TW089113489A patent/TW490786B/zh not_active IP Right Cessation
- 2000-09-28 DE DE60033999T patent/DE60033999D1/de not_active Expired - Lifetime
- 2000-09-28 EP EP00308533A patent/EP1089326B1/de not_active Expired - Lifetime
- 2000-09-29 US US09/672,054 patent/US6563195B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
TW490786B (en) | 2002-06-11 |
JP2001102430A (ja) | 2001-04-13 |
EP1089326A3 (de) | 2005-12-07 |
EP1089326A2 (de) | 2001-04-04 |
EP1089326B1 (de) | 2007-03-21 |
JP3763710B2 (ja) | 2006-04-05 |
US6563195B1 (en) | 2003-05-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60030931D1 (de) | Halbleiteranordnung und Herstellungsverfahren dafür | |
DE69737588D1 (de) | Halbleiteranordnung und Herstellungsverfahren dafür | |
DE69534709D1 (de) | Herstellungsverfahren einer Halbleiteranordnung | |
DE69923294D1 (de) | Mikrospiegelvorrichtung und Herstellungsverfahren | |
FR2792458B1 (fr) | Dispositif a semi-conducteur et son procede de fabrication | |
FR2798223B1 (fr) | Dispositif a semiconducteur et procede de fabrication de celui-ci | |
SG77227A1 (en) | Semiconductor device its manufacturing method and substrate for manufacturing a semiconductor device | |
DE69838597D1 (de) | Lichtemittierende Halbleitervorrichtung und Herstellungsverfahren | |
DE69935182D1 (de) | Halbleiteranordnung | |
KR960012575A (ko) | 반도체 장치 제조 방법 | |
DE69809694T2 (de) | Halbleiteranordnung | |
DE60033999D1 (de) | Waferhaltevorrichtung mit einer staubdichter Schichtabdeckung und Herstellungsverfahren | |
DE69841770D1 (de) | Lichtemittierende Halbleitervorrichtung und Herstellungsverfahren dafür | |
DE69402903D1 (de) | Trägervorrichtung einer Schiefscheibe und Herstellungsverfahren | |
DE69912565D1 (de) | Halbleiteranordnung | |
KR960012574A (ko) | 반도체장치 제조방법 | |
DE69719001T2 (de) | Hubvorrichtung mit dreiecksförmigen Halteelementen | |
DE60014969D1 (de) | Halbleiterlaservorrichtung mit einer divergierenden region | |
DE69723783D1 (de) | Positioniervorrichtung und bauteilplazierungsmaschine mit einer solchen positioniervorrichtung | |
DE69923374D1 (de) | Halbleiteranordnung | |
DK1096549T3 (da) | Holdeindretninger til substrater | |
DE69838247D1 (de) | Beschichtungsvorrichtung | |
FI954241A (fi) | Puolijohdelaitteen valmistusmenetelmä | |
DE60010837D1 (de) | Optische Halbleitervorrichtung und zugehöriges Herstellungsverfahren | |
DE69932135D1 (de) | Herstellungsverfahren einer Halbleiteranordnung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |