DE69719001T2 - Hubvorrichtung mit dreiecksförmigen Halteelementen - Google Patents

Hubvorrichtung mit dreiecksförmigen Halteelementen

Info

Publication number
DE69719001T2
DE69719001T2 DE69719001T DE69719001T DE69719001T2 DE 69719001 T2 DE69719001 T2 DE 69719001T2 DE 69719001 T DE69719001 T DE 69719001T DE 69719001 T DE69719001 T DE 69719001T DE 69719001 T2 DE69719001 T2 DE 69719001T2
Authority
DE
Germany
Prior art keywords
lifting device
holding elements
triangular holding
triangular
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69719001T
Other languages
English (en)
Other versions
DE69719001D1 (de
Inventor
Mitchell Weiss
Gerald M Friedman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
PRI Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PRI Automation Inc filed Critical PRI Automation Inc
Publication of DE69719001D1 publication Critical patent/DE69719001D1/de
Application granted granted Critical
Publication of DE69719001T2 publication Critical patent/DE69719001T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Load-Engaging Elements For Cranes (AREA)
DE69719001T 1996-12-20 1997-06-05 Hubvorrichtung mit dreiecksförmigen Halteelementen Expired - Fee Related DE69719001T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/770,516 US5673804A (en) 1996-12-20 1996-12-20 Hoist system having triangular tension members

Publications (2)

Publication Number Publication Date
DE69719001D1 DE69719001D1 (de) 2003-03-20
DE69719001T2 true DE69719001T2 (de) 2003-10-02

Family

ID=25088813

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69719001T Expired - Fee Related DE69719001T2 (de) 1996-12-20 1997-06-05 Hubvorrichtung mit dreiecksförmigen Halteelementen

Country Status (4)

Country Link
US (1) US5673804A (de)
EP (1) EP0849214B1 (de)
JP (1) JPH10279287A (de)
DE (1) DE69719001T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016001695A1 (de) * 2016-02-13 2017-08-17 CEMTEC Cement and Mining Technology GmbH Hubvorrichtung

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DE19732451C2 (de) * 1997-07-23 1999-08-05 Mannesmann Ag Seilanordnung zur Aufhängung eines Anschlagmittels an einem Hubwerk, insbesondere für Laufkrane oder Laufkatzen
US6106213A (en) 1998-02-27 2000-08-22 Pri Automation, Inc. Automated door assembly for use in semiconductor wafer manufacturing
US6223886B1 (en) 1998-06-24 2001-05-01 Asyst Technologies, Inc. Integrated roller transport pod and asynchronous conveyor
US6533101B2 (en) 1998-06-24 2003-03-18 Asyst Technologies, Inc. Integrated transport carrier and conveyor system
US6439407B1 (en) 1998-07-13 2002-08-27 The United States Of America As Represented By The Secretary Of Commerce System for stabilizing and controlling a hoisted load
US6053478A (en) * 1998-07-15 2000-04-25 Pri Automation, Inc. Wafer hoist with self-aligning bands
EP1117610A4 (de) * 1998-08-12 2002-11-27 Middlesex General Ind Inc Hebevorrichtung mit bandentrieb
US6481558B1 (en) 1998-12-18 2002-11-19 Asyst Technologies, Inc. Integrated load port-conveyor transfer system
US6308818B1 (en) 1999-08-02 2001-10-30 Asyst Technologies, Inc. Transport system with integrated transport carrier and directors
US6530735B1 (en) 2000-06-22 2003-03-11 Amkor Technology, Inc. Gripper assembly
US6889813B1 (en) 2000-06-22 2005-05-10 Amkor Technology, Inc. Material transport method
US6695120B1 (en) 2000-06-22 2004-02-24 Amkor Technology, Inc. Assembly for transporting material
US6726429B2 (en) 2002-02-19 2004-04-27 Vertical Solutions, Inc. Local store for a wafer processing station
DE10217161B4 (de) * 2002-04-17 2006-09-21 Eisenmann Maschinenbau Gmbh & Co. Kg Hubvorrichtung
US7287740B2 (en) * 2005-11-01 2007-10-30 International Business Machines Corporation Hoisting apparatus
US8522412B1 (en) * 2006-04-03 2013-09-03 Line Walker, LLC Extraction tool lifting system
DE102006059335A1 (de) * 2006-12-15 2008-06-19 Schaeffler Kg Roboter mit längenveränderlichen Spreizbandaktuatoren
US7641041B1 (en) * 2008-07-17 2010-01-05 Datatronics Technology, Inc. Conveying device
WO2013130744A1 (en) * 2012-02-28 2013-09-06 Wayne State University Using ion current signal for engine performance and emissions measuring techniques and methods for doing the same
US10443535B2 (en) * 2012-09-28 2019-10-15 Wayne State University Ion current use for combustion resonance detection, reduction and engine control
KR101702779B1 (ko) * 2015-10-29 2017-02-03 세메스 주식회사 반송 대차의 핸드 유닛

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GB1301233A (de) * 1971-07-12 1972-12-29
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US4203368A (en) * 1977-01-21 1980-05-20 Haskins Albert R Load handling system
US4164080A (en) * 1977-05-10 1979-08-14 The Singer Company Basic simulator unit
US4246987A (en) * 1979-04-04 1981-01-27 Envirotech Corporation Mounting assembly for electrically conductive rail
FR2486049B2 (fr) * 1980-07-04 1986-09-26 Buzzichelli Lilian Perfectionnement aux appareils de levage comportant une fleche et un support de contre-poids a positions respectives reglables
DE8122103U1 (de) * 1981-07-28 1986-10-16 Kurz, Hubert, Prof. Dr.-Ing., 8000 München Hubwerk für bewegliche Fahrzeugladebrücken
US4456890A (en) * 1982-04-05 1984-06-26 Computer Peripherals Inc. Data tracking clock recovery system using digitally controlled oscillator
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US5271290A (en) * 1991-10-29 1993-12-21 United Kingdom Atomic Energy Authority Actuator assembly
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US5265742A (en) * 1993-04-12 1993-11-30 Stenger Donald D Portable, collapsible hoist apparatus
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016001695A1 (de) * 2016-02-13 2017-08-17 CEMTEC Cement and Mining Technology GmbH Hubvorrichtung
WO2017137163A1 (de) * 2016-02-13 2017-08-17 CEMTEC Cement and Mining Technology GmbH Hubvorrichtung
DE102016001695B4 (de) 2016-02-13 2018-06-07 CEMTEC Cement and Mining Technology GmbH Hubvorrichtung
US10934139B2 (en) 2016-02-13 2021-03-02 CEMTEC Cement and Mining Technology GmbH Lifting apparatus

Also Published As

Publication number Publication date
DE69719001D1 (de) 2003-03-20
EP0849214A2 (de) 1998-06-24
US5673804A (en) 1997-10-07
JPH10279287A (ja) 1998-10-20
EP0849214A3 (de) 1998-07-01
EP0849214B1 (de) 2003-02-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee