DE60032017D1 - Schmalbandiger laser mit bidirektionaler strahlerweiterung - Google Patents

Schmalbandiger laser mit bidirektionaler strahlerweiterung

Info

Publication number
DE60032017D1
DE60032017D1 DE60032017T DE60032017T DE60032017D1 DE 60032017 D1 DE60032017 D1 DE 60032017D1 DE 60032017 T DE60032017 T DE 60032017T DE 60032017 T DE60032017 T DE 60032017T DE 60032017 D1 DE60032017 D1 DE 60032017D1
Authority
DE
Germany
Prior art keywords
narrow
beam expansion
band laser
bidirectional beam
bidirectional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60032017T
Other languages
English (en)
Other versions
DE60032017T2 (de
Inventor
N Partlo
I Ershov
T Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/470,724 external-priority patent/US6192064B1/en
Priority claimed from US09/716,041 external-priority patent/US6778584B1/en
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of DE60032017D1 publication Critical patent/DE60032017D1/de
Application granted granted Critical
Publication of DE60032017T2 publication Critical patent/DE60032017T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70025—Production of exposure light, i.e. light sources by lasers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70575—Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/04—Arrangements for thermal management
    • H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
DE60032017T 1999-12-22 2000-12-15 Schmalbandiger laser mit bidirektionaler strahlerweiterung Expired - Lifetime DE60032017T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US738042 1985-05-24
US09/470,724 US6192064B1 (en) 1997-07-01 1999-12-22 Narrow band laser with fine wavelength control
US470724 1999-12-22
US716041 2000-11-17
US09/716,041 US6778584B1 (en) 1999-11-30 2000-11-17 High power gas discharge laser with helium purged line narrowing unit
PCT/US2000/034065 WO2001047074A1 (en) 1999-12-22 2000-12-15 Line narrowed laser with bidirection beam expansion
US09/738,042 US6738410B2 (en) 1999-12-22 2000-12-15 Line narrowed laser with bidirection beam expansion

Publications (2)

Publication Number Publication Date
DE60032017D1 true DE60032017D1 (de) 2007-01-04
DE60032017T2 DE60032017T2 (de) 2007-05-03

Family

ID=27413155

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60032017T Expired - Lifetime DE60032017T2 (de) 1999-12-22 2000-12-15 Schmalbandiger laser mit bidirektionaler strahlerweiterung

Country Status (6)

Country Link
US (1) US6738410B2 (de)
EP (1) EP1240694B1 (de)
JP (1) JP2003518757A (de)
AU (1) AU3435501A (de)
DE (1) DE60032017T2 (de)
WO (1) WO2001047074A1 (de)

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US6792023B1 (en) 1998-06-04 2004-09-14 Lambda Physik Ag Method and apparatus for reduction of spectral fluctuations
US6763048B2 (en) 2000-06-19 2004-07-13 Lambda Physik Ag Line narrowing of molecular fluorine laser emission
US7061957B2 (en) * 2002-06-04 2006-06-13 Agilent Technologies, Inc. External cavity laser having a set atmosphere
JP4527479B2 (ja) * 2004-09-10 2010-08-18 サンテック株式会社 波長走査型ファイバレーザ光源
US20060114956A1 (en) * 2004-11-30 2006-06-01 Sandstrom Richard L High power high pulse repetition rate gas discharge laser system bandwidth management
US7643522B2 (en) * 2004-11-30 2010-01-05 Cymer, Inc. Method and apparatus for gas discharge laser bandwidth and center wavelength control
US7366219B2 (en) * 2004-11-30 2008-04-29 Cymer, Inc. Line narrowing module
US8379687B2 (en) 2005-06-30 2013-02-19 Cymer, Inc. Gas discharge laser line narrowing module
US7321607B2 (en) * 2005-11-01 2008-01-22 Cymer, Inc. External optics and chamber support system
AU2009206541B2 (en) * 2008-01-22 2012-02-09 Cardiac Pacemakers, Inc. Respiration as a trigger for therapy optimization
KR101167983B1 (ko) 2011-03-22 2012-09-03 에이케이이노텍주식회사 결합공진기형 선폭축소장치 및 이를 구비하는 레이저 공진기
JP2013070029A (ja) * 2011-09-08 2013-04-18 Gigaphoton Inc マスタオシレータシステムおよびレーザ装置
WO2016189722A1 (ja) * 2015-05-28 2016-12-01 ギガフォトン株式会社 レーザ装置及び狭帯域化光学系
JP6737877B2 (ja) * 2016-04-22 2020-08-12 ギガフォトン株式会社 レーザ装置
CN109565144B (zh) * 2016-09-27 2021-10-15 极光先进雷射株式会社 激光装置
WO2018061210A1 (ja) * 2016-09-30 2018-04-05 ギガフォトン株式会社 レーザ装置
US9997888B2 (en) 2016-10-17 2018-06-12 Cymer, Llc Control of a spectral feature of a pulsed light beam
US10416471B2 (en) 2016-10-17 2019-09-17 Cymer, Llc Spectral feature control apparatus
US9835959B1 (en) 2016-10-17 2017-12-05 Cymer, Llc Controlling for wafer stage vibration
US9989866B2 (en) 2016-10-17 2018-06-05 Cymer, Llc Wafer-based light source parameter control

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US3734599A (en) * 1971-11-09 1973-05-22 Bell Telephone Labor Inc Optical raster-to-line converter
DE3889831T2 (de) 1987-09-28 1994-09-29 Matsushita Electric Ind Co Ltd Laser-Apparat.
US4951285A (en) 1988-07-05 1990-08-21 Spectra-Physics Laser with adjustable mirror for mode control
US5095492A (en) 1990-07-17 1992-03-10 Cymer Laser Technologies Spectral narrowing technique
JPH04314374A (ja) 1991-04-12 1992-11-05 Komatsu Ltd 狭帯域レ−ザ装置
US5249192A (en) 1991-06-27 1993-09-28 Laserscope Multiple frequency medical laser
JPH05152666A (ja) * 1991-11-27 1993-06-18 Mitsubishi Electric Corp 狭帯域化レーザ
JP2696285B2 (ja) 1991-12-16 1998-01-14 株式会社小松製作所 狭帯域発振エキシマレーザ装置およびそのパージ方法
KR19980703204A (ko) * 1995-04-03 1998-10-15 안자끼 사토루 협대역 레이저 장치
DE19603637C1 (de) * 1996-02-01 1997-07-31 Lambda Physik Gmbh Laser zur Erzeugung schmalbandiger Strahlung
US6014361A (en) * 1997-04-11 2000-01-11 Matushita Electric Industrial Co., Ltd. Beam expander to change an elliptical light beam emitted from a laser source to a circular light beam
US5835520A (en) * 1997-04-23 1998-11-10 Cymer, Inc. Very narrow band KrF laser
US5901163A (en) * 1997-06-04 1999-05-04 Cymer, Inc. Narrow band laser with etalon based output coupler
US5856991A (en) * 1997-06-04 1999-01-05 Cymer, Inc. Very narrow band laser
US6137821A (en) * 1997-06-04 2000-10-24 Cymer, Inc. Durable etalon based output coupler
US6212217B1 (en) * 1997-07-01 2001-04-03 Cymer, Inc. Smart laser with automated beam quality control
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US6192064B1 (en) * 1997-07-01 2001-02-20 Cymer, Inc. Narrow band laser with fine wavelength control
US6014398A (en) * 1997-10-10 2000-01-11 Cymer, Inc. Narrow band excimer laser with gas additive
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US20020127497A1 (en) * 1998-09-10 2002-09-12 Brown Daniel J. W. Large diffraction grating for gas discharge laser
US6493374B1 (en) * 1999-09-03 2002-12-10 Cymer, Inc. Smart laser with fast deformable grating
US6735236B2 (en) * 1999-09-03 2004-05-11 Cymer, Inc. High power gas discharge laser with line narrowing unit

Also Published As

Publication number Publication date
JP2003518757A (ja) 2003-06-10
WO2001047074A1 (en) 2001-06-28
AU3435501A (en) 2001-07-03
DE60032017T2 (de) 2007-05-03
EP1240694A1 (de) 2002-09-18
EP1240694B1 (de) 2006-11-22
US20010014110A1 (en) 2001-08-16
EP1240694A4 (de) 2003-08-27
US6738410B2 (en) 2004-05-18

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Legal Events

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