DE60031754D1 - Piezoelektrisches/elektrostriktives Bauelement - Google Patents

Piezoelektrisches/elektrostriktives Bauelement

Info

Publication number
DE60031754D1
DE60031754D1 DE60031754T DE60031754T DE60031754D1 DE 60031754 D1 DE60031754 D1 DE 60031754D1 DE 60031754 T DE60031754 T DE 60031754T DE 60031754 T DE60031754 T DE 60031754T DE 60031754 D1 DE60031754 D1 DE 60031754D1
Authority
DE
Germany
Prior art keywords
piezoelectric
electrostrictive device
electrostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60031754T
Other languages
English (en)
Other versions
DE60031754T2 (de
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Masato Komazawa
Koji Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE60031754D1 publication Critical patent/DE60031754D1/de
Publication of DE60031754T2 publication Critical patent/DE60031754T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

DE2000631754 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement Expired - Lifetime DE60031754T2 (de)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP28152299 1999-10-01
JP28152299 1999-10-01
JP30784499 1999-10-28
JP30784499 1999-10-28
JP32619599 1999-11-16
JP32619599 1999-11-16
JP2000015123 2000-01-24
JP2000015123 2000-01-24
JP2000200038A JP3433160B2 (ja) 1999-10-01 2000-06-30 圧電／電歪デバイス
JP2000200038 2000-06-30

Publications (2)

Publication Number Publication Date
DE60031754D1 true DE60031754D1 (de) 2006-12-21
DE60031754T2 DE60031754T2 (de) 2007-09-20

Family

ID=27530694

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2000631754 Expired - Lifetime DE60031754T2 (de) 1999-10-01 2000-09-29 Piezoelektrisches/elektrostriktives Bauelement

Country Status (2)

Country Link
JP (1) JP3433160B2 (de)
DE (1) DE60031754T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6752601B2 (en) * 2001-04-06 2004-06-22 Ngk Insulators, Ltd. Micropump
DE10307825A1 (de) * 2003-02-24 2004-09-09 Epcos Ag Elektrisches Vielschichtbauelement und Schichtstapel
US7596841B2 (en) 2004-04-23 2009-10-06 Agency For Science Technology And Research Micro-electromechanical devices and methods of fabricating thereof
JP4819445B2 (ja) * 2005-09-02 2011-11-24 国立大学法人東京工業大学 超音波浮上装置
JP5270622B2 (ja) * 2010-07-30 2013-08-21 Ｎｅｃトーキン株式会社 圧電式加速度センサ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05286131A (ja) * 1992-04-15 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
JPH05286132A (ja) * 1992-04-16 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
JPH10211698A (ja) * 1997-01-30 1998-08-11 Ricoh Co Ltd インクジェット記録用ヘッド
JPH11344341A (ja) * 1998-05-29 1999-12-14 Tokai Rika Co Ltd 平行平板型振動ジャイロ及び平行平板型振動ジャイロ装置

Also Published As

Publication number Publication date
JP3433160B2 (ja) 2003-08-04
DE60031754T2 (de) 2007-09-20
JP2001284672A (ja) 2001-10-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition