DE60026527D1 - Robot-vor-positionierung in einem chip-herstellungssystem - Google Patents

Robot-vor-positionierung in einem chip-herstellungssystem

Info

Publication number
DE60026527D1
DE60026527D1 DE60026527T DE60026527T DE60026527D1 DE 60026527 D1 DE60026527 D1 DE 60026527D1 DE 60026527 T DE60026527 T DE 60026527T DE 60026527 T DE60026527 T DE 60026527T DE 60026527 D1 DE60026527 D1 DE 60026527D1
Authority
DE
Germany
Prior art keywords
process chambers
cluster tool
robots
modules
robot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60026527T
Other languages
English (en)
Other versions
DE60026527T2 (de
Inventor
Hilario Oh
S Babikian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
ASML Holding NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Holding NV filed Critical ASML Holding NV
Publication of DE60026527D1 publication Critical patent/DE60026527D1/de
Application granted granted Critical
Publication of DE60026527T2 publication Critical patent/DE60026527T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41815—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell
    • G05B19/41825—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell machine tools and manipulators only, machining centre
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Quality & Reliability (AREA)
  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
DE60026527T 1999-06-23 2000-06-23 Robot-vor-positionierung in einem chip-herstellungssystem Expired - Lifetime DE60026527T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14066199P 1999-06-23 1999-06-23
US140661P 1999-06-23
PCT/US2000/017430 WO2000079356A2 (en) 1999-06-23 2000-06-23 Robot pre-positioning in a wafer processing system

Publications (2)

Publication Number Publication Date
DE60026527D1 true DE60026527D1 (de) 2006-05-04
DE60026527T2 DE60026527T2 (de) 2006-10-19

Family

ID=22492250

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60026527T Expired - Lifetime DE60026527T2 (de) 1999-06-23 2000-06-23 Robot-vor-positionierung in einem chip-herstellungssystem

Country Status (7)

Country Link
EP (1) EP1188097B1 (de)
JP (4) JP2003502877A (de)
KR (1) KR100508680B1 (de)
AT (1) ATE320033T1 (de)
AU (1) AU5636600A (de)
DE (1) DE60026527T2 (de)
WO (1) WO2000079356A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002184671A (ja) * 2000-12-14 2002-06-28 Tokyo Electron Ltd 基板処理システム及び基板処理方法
AU2002346098A1 (en) * 2001-07-13 2003-01-29 Fsi International Robotic system control
JP4492875B2 (ja) * 2005-06-21 2010-06-30 東京エレクトロン株式会社 基板処理システム及び基板処理方法
JP5275058B2 (ja) * 2009-01-23 2013-08-28 株式会社Ｓｏｋｕｄｏ 基板処理装置
US9927725B2 (en) 2015-02-16 2018-03-27 Canon Kabushiki Kaisha Lithography apparatus, lithography method, program, lithography system, and article manufacturing method
JP6198805B2 (ja) * 2015-02-16 2017-09-20 キヤノン株式会社 リソグラフィ装置、リソグラフィ方法、プログラム、リソグラフィシステムおよび物品製造方法
CN111923066B (zh) * 2020-08-14 2021-11-12 北京北方华创微电子装备有限公司 一种晶圆清洗设备中的工艺调度方法、装置
CN113299587B (zh) * 2021-05-21 2022-04-26 无锡亚电智能装备有限公司 一种晶圆清洗工艺任务排列方法及装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3115297B2 (ja) * 1989-10-09 2000-12-04 キヤノン株式会社 自動装置の制御装置
JPH0512300A (ja) * 1990-12-18 1993-01-22 Nec Yamaguchi Ltd 半導体装置製造における実績表示方法
JPH053174A (ja) * 1991-06-26 1993-01-08 Fujitsu Ltd 半導体装置の製造方法
JPH06176030A (ja) * 1992-12-03 1994-06-24 Toshiba Corp 生産スケジューリングシステム
US5428555A (en) * 1993-04-20 1995-06-27 Praxair, Inc. Facility and gas management system
JPH07171478A (ja) * 1993-12-20 1995-07-11 Dainippon Screen Mfg Co Ltd 基板処理装置
KR100372925B1 (ko) * 1994-01-19 2003-03-19 동경 엘렉트론 주식회사 통신방법및장치
JP2982038B2 (ja) * 1994-04-01 1999-11-22 東京エレクトロン株式会社 被処理体の処理のスケジューリング方法及びその装置
JP3592771B2 (ja) * 1994-12-07 2004-11-24 大日本スクリーン製造株式会社 基板処理装置
JPH08222616A (ja) * 1995-02-13 1996-08-30 Dainippon Screen Mfg Co Ltd 基板処理装置
US5591299A (en) * 1995-04-28 1997-01-07 Advanced Micro Devices, Inc. System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools
JPH08315017A (ja) * 1995-05-15 1996-11-29 Sanyo Electric Co Ltd 生産スケジュール作成方法
TW372926B (en) * 1996-04-04 1999-11-01 Applied Materials Inc Method and system of processing semiconductor workpieces and robot for use in said system
JPH09282359A (ja) * 1996-04-09 1997-10-31 Nippon Telegr & Teleph Corp <Ntt> ジョブショップスケジューリング装置
JPH09326338A (ja) * 1996-06-04 1997-12-16 Nikon Corp 製造管理装置
US5801945A (en) * 1996-06-28 1998-09-01 Lam Research Corporation Scheduling method for robotic manufacturing processes
US5928389A (en) * 1996-10-21 1999-07-27 Applied Materials, Inc. Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool
JP3684056B2 (ja) * 1996-11-15 2005-08-17 株式会社日立国際電気 半導体製造装置の基板搬送制御方法
JPH10256342A (ja) * 1997-03-06 1998-09-25 Kokusai Electric Co Ltd 搬送制御方法
US6201999B1 (en) * 1997-06-09 2001-03-13 Applied Materials, Inc. Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool
JP3771050B2 (ja) * 1997-06-20 2006-04-26 東京エレクトロン株式会社 制御システム
US6292708B1 (en) * 1998-06-11 2001-09-18 Speedfam-Ipec Corporation Distributed control system for a semiconductor wafer processing machine
ATE302438T1 (de) * 1998-12-31 2005-09-15 Silicon Valley Group Verfahren zum synchronisieren eines substratbehandlungssystems

Also Published As

Publication number Publication date
JP4800191B2 (ja) 2011-10-26
JP2007214551A (ja) 2007-08-23
JP2003502877A (ja) 2003-01-21
WO2000079356A2 (en) 2000-12-28
KR20020019109A (ko) 2002-03-09
EP1188097B1 (de) 2006-03-08
WO2000079356A3 (en) 2001-08-09
JP2007305988A (ja) 2007-11-22
JP2007165913A (ja) 2007-06-28
DE60026527T2 (de) 2006-10-19
ATE320033T1 (de) 2006-03-15
EP1188097A2 (de) 2002-03-20
AU5636600A (en) 2001-01-09
JP4733011B2 (ja) 2011-07-27
KR100508680B1 (ko) 2005-08-17

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Legal Events

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