ATE302438T1 - Verfahren zum synchronisieren eines substratbehandlungssystems - Google Patents
Verfahren zum synchronisieren eines substratbehandlungssystemsInfo
- Publication number
- ATE302438T1 ATE302438T1 AT99965098T AT99965098T ATE302438T1 AT E302438 T1 ATE302438 T1 AT E302438T1 AT 99965098 T AT99965098 T AT 99965098T AT 99965098 T AT99965098 T AT 99965098T AT E302438 T1 ATE302438 T1 AT E302438T1
- Authority
- AT
- Austria
- Prior art keywords
- cluster tool
- events
- modules
- wafer
- sending period
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title 1
- 235000012431 wafers Nutrition 0.000 abstract 5
- 230000001934 delay Effects 0.000 abstract 2
- 230000000593 degrading effect Effects 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
- 230000001360 synchronised effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
- G06Q50/04—Manufacturing
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32247—Real time scheduler
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/45—Nc applications
- G05B2219/45031—Manufacturing semiconductor wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Business, Economics & Management (AREA)
- Strategic Management (AREA)
- General Physics & Mathematics (AREA)
- Economics (AREA)
- Physics & Mathematics (AREA)
- Human Resources & Organizations (AREA)
- Theoretical Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Marketing (AREA)
- Tourism & Hospitality (AREA)
- Quality & Reliability (AREA)
- General Business, Economics & Management (AREA)
- Entrepreneurship & Innovation (AREA)
- Game Theory and Decision Science (AREA)
- General Engineering & Computer Science (AREA)
- Educational Administration (AREA)
- Health & Medical Sciences (AREA)
- Primary Health Care (AREA)
- Operations Research (AREA)
- General Health & Medical Sciences (AREA)
- Development Economics (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- General Factory Administration (AREA)
- Two-Way Televisions, Distribution Of Moving Picture Or The Like (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11442298P | 1998-12-31 | 1998-12-31 | |
US33627599A | 1999-06-18 | 1999-06-18 | |
US09/336,353 US6418356B1 (en) | 1998-12-31 | 1999-06-18 | Method and apparatus for resolving conflicts in a substrate processing system |
PCT/US1999/028593 WO2000041048A1 (en) | 1998-12-31 | 1999-12-01 | Method and apparatus for synchronizing a substrate processing system |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE302438T1 true ATE302438T1 (de) | 2005-09-15 |
Family
ID=27381497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT99965098T ATE302438T1 (de) | 1998-12-31 | 1999-12-01 | Verfahren zum synchronisieren eines substratbehandlungssystems |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1141801B1 (de) |
JP (2) | JP2002534789A (de) |
AT (1) | ATE302438T1 (de) |
AU (1) | AU3108500A (de) |
DE (1) | DE69926798T2 (de) |
WO (1) | WO2000041048A1 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6678572B1 (en) | 1998-12-31 | 2004-01-13 | Asml Holdings, N.V. | Recipe cascading in a wafer processing system |
US6768930B2 (en) | 1998-12-31 | 2004-07-27 | Asml Holding N.V. | Method and apparatus for resolving conflicts in a substrate processing system |
US6865437B1 (en) | 1998-12-31 | 2005-03-08 | Asml Holdings N.V. | Robot pre-positioning in a wafer processing system |
US6418356B1 (en) | 1998-12-31 | 2002-07-09 | Silicon Valley Group, Inc. | Method and apparatus for resolving conflicts in a substrate processing system |
DE60026527T2 (de) * | 1999-06-23 | 2006-10-19 | Asml Holding, N.V. | Robot-vor-positionierung in einem chip-herstellungssystem |
US6535784B2 (en) * | 2001-04-26 | 2003-03-18 | Tokyo Electron, Ltd. | System and method for scheduling the movement of wafers in a wafer-processing tool |
EP1406751A2 (de) * | 2001-07-13 | 2004-04-14 | FSI International | Robotersteuerungssystem |
JP2005159293A (ja) | 2003-09-18 | 2005-06-16 | Nec Kagoshima Ltd | 基板処理装置及び処理方法 |
US20080216077A1 (en) * | 2007-03-02 | 2008-09-04 | Applied Materials, Inc. | Software sequencer for integrated substrate processing system |
JP2009071194A (ja) * | 2007-09-14 | 2009-04-02 | Canon Inc | 半導体製造装置、半導体製造方法及びデバイス製造方法 |
JP5151383B2 (ja) * | 2007-10-12 | 2013-02-27 | 東京エレクトロン株式会社 | 塗布、現像装置、その方法及び記憶媒体 |
CN113299587B (zh) * | 2021-05-21 | 2022-04-26 | 无锡亚电智能装备有限公司 | 一种晶圆清洗工艺任务排列方法及装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0634783B1 (de) * | 1993-07-16 | 1997-08-06 | Semiconductor Systems, Inc. | Thermische Behandlungsmodul für Beschichtungs/Entwicklungseinrichtung für Substrat |
JPH07160773A (ja) * | 1993-12-08 | 1995-06-23 | Omron Corp | 生産計画装置 |
US5444632A (en) * | 1994-04-28 | 1995-08-22 | Texas Instruments Incorporated | Apparatus and method for controlling and scheduling processing machines |
US5612886A (en) * | 1995-05-12 | 1997-03-18 | Taiwan Semiconductor Manufacturing Company Ltd. | Method and system for dynamic dispatching in semiconductor manufacturing plants |
US5801945A (en) * | 1996-06-28 | 1998-09-01 | Lam Research Corporation | Scheduling method for robotic manufacturing processes |
US5928389A (en) * | 1996-10-21 | 1999-07-27 | Applied Materials, Inc. | Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool |
JPH10256342A (ja) * | 1997-03-06 | 1998-09-25 | Kokusai Electric Co Ltd | 搬送制御方法 |
US5838565A (en) * | 1997-05-15 | 1998-11-17 | Vanguard International Semiconductor Corporation | Manufacturing control method for IC plant batch sequential machine |
US5841677A (en) * | 1997-05-21 | 1998-11-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for dispatching lots in a factory |
-
1999
- 1999-12-01 AU AU31085/00A patent/AU3108500A/en not_active Abandoned
- 1999-12-01 WO PCT/US1999/028593 patent/WO2000041048A1/en active IP Right Grant
- 1999-12-01 EP EP99965098A patent/EP1141801B1/de not_active Expired - Lifetime
- 1999-12-01 JP JP2000592709A patent/JP2002534789A/ja active Pending
- 1999-12-01 DE DE69926798T patent/DE69926798T2/de not_active Expired - Lifetime
- 1999-12-01 AT AT99965098T patent/ATE302438T1/de not_active IP Right Cessation
-
2007
- 2007-02-08 JP JP2007028985A patent/JP4621698B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1141801A1 (de) | 2001-10-10 |
JP2007208269A (ja) | 2007-08-16 |
JP4621698B2 (ja) | 2011-01-26 |
DE69926798T2 (de) | 2006-09-14 |
AU3108500A (en) | 2000-07-24 |
JP2002534789A (ja) | 2002-10-15 |
DE69926798D1 (de) | 2005-09-22 |
EP1141801B1 (de) | 2005-08-17 |
WO2000041048A1 (en) | 2000-07-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |