DE60023216D1 - Vakuumpumpen mit doppeltem eintritt - Google Patents

Vakuumpumpen mit doppeltem eintritt

Info

Publication number
DE60023216D1
DE60023216D1 DE60023216T DE60023216T DE60023216D1 DE 60023216 D1 DE60023216 D1 DE 60023216D1 DE 60023216 T DE60023216 T DE 60023216T DE 60023216 T DE60023216 T DE 60023216T DE 60023216 D1 DE60023216 D1 DE 60023216D1
Authority
DE
Germany
Prior art keywords
vacuum pumps
double entry
entry
double
pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE60023216T
Other languages
English (en)
Other versions
DE60023216T2 (de
Inventor
Marsbed Hablanian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Inc
Original Assignee
Varian Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22912618&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60023216(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian Inc filed Critical Varian Inc
Application granted granted Critical
Publication of DE60023216D1 publication Critical patent/DE60023216D1/de
Publication of DE60023216T2 publication Critical patent/DE60023216T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE60023216T 1999-02-02 2000-02-01 Vakuumpumpen mit doppeltem einlass Revoked DE60023216T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US241899 1999-02-02
US09/241,899 US6193461B1 (en) 1999-02-02 1999-02-02 Dual inlet vacuum pumps
PCT/US2000/002583 WO2000046508A1 (en) 1999-02-02 2000-02-01 Dual inlet vacuum pumps

Publications (2)

Publication Number Publication Date
DE60023216D1 true DE60023216D1 (de) 2006-03-02
DE60023216T2 DE60023216T2 (de) 2006-07-20

Family

ID=22912618

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60023216T Revoked DE60023216T2 (de) 1999-02-02 2000-02-01 Vakuumpumpen mit doppeltem einlass

Country Status (5)

Country Link
US (1) US6193461B1 (de)
EP (1) EP1068456B1 (de)
JP (1) JP3995419B2 (de)
DE (1) DE60023216T2 (de)
WO (1) WO2000046508A1 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10111546A1 (de) * 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10032607B4 (de) * 2000-07-07 2004-08-12 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät mit einer im Ultrahochvakuum zu betreibenden Teilchenquelle und kaskadenförmige Pumpanordnung für ein solches Teilchenstrahlgerät
JP2002048088A (ja) * 2000-07-31 2002-02-15 Seiko Instruments Inc 真空ポンプ
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10111603A1 (de) * 2001-03-10 2002-09-12 Pfeiffer Vacuum Gmbh Gasreibungspumpe mit zusätzlichem Gaseinlass
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0124731D0 (en) 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
ITTO20030420A1 (it) * 2003-06-05 2004-12-06 Varian Spa Metodo per la realizzazione di statori per pompe da vuot0 e statori cosi' ottenuti
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
US7293320B2 (en) * 2004-08-27 2007-11-13 Van Norden Byron T Vacuum attachment for converting a standard vacuum into a centralized dust collection system
US20060153721A1 (en) * 2005-01-11 2006-07-13 Dodds Kemma S Dual inlet rotary tool
US7927066B2 (en) * 2005-03-02 2011-04-19 Tokyo Electron Limited Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component
GB2447860B (en) * 2006-11-21 2011-08-03 Salamander Pumped Shower Systems Ltd Improvements in fluid pumping systems
DE102007010068A1 (de) 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung
GB0901872D0 (en) 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
GB201005459D0 (en) * 2010-03-31 2010-05-19 Edwards Ltd Vacuum pumping system
DE202010011790U1 (de) * 2010-08-25 2011-12-05 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpen
US20160290363A1 (en) * 2014-11-17 2016-10-06 Hitachi, Ltd. Compression Apparatus
EP3327293B1 (de) * 2016-11-23 2019-11-06 Pfeiffer Vacuum Gmbh Vakuumpumpe mit mehreren einlässen
US10559451B2 (en) * 2017-02-15 2020-02-11 Applied Materials, Inc. Apparatus with concentric pumping for multiple pressure regimes
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3133781A1 (de) 1981-08-26 1983-03-10 Leybold-Heraeus GmbH, 5000 Köln Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
FR2611819B1 (fr) 1987-02-25 1989-05-05 Cit Alcatel Pompe a vide, rotative
DE3919529C2 (de) 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
DE58905785D1 (de) 1989-07-20 1993-11-04 Leybold Ag Gasreibungspumpe mit mindestens einer auslassseitigen gewindestufe.
US5238362A (en) 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
US5733104A (en) 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
DE19508566A1 (de) 1995-03-10 1996-09-12 Balzers Pfeiffer Gmbh Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb
DE29516599U1 (de) 1995-10-20 1995-12-07 Leybold Ag Reibungsvakuumpumpe mit Zwischeneinlaß
GB9603434D0 (en) 1996-02-19 1996-04-17 Boc Group Plc Improvements in diffusion pumps

Also Published As

Publication number Publication date
DE60023216T2 (de) 2006-07-20
JP2002536583A (ja) 2002-10-29
WO2000046508A1 (en) 2000-08-10
JP3995419B2 (ja) 2007-10-24
EP1068456A1 (de) 2001-01-17
US6193461B1 (en) 2001-02-27
EP1068456B1 (de) 2005-10-19

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation