DE60017111D1 - Verfahren zur Herstellung einer direkt mit einer Polyimidfolie verbundenen dünnen Kupferschicht - Google Patents

Verfahren zur Herstellung einer direkt mit einer Polyimidfolie verbundenen dünnen Kupferschicht

Info

Publication number
DE60017111D1
DE60017111D1 DE60017111T DE60017111T DE60017111D1 DE 60017111 D1 DE60017111 D1 DE 60017111D1 DE 60017111 T DE60017111 T DE 60017111T DE 60017111 T DE60017111 T DE 60017111T DE 60017111 D1 DE60017111 D1 DE 60017111D1
Authority
DE
Germany
Prior art keywords
making
polyimide film
copper layer
thin copper
bonded directly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60017111T
Other languages
English (en)
Other versions
DE60017111T2 (de
Inventor
Norihiro Inagaki
Shigeru Tasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shizuoka University NUC
Original Assignee
Shizuoka University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shizuoka University NUC filed Critical Shizuoka University NUC
Publication of DE60017111D1 publication Critical patent/DE60017111D1/de
Application granted granted Critical
Publication of DE60017111T2 publication Critical patent/DE60017111T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/12—Chemical modification
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/389—Improvement of the adhesion between the insulating substrate and the metal by the use of a coupling agent, e.g. silane
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2379/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen, or carbon only, not provided for in groups C08J2361/00 - C08J2377/00
    • C08J2379/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
    • C08J2379/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31667—Next to addition polymer from unsaturated monomers, or aldehyde or ketone condensation product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
    • Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31721—Of polyimide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Laminated Bodies (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
DE60017111T 2000-06-27 2000-10-09 Verfahren zur Herstellung einer direkt mit einer Polyimidfolie verbundenen dünnen Kupferschicht Expired - Fee Related DE60017111T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000192815A JP3265364B2 (ja) 2000-06-27 2000-06-27 銅薄膜直接接合ポリイミドフィルムおよびその製造方法
JP2000192815 2000-06-27

Publications (2)

Publication Number Publication Date
DE60017111D1 true DE60017111D1 (de) 2005-02-03
DE60017111T2 DE60017111T2 (de) 2005-12-22

Family

ID=18691895

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60017111T Expired - Fee Related DE60017111T2 (de) 2000-06-27 2000-10-09 Verfahren zur Herstellung einer direkt mit einer Polyimidfolie verbundenen dünnen Kupferschicht

Country Status (4)

Country Link
US (1) US6472080B1 (de)
EP (1) EP1172401B1 (de)
JP (1) JP3265364B2 (de)
DE (1) DE60017111T2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6723426B2 (en) * 1999-03-17 2004-04-20 Battelle Memorial Institute Composite material and method of making
EP1378346A1 (de) * 2001-03-16 2004-01-07 Toyo Kohan Co., Ltd. Hochpolymerplatten- und leitungsplatten-verbindungskörper und die verbindungsplatte verwendendes teil
JP4026386B2 (ja) * 2001-12-26 2007-12-26 チッソ株式会社 新規高分子化合物、該高分子前駆体、および該高分子前駆体を用いた薄膜形成方法
JP4647954B2 (ja) * 2004-08-13 2011-03-09 新日鐵化学株式会社 フレキシブルプリント配線板用積層体の製造方法
KR100629360B1 (ko) 2005-05-30 2006-10-02 한국화학연구원 에틸렌이민 커플링제를 이용한 폴리이미드 필름의표면개질방법, 그를 이용한 동박 적층 필름의 제조방법 및그로 제조된 2층 구조의 동박 적층필름
US7941938B2 (en) * 2006-05-26 2011-05-17 Nike, Inc. Article of footwear with lightweight sole assembly
JP4735464B2 (ja) * 2006-08-01 2011-07-27 富士通株式会社 回路基板およびその製造方法
EP2402485A4 (de) * 2009-02-25 2012-09-19 Jx Nippon Mining & Metals Corp Metallbeschichtetes polyimidharzsubstrat mit hervorragender wärmealterungsresistenz
DE102010048984A1 (de) * 2010-10-20 2012-04-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Herstellen eines haftfesten Verbundes aus einem Polymersubstrat und einer anorganischen Schicht
US10596782B2 (en) * 2015-06-04 2020-03-24 Sumitomo Electric Industries, Ltd. Substrate for printed circuit board and printed circuit board
CN110753453B (zh) * 2019-11-07 2021-05-04 深圳第三代半导体研究院 一种柔性基底上稳定导电互联通路的制备方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3652761A (en) 1969-09-04 1972-03-28 Corning Glass Works Immunochemical composites and antigen or antibody purification therewith
US4778724A (en) 1987-01-23 1988-10-18 Worthen Industries, Inc. Method and composition for enhancing bonding to polyolefin surfaces
US5011410A (en) 1989-09-14 1991-04-30 Minnesota Mining And Manufacturing Co. Silane-treated metal dental articles
EP0554020B1 (de) 1992-01-24 1997-04-09 Sumitomo Electric Industries, Limited Siliziumnitridpulver und Verfahren zu dessen Herstellung
MX9303141A (es) 1992-05-28 1994-04-29 Polar Materials Inc Metodos y aparatos para depositar recubrimientos de barrera.
US5364666A (en) 1993-09-23 1994-11-15 Becton, Dickinson And Company Process for barrier coating of plastic objects
US5936703A (en) 1993-10-13 1999-08-10 Nof Corporation Alkoxysilane compound, surface processing solution and contact lens
US5770301A (en) 1995-03-14 1998-06-23 Daicel Chemical Industries, Ltd. Barrier composite films and a method for producing the same
US5849397A (en) * 1995-10-03 1998-12-15 Ube Industries, Ltd. Aromatic polyimide film and polyimide/copper foil composite sheet
US5693928A (en) 1996-06-27 1997-12-02 International Business Machines Corporation Method for producing a diffusion barrier and polymeric article having a diffusion barrier
JP3331153B2 (ja) * 1997-07-14 2002-10-07 株式会社巴川製紙所 ポリイミドフィルム−金属薄膜の複合フィルムの製造方法
US5885436A (en) * 1997-08-06 1999-03-23 Gould Electronics Inc. Adhesion enhancement for metal foil
US6027793A (en) 1997-11-03 2000-02-22 Alusuisse Technology & Management Ltd. Packaging film

Also Published As

Publication number Publication date
EP1172401B1 (de) 2004-12-29
JP2002004067A (ja) 2002-01-09
EP1172401A3 (de) 2003-01-15
US6472080B1 (en) 2002-10-29
DE60017111T2 (de) 2005-12-22
EP1172401A2 (de) 2002-01-16
JP3265364B2 (ja) 2002-03-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee