DE60013943T2 - Optisches Querverbindungskoppelfeld mit einem elektrostatischen Oberflächenbebetätiger - Google Patents

Optisches Querverbindungskoppelfeld mit einem elektrostatischen Oberflächenbebetätiger Download PDF

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Publication number
DE60013943T2
DE60013943T2 DE60013943T DE60013943T DE60013943T2 DE 60013943 T2 DE60013943 T2 DE 60013943T2 DE 60013943 T DE60013943 T DE 60013943T DE 60013943 T DE60013943 T DE 60013943T DE 60013943 T2 DE60013943 T2 DE 60013943T2
Authority
DE
Germany
Prior art keywords
electrodes
converter
reflection
electrostatic
orientation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60013943T
Other languages
German (de)
English (en)
Other versions
DE60013943D1 (de
Inventor
Storrs T. Brisbane Hoen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Application granted granted Critical
Publication of DE60013943D1 publication Critical patent/DE60013943D1/de
Publication of DE60013943T2 publication Critical patent/DE60013943T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
DE60013943T 1999-03-30 2000-02-08 Optisches Querverbindungskoppelfeld mit einem elektrostatischen Oberflächenbebetätiger Expired - Fee Related DE60013943T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US281698 1999-03-30
US09/281,698 US6215222B1 (en) 1999-03-30 1999-03-30 Optical cross-connect switch using electrostatic surface actuators

Publications (2)

Publication Number Publication Date
DE60013943D1 DE60013943D1 (de) 2004-10-28
DE60013943T2 true DE60013943T2 (de) 2005-10-06

Family

ID=23078404

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60013943T Expired - Fee Related DE60013943T2 (de) 1999-03-30 2000-02-08 Optisches Querverbindungskoppelfeld mit einem elektrostatischen Oberflächenbebetätiger

Country Status (4)

Country Link
US (2) US6215222B1 (enExample)
EP (1) EP1041707B1 (enExample)
JP (1) JP2000314842A (enExample)
DE (1) DE60013943T2 (enExample)

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US6215222B1 (en) * 1999-03-30 2001-04-10 Agilent Technologies, Inc. Optical cross-connect switch using electrostatic surface actuators
US6445841B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Optomechanical matrix switches including collimator arrays
US6445840B1 (en) 1999-05-28 2002-09-03 Omm, Inc. Micromachined optical switching devices
US6449406B1 (en) * 1999-05-28 2002-09-10 Omm, Inc. Micromachined optomechanical switching devices
US6453083B1 (en) 1999-05-28 2002-09-17 Anis Husain Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring
US6359757B1 (en) * 1999-06-02 2002-03-19 Maxtor Corporation Electrostatic actuator
US20020009256A1 (en) * 1999-07-20 2002-01-24 Memlink Ltd. Variable optical attenuator and beam splitter
JP2001168800A (ja) * 1999-12-08 2001-06-22 Kddi Corp ４ファイバリングネットワーク光スイッチング回路
US6253001B1 (en) * 2000-01-20 2001-06-26 Agilent Technologies, Inc. Optical switches using dual axis micromirrors
US6593677B2 (en) 2000-03-24 2003-07-15 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods
US6629461B2 (en) 2000-03-24 2003-10-07 Onix Microsystems, Inc. Biased rotatable combdrive actuator methods
US6445842B1 (en) * 2000-04-05 2002-09-03 Jds Uniphase, Inc. Microelectromechanical optical cross-connect switches including mechanical actuators and methods of operating same
US6542656B1 (en) 2000-04-05 2003-04-01 Jds Uniphase Corporation Add-drop optical switches including parallel fixed and movable reflectors and methods of fabricating same
US6525864B1 (en) 2000-07-20 2003-02-25 Nayna Networks, Inc. Integrated mirror array and circuit device
US6636655B2 (en) 2000-08-29 2003-10-21 Memscap S.A. MEMS optical switches having obliquely angled inputs and outputs relative to a face thereof and moveable reflectors with parallel positions therein and methods of forming same
US6807332B1 (en) * 2000-11-06 2004-10-19 Western Digital (Fremont), Inc. Piezoelectric actuated optical switch
US6541892B2 (en) * 2001-01-16 2003-04-01 Agilent Technologies, Inc. Actuator with a flexure arrangement to accommodate a long range of motion
US6771851B1 (en) 2001-06-19 2004-08-03 Nayna Networks Fast switching method for a micro-mirror device for optical switching applications
AU2002364931A1 (en) * 2001-08-09 2003-07-15 Bainbridge Networks, Inc. Fiber optic switch and piezoelectric motor
ATE393409T1 (de) * 2001-10-19 2008-05-15 Ion Geophysical Corp Digitale optische schaltvorrichtung und prozess zu ihrer herstellung
US6747863B2 (en) * 2002-01-11 2004-06-08 Hewlett-Packard Development Company, L.P. Electrostatic drive
US6831772B2 (en) 2002-02-01 2004-12-14 Analog Devices, Inc. Optical mirror module
JP4055492B2 (ja) * 2002-07-01 2008-03-05 オムロン株式会社 光スイッチ
US7049570B2 (en) * 2002-09-16 2006-05-23 Avago Technologies, Ltd. Optical chip coupling system utilizing micromachine adjustable optical elements and a feedback circuit providing the micromachine with a feedback signal correlated to an optical signal parameter
US7653272B2 (en) 2002-09-19 2010-01-26 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Highly parallel optical communication system with intracard and intercard communications
US6817717B2 (en) 2002-09-19 2004-11-16 Hewlett-Packard Development Company, L.P. Display system with low and high resolution modulators
US6920000B2 (en) * 2002-09-19 2005-07-19 Hewlett-Packard Development Company, L.P. Filter for a display system
US6921175B2 (en) 2002-09-19 2005-07-26 Hewlett-Packard Development Company, L.P. Color-generating device and display system
US6912335B2 (en) * 2003-01-10 2005-06-28 Agilent Technologies, Inc. Optical switch with reduced beam divergence
US6906838B2 (en) * 2003-07-17 2005-06-14 Agilent Technologies, Inc. Systems and methods for routing optical beams along optical paths using steerable mirrors
US20050031255A1 (en) * 2003-08-07 2005-02-10 Schroeder Dale W. Method and system for maintaining active alignment in an optical switch using dedicated representative directing elements
US7079726B2 (en) * 2003-08-07 2006-07-18 Schroeder Dale W Microelectromechanical optical switch using bendable fibers to direct light signals
US7050670B2 (en) * 2003-08-07 2006-05-23 Avago Technologies Method and system for aligning and maintaining alignment of an optical switch using sensors
US20050062138A1 (en) * 2003-09-22 2005-03-24 Williams Kirt Reed Semiconductor structure with electrically isolated sidewall electrodes and method for fabricating the structure
US7158278B2 (en) * 2004-04-12 2007-01-02 Alexander Kastalsky Display device based on bistable electrostatic shutter
US7116463B2 (en) * 2004-07-15 2006-10-03 Optron Systems, Inc. High angular deflection micro-mirror system
US9606273B2 (en) 2012-01-11 2017-03-28 Lumentum Operations Llc Diffractive MEMS device
JP6680364B2 (ja) * 2016-11-09 2020-04-15 第一精工株式会社 可動反射素子

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Also Published As

Publication number Publication date
US6362556B1 (en) 2002-03-26
EP1041707A2 (en) 2000-10-04
DE60013943D1 (de) 2004-10-28
US20020047490A1 (en) 2002-04-25
EP1041707A3 (en) 2000-12-06
EP1041707B1 (en) 2004-09-22
US6215222B1 (en) 2001-04-10
JP2000314842A (ja) 2000-11-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8380 Miscellaneous part iii

Free format text: DER VERTRETER WURDE BERICHTIGT IN ANWALTSSOZIETAET BOEHMERT & BOEHMERT, 80336 MUENCHEN. DIE VERTRETER VOSSIUS & PARTNER, 81675 MUENCHEN, WURDEN GELOESCHT.

8327 Change in the person/name/address of the patent owner

Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US

8339 Ceased/non-payment of the annual fee