DE60007736D1 - Mikromechanischer schalter und entsprechendes herstellungsverfahren - Google Patents
Mikromechanischer schalter und entsprechendes herstellungsverfahrenInfo
- Publication number
- DE60007736D1 DE60007736D1 DE60007736T DE60007736T DE60007736D1 DE 60007736 D1 DE60007736 D1 DE 60007736D1 DE 60007736 T DE60007736 T DE 60007736T DE 60007736 T DE60007736 T DE 60007736T DE 60007736 D1 DE60007736 D1 DE 60007736D1
- Authority
- DE
- Germany
- Prior art keywords
- corresponding manufacturing
- micromechanical switch
- micromechanical
- switch
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/10—Auxiliary devices for switching or interrupting
- H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
- H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
- H01H1/20—Bridging contacts
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Manufacture Of Switches (AREA)
- Waveguide Switches, Polarizers, And Phase Shifters (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11119743A JP3137112B2 (ja) | 1999-04-27 | 1999-04-27 | マイクロマシンスイッチおよびその製造方法 |
JP11974399 | 1999-04-27 | ||
PCT/JP2000/002725 WO2000065626A1 (fr) | 1999-04-27 | 2000-04-26 | Commutateur de micromachine et son procede de fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60007736D1 true DE60007736D1 (de) | 2004-02-19 |
DE60007736T2 DE60007736T2 (de) | 2004-07-01 |
Family
ID=14769048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60007736T Expired - Fee Related DE60007736T2 (de) | 1999-04-27 | 2000-04-26 | Mikromechanischer schalter und entsprechendes herstellungsverfahren |
Country Status (6)
Country | Link |
---|---|
US (1) | US6657324B1 (de) |
EP (1) | EP1176620B1 (de) |
JP (1) | JP3137112B2 (de) |
AU (1) | AU4313900A (de) |
DE (1) | DE60007736T2 (de) |
WO (1) | WO2000065626A1 (de) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3374804B2 (ja) * | 1999-09-30 | 2003-02-10 | 日本電気株式会社 | 移相器およびその製造方法 |
JP4501307B2 (ja) * | 2001-04-16 | 2010-07-14 | ソニー株式会社 | 3次元構造物の形成方法 |
GB2412498A (en) * | 2001-10-31 | 2005-09-28 | Agilent Technologies Inc | Method of actuating a high power micromachined switch |
US20040031670A1 (en) * | 2001-10-31 | 2004-02-19 | Wong Marvin Glenn | Method of actuating a high power micromachined switch |
US6686820B1 (en) * | 2002-07-11 | 2004-02-03 | Intel Corporation | Microelectromechanical (MEMS) switching apparatus |
US7084724B2 (en) * | 2002-12-31 | 2006-08-01 | The Regents Of The University Of California | MEMS fabrication on a laminated substrate |
CN1874955B (zh) * | 2003-10-31 | 2011-03-30 | 爱普科斯公司 | 电子器件的制造方法和电子器件 |
US7042308B2 (en) * | 2004-06-29 | 2006-05-09 | Intel Corporation | Mechanism to prevent self-actuation in a microelectromechanical switch |
US7504841B2 (en) * | 2005-05-17 | 2009-03-17 | Analog Devices, Inc. | High-impedance attenuator |
US8451077B2 (en) * | 2008-04-22 | 2013-05-28 | International Business Machines Corporation | MEMS switches with reduced switching voltage and methods of manufacture |
EP3422464B1 (de) | 2015-12-29 | 2021-02-24 | Synergy Microwave Corporation | Mikrowellen-mems-phasenschieber |
EP3188307A1 (de) * | 2015-12-29 | 2017-07-05 | Synergy Microwave Corporation | Hochleistungsschalter für mikrowellen-mems |
JP7130391B2 (ja) | 2017-03-10 | 2022-09-05 | シナジー マイクロウェーブ コーポレーション | メタマテリアルコンタクトを備えるマイクロ電気機械スイッチ |
US10804874B2 (en) | 2018-06-12 | 2020-10-13 | International Business Machines Corporation | Superconducting combiner or separator of DC-currents and microwave signals |
US11317519B2 (en) | 2018-10-15 | 2022-04-26 | International Business Machines Corporation | Fabrication of superconducting devices that control direct currents and microwave signals |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04269416A (ja) | 1991-02-25 | 1992-09-25 | Matsushita Electric Works Ltd | 静電リレーおよびその製造方法 |
US5578976A (en) * | 1995-06-22 | 1996-11-26 | Rockwell International Corporation | Micro electromechanical RF switch |
JPH09213191A (ja) * | 1996-02-06 | 1997-08-15 | Nippon Telegr & Teleph Corp <Ntt> | 静電型可動接点素子および静電型可動接点集積回路 |
US5880921A (en) * | 1997-04-28 | 1999-03-09 | Rockwell Science Center, Llc | Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology |
US6037719A (en) * | 1998-04-09 | 2000-03-14 | Hughes Electronics Corporation | Matrix-addressed display having micromachined electromechanical switches |
US6046659A (en) * | 1998-05-15 | 2000-04-04 | Hughes Electronics Corporation | Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications |
US6100477A (en) * | 1998-07-17 | 2000-08-08 | Texas Instruments Incorporated | Recessed etch RF micro-electro-mechanical switch |
US6072686A (en) * | 1998-12-11 | 2000-06-06 | The Aerospace Corporation | Micromachined rotating integrated switch |
US6069540A (en) * | 1999-04-23 | 2000-05-30 | Trw Inc. | Micro-electro system (MEMS) switch |
JP3356139B2 (ja) * | 1999-10-29 | 2002-12-09 | 日本電気株式会社 | 移相器 |
US6248668B1 (en) * | 2000-01-14 | 2001-06-19 | The Board Of Trustees Of The University Of Illinois | Dendritic material sacrificial layer micro-scale gap formation method |
-
1999
- 1999-04-27 JP JP11119743A patent/JP3137112B2/ja not_active Expired - Fee Related
-
2000
- 2000-04-26 DE DE60007736T patent/DE60007736T2/de not_active Expired - Fee Related
- 2000-04-26 AU AU43139/00A patent/AU4313900A/en not_active Abandoned
- 2000-04-26 US US09/959,449 patent/US6657324B1/en not_active Expired - Fee Related
- 2000-04-26 EP EP00922875A patent/EP1176620B1/de not_active Expired - Lifetime
- 2000-04-26 WO PCT/JP2000/002725 patent/WO2000065626A1/ja active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US6657324B1 (en) | 2003-12-02 |
DE60007736T2 (de) | 2004-07-01 |
JP3137112B2 (ja) | 2001-02-19 |
WO2000065626A1 (fr) | 2000-11-02 |
EP1176620A1 (de) | 2002-01-30 |
EP1176620A4 (de) | 2002-06-19 |
EP1176620B1 (de) | 2004-01-14 |
AU4313900A (en) | 2000-11-10 |
JP2000311573A (ja) | 2000-11-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE50109327D1 (de) | Mikromechanisches bauelement und entsprechendes herstellungsverfahren | |
DE50103327D1 (de) | Mikromechanisches bauelement und entsprechendes herstellungsverfahren | |
DE60044634D1 (de) | Schalter und dessen Herstellungsverfahren | |
DE69926404D1 (de) | Mikrofasern und herstellungsverfahren | |
DE69935701D1 (de) | Schalterstruktur und Herstellverfahren | |
DE69923294D1 (de) | Mikrospiegelvorrichtung und Herstellungsverfahren | |
DE69937649D1 (de) | Mikromechanischer schalter und dessen herstellungsverfahren | |
DE69924155D1 (de) | Fluoren-copolymere und daraus hergestellte vorrichtungen | |
DE60215046D1 (de) | Vernebler und anwendungsverfahren | |
DE60020737D1 (de) | Sic-einkristall und herstellungsverfahren dafür | |
DE50112013D1 (de) | Deodorantien und antiperspirantien | |
DE69929456D1 (de) | Nahfeldabtastkopf und herstellungsverfahren | |
FR2791464B1 (fr) | Micro-interrupteur | |
DE60026278D1 (de) | Anzeigevorrichtung und herstellungsverfahren | |
DE69806010D1 (de) | Mikromechanischer Beschleunigungsschalter | |
DE60039547D1 (de) | Bestückungsverfahren und Bestückungsvorrichtung | |
DE60007736D1 (de) | Mikromechanischer schalter und entsprechendes herstellungsverfahren | |
DE60038110D1 (de) | Dämpfer und herstellungsmethode dafür | |
DE60231538D1 (de) | Sputtertarget und herstellungsverfahren dafür | |
DE69941874D1 (de) | Optielektronisches bauelement und herstellungsverfahren | |
DE60140315D1 (de) | Flexible matrize und herstellungsverfahren dafür | |
DE60119137D1 (de) | Gleitelement und herstellungsverfahren dafür | |
DE60208383D1 (de) | Perrückenaufkleber und herstellungsverfahren | |
DE69933426D1 (de) | Membranschalter und herstellungsverfahren dafür | |
DE60143113D1 (de) | Toner und herstellungsverfahren |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |