DE60003249D1 - Kaltkathoden-Vakuummeter - Google Patents
Kaltkathoden-VakuummeterInfo
- Publication number
- DE60003249D1 DE60003249D1 DE60003249T DE60003249T DE60003249D1 DE 60003249 D1 DE60003249 D1 DE 60003249D1 DE 60003249 T DE60003249 T DE 60003249T DE 60003249 T DE60003249 T DE 60003249T DE 60003249 D1 DE60003249 D1 DE 60003249D1
- Authority
- DE
- Germany
- Prior art keywords
- cold cathode
- vacuum gauge
- cathode vacuum
- gauge
- cold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9906788.6A GB9906788D0 (en) | 1999-03-24 | 1999-03-24 | Vacuum gauge |
GB9906788 | 1999-03-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60003249D1 true DE60003249D1 (de) | 2003-07-17 |
DE60003249T2 DE60003249T2 (de) | 2004-07-01 |
Family
ID=10850274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60003249T Expired - Lifetime DE60003249T2 (de) | 1999-03-24 | 2000-02-28 | Kaltkathoden-Vakuummeter |
Country Status (5)
Country | Link |
---|---|
US (1) | US6474171B1 (de) |
EP (1) | EP1039285B1 (de) |
JP (1) | JP4836306B2 (de) |
DE (1) | DE60003249T2 (de) |
GB (1) | GB9906788D0 (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020186017A1 (en) * | 2001-06-11 | 2002-12-12 | John Liebeskind | Micro high-vacuum pressure sensor |
ITTO20030627A1 (it) * | 2003-08-08 | 2005-02-09 | Varian Spa | Vacuometro a ionizzazione. |
ITTO20030626A1 (it) * | 2003-08-08 | 2005-02-09 | Varian Spa | Vacuometro a ionizzazione. |
GB0722063D0 (en) * | 2007-11-12 | 2007-12-19 | Edwards Ltd | Ionisation vacuum gauges and gauge heads |
SG11201404745PA (en) * | 2012-02-08 | 2014-09-26 | Mks Instr Inc | Ionization gauge for high pressure operation |
CH707685A1 (de) | 2013-03-06 | 2014-09-15 | Inficon Gmbh | Ionisations-Vakuummesszelle mit Abschirmvorrichtung. |
RU2561235C1 (ru) * | 2014-04-30 | 2015-08-27 | Акционерное общество "Научно-производственное объединение измерительной техники" | Датчик вакуума |
CN105489465B (zh) * | 2016-01-14 | 2017-07-04 | 成都国光电气股份有限公司 | 一种真空规管 |
KR102499367B1 (ko) * | 2016-12-13 | 2023-02-14 | 엠케이에스 인스트루먼츠 인코포레이티드 | 역 마그네트론 냉음극 이온화 게이지를 위한 양극 전극 차폐물 |
CN110418953B (zh) * | 2017-03-13 | 2020-09-11 | 佳能安内华股份有限公司 | 冷阴极电离真空计和冷阴极电离真空计用盒 |
RU2680672C1 (ru) * | 2018-04-24 | 2019-02-25 | Акционерное общество "Научно-производственное объединение Измерительной техники" (АО "НПО ИТ") | Датчик вакуума |
CN108654187A (zh) * | 2018-06-14 | 2018-10-16 | 黄鹏飞 | 一种浸渍真空过滤桶 |
CN114341607B (zh) * | 2019-09-13 | 2022-06-24 | 佳能安内华股份有限公司 | 电离真空计和匣盒 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5465076A (en) * | 1977-11-01 | 1979-05-25 | Yoshio Iijima | Filament burn prevented ionization vacuum gauge |
DE3047744A1 (de) * | 1980-12-18 | 1982-07-22 | Leybold-Heraeus GmbH, 5000 Köln | Kaltkathoden-ionisationsvakuummeter |
JPS62218834A (ja) * | 1986-03-20 | 1987-09-26 | Seiko Instr & Electronics Ltd | 気体圧力計 |
DE3642670A1 (de) * | 1986-12-13 | 1988-06-23 | Leybold Ag | Penning-ionisationsvakuummeter |
JPH0810171B2 (ja) * | 1987-07-02 | 1996-01-31 | 日電アネルバ株式会社 | 電離真空計 |
GB2256310A (en) * | 1991-05-31 | 1992-12-02 | Boc Group Plc | A vacuum gauge |
US5146481A (en) * | 1991-06-25 | 1992-09-08 | Diwakar Garg | Diamond membranes for X-ray lithography |
CH688210A5 (de) * | 1993-12-15 | 1997-06-13 | Balzers Hochvakuum | Druckmessverfahren und Druckmessanordnung zu dessen Ausfuehrung |
JPH0829283A (ja) * | 1994-07-15 | 1996-02-02 | Canon Inc | 電離真空計 |
FR2736465B1 (fr) * | 1995-07-03 | 1997-08-08 | Commissariat Energie Atomique | Dispositif d'amorcage et/ou de maintien d'une decharge et jauge a vide a cathode froide comportant un tel dispositif |
JPH10213509A (ja) * | 1997-01-27 | 1998-08-11 | Ulvac Japan Ltd | 圧力測定装置 |
-
1999
- 1999-03-24 GB GBGB9906788.6A patent/GB9906788D0/en not_active Ceased
-
2000
- 2000-02-28 DE DE60003249T patent/DE60003249T2/de not_active Expired - Lifetime
- 2000-02-28 EP EP00301587A patent/EP1039285B1/de not_active Expired - Lifetime
- 2000-03-21 US US09/528,980 patent/US6474171B1/en not_active Expired - Lifetime
- 2000-03-23 JP JP2000081467A patent/JP4836306B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP1039285A2 (de) | 2000-09-27 |
DE60003249T2 (de) | 2004-07-01 |
JP4836306B2 (ja) | 2011-12-14 |
EP1039285B1 (de) | 2003-06-11 |
US6474171B1 (en) | 2002-11-05 |
JP2000292297A (ja) | 2000-10-20 |
EP1039285A3 (de) | 2000-10-04 |
GB9906788D0 (en) | 1999-05-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de | ||
8370 | Indication related to discontinuation of the patent is to be deleted | ||
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: EDWARDS LTD., CRAWLEY, WEST SUSSEX, GB |