DE59509149D1 - Anordnung für plattenförmige Piezoaktoren und Verfahren zu deren Herstellung - Google Patents

Anordnung für plattenförmige Piezoaktoren und Verfahren zu deren Herstellung

Info

Publication number
DE59509149D1
DE59509149D1 DE59509149T DE59509149T DE59509149D1 DE 59509149 D1 DE59509149 D1 DE 59509149D1 DE 59509149 T DE59509149 T DE 59509149T DE 59509149 T DE59509149 T DE 59509149T DE 59509149 D1 DE59509149 D1 DE 59509149D1
Authority
DE
Germany
Prior art keywords
arrangement
production
plate
piezo actuators
shaped piezo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59509149T
Other languages
English (en)
Inventor
Dr Thiel
Dr Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Digital Graphics Inc
Original Assignee
Francotyp Postalia GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Francotyp Postalia GmbH filed Critical Francotyp Postalia GmbH
Application granted granted Critical
Publication of DE59509149D1 publication Critical patent/DE59509149D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE59509149T 1994-08-03 1995-07-06 Anordnung für plattenförmige Piezoaktoren und Verfahren zu deren Herstellung Expired - Fee Related DE59509149D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4428847 1994-08-03

Publications (1)

Publication Number Publication Date
DE59509149D1 true DE59509149D1 (de) 2001-05-10

Family

ID=6525703

Family Applications (1)

Application Number Title Priority Date Filing Date
DE59509149T Expired - Fee Related DE59509149D1 (de) 1994-08-03 1995-07-06 Anordnung für plattenförmige Piezoaktoren und Verfahren zu deren Herstellung

Country Status (3)

Country Link
US (2) US5729263A (de)
EP (1) EP0695641B1 (de)
DE (1) DE59509149D1 (de)

Families Citing this family (30)

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JP3697829B2 (ja) * 1997-04-09 2005-09-21 ブラザー工業株式会社 インクジェットヘッドの製造方法
JP3546430B2 (ja) 1997-06-27 2004-07-28 セイコーエプソン株式会社 圧電振動子ユニット、及びこれの製造方法、及びインクジェット式記録ヘッド
EP1046506A1 (de) * 1999-04-19 2000-10-25 Océ-Technologies B.V. Tintenstrahldruckkopf
KR100691046B1 (ko) 1999-04-20 2007-03-09 시게이트 테크놀로지 엘엘씨 차동 ｐｚｔ 액티베이터를 위한 전극 패터닝
US6755511B1 (en) * 1999-10-05 2004-06-29 Spectra, Inc. Piezoelectric ink jet module with seal
US7261735B2 (en) * 2001-05-07 2007-08-28 Cordis Corporation Local drug delivery devices and methods for maintaining the drug coatings thereon
US20060222756A1 (en) * 2000-09-29 2006-10-05 Cordis Corporation Medical devices, drug coatings and methods of maintaining the drug coatings thereon
US8182527B2 (en) 2001-05-07 2012-05-22 Cordis Corporation Heparin barrier coating for controlled drug release
US7195640B2 (en) * 2001-09-25 2007-03-27 Cordis Corporation Coated medical devices for the treatment of vulnerable plaque
WO2004043507A1 (en) * 2002-11-07 2004-05-27 Carbon Medical Technologies, Inc. Biocompatible medical device coatings
US6890067B2 (en) * 2003-07-03 2005-05-10 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US20050206679A1 (en) * 2003-07-03 2005-09-22 Rio Rivas Fluid ejection assembly
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7388319B2 (en) * 2004-10-15 2008-06-17 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
US8708441B2 (en) 2004-12-30 2014-04-29 Fujifilm Dimatix, Inc. Ink jet printing
US7380914B2 (en) * 2005-04-26 2008-06-03 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US7540593B2 (en) * 2005-04-26 2009-06-02 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US8125120B2 (en) * 2008-02-15 2012-02-28 Nikon Corporation Vibration device, antidust device, camera, vibration device inspection method, method for manufacturing vibration device and vibration method
US9070394B1 (en) 2013-03-18 2015-06-30 Magnecomp Corporation Suspension microactuator with wrap-around electrode on inactive constraining layer
US9741376B1 (en) 2013-03-18 2017-08-22 Magnecomp Corporation Multi-layer PZT microactuator having a poled but inactive PZT constraining layer
US11205449B2 (en) 2013-03-18 2021-12-21 Magnecomp Corporation Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension
US10607642B2 (en) 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US9330698B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation DSA suspension having multi-layer PZT microactuator with active PZT constraining layers
US9224410B1 (en) * 2013-09-04 2015-12-29 Magnecomp Corporation Suspension having microactuator grounded to opposite side of metal support layer
JP6451306B2 (ja) * 2014-12-23 2019-01-16 ブラザー工業株式会社 液体吐出装置及び液体吐出ヘッド
US10128431B1 (en) 2015-06-20 2018-11-13 Magnecomp Corporation Method of manufacturing a multi-layer PZT microactuator using wafer-level processing
JP7310133B2 (ja) * 2018-12-26 2023-07-19 セイコーエプソン株式会社 液体噴射ユニット

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US4551647A (en) * 1983-03-08 1985-11-05 General Electric Company Temperature compensated piezoelectric transducer and lens assembly and method of making the assembly
US4752788A (en) * 1985-09-06 1988-06-21 Fuji Electric Co., Ltd. Ink jet recording head
US4703333A (en) * 1986-01-30 1987-10-27 Pitney Bowes Inc. Impulse ink jet print head with inclined and stacked arrays
DE3628346A1 (de) * 1986-08-21 1988-02-25 Siemens Ag Tintendruckkopf in dickschichttechnik
DE3710654A1 (de) 1987-03-31 1988-10-13 Siemens Ag Mehrschichtig aufgebauter tintenschreibkopf
DE3701470A1 (de) * 1987-01-20 1988-07-28 Siemens Ag Verfahren zur herstellung eines wandlerelementes fuer elektroakustische wandler
DE3725499A1 (de) * 1987-07-31 1989-02-09 Siemens Ag Piezoelektrischer tintendruckkopf und verfahren zu seiner herstellung
DE3725500A1 (de) * 1987-07-31 1989-02-09 Siemens Ag Piezoelektrischer tintendruckkopf und verfahren zu seiner herstellung
DE3733109A1 (de) 1987-09-30 1989-04-13 Siemens Ag Verfahren zur herstellung eines piezokeramik-elementes fuer einen tintenstrahlschreiber
DE3804165A1 (de) * 1988-02-11 1989-08-24 Olympia Aeg Verfahren zum bestuecken eines tintenstrahldruckkopfes mit piezokristallen
DE3805279A1 (de) * 1988-02-19 1989-08-31 Siemens Ag Piezoelektrischer tintendruckkopf und verfahren zu seiner herstellung
JPH0292644A (ja) * 1988-09-30 1990-04-03 Seiko Epson Corp インクジェットヘッド
EP0469916B1 (de) * 1990-08-03 1995-11-29 Canon Kabushiki Kaisha Farbstrahlaufzeichnungskopfherstellungsverfahren
DE69127258D1 (de) * 1990-11-13 1997-09-18 Citizen Watch Co Ltd Tintenstrahldruckkopf
JP2728980B2 (ja) * 1991-01-07 1998-03-18 シャープ株式会社 インクジェットヘッド装置
US5410341A (en) * 1991-05-28 1995-04-25 Brother Kogyo Kabushiki Kaisha Droplet jet device
JP3144949B2 (ja) * 1992-05-27 2001-03-12 日本碍子株式会社 圧電／電歪アクチュエータ
DE69314315T2 (de) * 1992-06-11 1998-04-09 Seiko Epson Corp Tintenstrahlkopf und verfahren zur herstellung
DE4225799A1 (de) 1992-07-31 1994-02-03 Francotyp Postalia Gmbh Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
DE9404328U1 (de) * 1994-03-10 1994-05-19 Francotyp Postalia Gmbh Tintenstrahldruckkopf

Also Published As

Publication number Publication date
EP0695641A2 (de) 1996-02-07
EP0695641A3 (de) 1997-03-12
US5883651A (en) 1999-03-16
US5729263A (en) 1998-03-17
EP0695641B1 (de) 2001-04-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: DIGITAL GRAPHICS INC., YANGJU, KYUNGGI, KR

8328 Change in the person/name/address of the agent

Representative=s name: BERENDT UND KOLLEGEN, 81667 MUENCHEN

8339 Ceased/non-payment of the annual fee