DE502382T1 - Lichtempfindliche zusammensetzung und verfahren. - Google Patents

Lichtempfindliche zusammensetzung und verfahren.

Info

Publication number
DE502382T1
DE502382T1 DE199292102959T DE92102959T DE502382T1 DE 502382 T1 DE502382 T1 DE 502382T1 DE 199292102959 T DE199292102959 T DE 199292102959T DE 92102959 T DE92102959 T DE 92102959T DE 502382 T1 DE502382 T1 DE 502382T1
Authority
DE
Germany
Prior art keywords
light sensitive
sensitive composition
composition
light
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE199292102959T
Other languages
English (en)
Inventor
George R.E. Mattapan Ma 02166 Us Daniels
Michael J. Springhill Florida 34607 Us Oddi
Kevin J. Milbury Ma 01527 Us Cheetham
Stephen S. Monument Beach Ma 02553 Us Rodriguez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shipley Co Inc
Original Assignee
Shipley Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/663,604 external-priority patent/US5206116A/en
Application filed by Shipley Co Inc filed Critical Shipley Co Inc
Publication of DE502382T1 publication Critical patent/DE502382T1/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/04—Chromates
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/285—Permanent coating compositions
    • H05K3/287—Photosensitive compositions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/136—Coating process making radiation sensitive element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
DE199292102959T 1991-03-04 1992-02-21 Lichtempfindliche zusammensetzung und verfahren. Pending DE502382T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/663,604 US5206116A (en) 1991-03-04 1991-03-04 Light-sensitive composition for use as a soldermask and process
US07/829,371 US5312715A (en) 1991-03-04 1992-02-03 Light-sensitive composition and process

Publications (1)

Publication Number Publication Date
DE502382T1 true DE502382T1 (de) 1993-01-14

Family

ID=27098787

Family Applications (1)

Application Number Title Priority Date Filing Date
DE199292102959T Pending DE502382T1 (de) 1991-03-04 1992-02-21 Lichtempfindliche zusammensetzung und verfahren.

Country Status (5)

Country Link
US (1) US5312715A (de)
EP (1) EP0502382A1 (de)
JP (1) JPH05273753A (de)
KR (1) KR920018521A (de)
DE (1) DE502382T1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5286599A (en) * 1991-09-26 1994-02-15 International Business Machines Corporation Base developable negative photoresist composition and use thereof
JP3429852B2 (ja) * 1993-06-04 2003-07-28 シップレーカンパニー エル エル シー ネガ型感光性組成物
CA2158915A1 (en) * 1994-09-30 1996-03-31 Dekai Loo Liquid photoimageable resist
JPH1041633A (ja) 1996-07-25 1998-02-13 Hitachi Ltd 多層配線板とそれに用いる感光性樹脂組成物
US6190833B1 (en) * 1997-03-30 2001-02-20 Jsr Corporation Radiation-sensitive resin composition
US5858615A (en) * 1997-07-31 1999-01-12 Morton International, Inc. Hardenable photoimageable compositions
US20030235775A1 (en) * 2002-06-13 2003-12-25 Munirathna Padmanaban Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds
KR100518533B1 (ko) * 2002-06-14 2005-10-04 삼성전자주식회사 에폭시 링을 포함하는 베이스 폴리머와 실리콘 함유가교제로 이루어지는 네가티브형 레지스트 조성물 및 이를이용한 반도체 소자의 패턴 형성 방법
JP2004206058A (ja) * 2002-10-31 2004-07-22 Sumitomo Chem Co Ltd ポジ型感光性組成物
JP4251612B2 (ja) * 2003-01-30 2009-04-08 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． エポキシ含有物質を含むネガ型感光性樹脂組成物
JP4266310B2 (ja) * 2003-01-31 2009-05-20 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． 感光性樹脂組成物および該組成物を用いた樹脂パターンの形成方法
JP4397601B2 (ja) * 2003-02-06 2010-01-13 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． フェノール−ビフェニレン樹脂を含むネガ型感光性樹脂組成物
JP4633500B2 (ja) * 2005-03-01 2011-02-16 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． エポキシ含有物質を含むネガ型感光性樹脂組成物
JP4662793B2 (ja) * 2005-03-01 2011-03-30 ローム・アンド・ハース・エレクトロニック・マテリアルズ，エル．エル．シー． エポキシ含有物質を含むネガ型感光性樹脂組成物
WO2007119947A1 (en) * 2006-04-13 2007-10-25 Kolon Industries, Inc Method of manufacturing metal electrode
JP6182391B2 (ja) * 2013-08-21 2017-08-16 ナミックス株式会社 エポキシ樹脂組成物、感光性樹脂および半導体装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256828A (en) * 1975-09-02 1981-03-17 Minnesota Mining And Manufacturing Company Photocopolymerizable compositions based on epoxy and hydroxyl-containing organic materials
JPS5439092A (en) * 1977-08-30 1979-03-24 Kyorin Seiyaku Kk Sstriazolo*1*55a*pyridine derivative
JPS58134467A (ja) * 1982-02-05 1983-08-10 Nippon Denso Co Ltd 半導体装置
CA1307695C (en) * 1986-01-13 1992-09-22 Wayne Edmund Feely Photosensitive compounds and thermally stable and aqueous developablenegative images
US4994346A (en) * 1987-07-28 1991-02-19 Ciba-Geigy Corporation Negative photoresist based on polyphenols and selected epoxy or vinyl ether compounds
DE3821584A1 (de) * 1988-06-25 1989-12-28 Hoechst Ag Strahlungshaertbares gemisch und daraus hergestelltes strahlungsempfindliches aufzeichungsmaterial fuer hochenergetische strahlung
DE69032077T2 (de) * 1989-10-17 1998-12-03 Shipley Co Fotoresist für nahes U.V.
EP0425418A3 (en) * 1989-10-23 1992-01-22 International Business Machines Corporation Base developable negative tone photoresist
DE69131673T2 (de) * 1990-06-19 2000-04-20 Shipley Co Säuregehärtete Photoresiste
US5206116A (en) * 1991-03-04 1993-04-27 Shipley Company Inc. Light-sensitive composition for use as a soldermask and process

Also Published As

Publication number Publication date
EP0502382A1 (de) 1992-09-09
KR920018521A (ko) 1992-10-22
JPH05273753A (ja) 1993-10-22
US5312715A (en) 1994-05-17

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