DE4210774B4 - Verfahren zum Ausrichten eines Halbleiterchips, der mit Hilfe eines Reparatursystems repariert werden soll, sowie Laser-Reparaturtarget zur Verwendung für dieses Verfahren - Google Patents

Verfahren zum Ausrichten eines Halbleiterchips, der mit Hilfe eines Reparatursystems repariert werden soll, sowie Laser-Reparaturtarget zur Verwendung für dieses Verfahren Download PDF

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Publication number
DE4210774B4
DE4210774B4 DE4210774A DE4210774A DE4210774B4 DE 4210774 B4 DE4210774 B4 DE 4210774B4 DE 4210774 A DE4210774 A DE 4210774A DE 4210774 A DE4210774 A DE 4210774A DE 4210774 B4 DE4210774 B4 DE 4210774B4
Authority
DE
Germany
Prior art keywords
target
semiconductor chip
scan
alignment
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE4210774A
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German (de)
English (en)
Other versions
DE4210774A1 (de
Inventor
Byoung Yul Han
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MagnaChip Semiconductor Ltd
Original Assignee
MagnaChip Semiconductor Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MagnaChip Semiconductor Ltd filed Critical MagnaChip Semiconductor Ltd
Publication of DE4210774A1 publication Critical patent/DE4210774A1/de
Application granted granted Critical
Publication of DE4210774B4 publication Critical patent/DE4210774B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04—Mounting of components, e.g. of leadless components
    • H05K13/0486—Replacement and removal of components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0015—Orientation; Alignment; Positioning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/5442—Marks applied to semiconductor devices or parts comprising non digital, non alphanumeric information, e.g. symbols
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
    • H01L2223/5448—Located on chip prior to dicing and remaining on chip after dicing

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Lasers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Lasers (AREA)
  • Laser Beam Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE4210774A 1991-04-12 1992-04-01 Verfahren zum Ausrichten eines Halbleiterchips, der mit Hilfe eines Reparatursystems repariert werden soll, sowie Laser-Reparaturtarget zur Verwendung für dieses Verfahren Expired - Fee Related DE4210774B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR5891/91 1991-04-12
KR1019910005891A KR940000910B1 (ko) 1991-04-12 1991-04-12 반도체 칩의 얼라인먼트 방법 및 레이저 리페이어용 타겟이 형성된 반도체 칩

Publications (2)

Publication Number Publication Date
DE4210774A1 DE4210774A1 (de) 1992-10-15
DE4210774B4 true DE4210774B4 (de) 2007-06-28

Family

ID=19313205

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4210774A Expired - Fee Related DE4210774B4 (de) 1991-04-12 1992-04-01 Verfahren zum Ausrichten eines Halbleiterchips, der mit Hilfe eines Reparatursystems repariert werden soll, sowie Laser-Reparaturtarget zur Verwendung für dieses Verfahren

Country Status (5)

Country Link
US (1) US5414519A (enExample)
JP (1) JP2802561B2 (enExample)
KR (1) KR940000910B1 (enExample)
DE (1) DE4210774B4 (enExample)
TW (1) TW232744B (enExample)

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US5545593A (en) * 1993-09-30 1996-08-13 Texas Instruments Incorporated Method of aligning layers in an integrated circuit device
JP3446287B2 (ja) * 1994-03-15 2003-09-16 富士通株式会社 縮小投影露光装置と光軸ずれ補正方法
US5696587A (en) * 1994-12-14 1997-12-09 United Microelectronics Corporation Metal target for laser repair of dies
US5796414A (en) * 1996-03-25 1998-08-18 Hewlett-Packard Company Systems and method for establishing positional accuracy in two dimensions based on a sensor scan in one dimension
KR100256815B1 (ko) * 1996-06-24 2000-06-01 김영환 확대/축소 크기 측정용 마크
JP2866831B2 (ja) * 1996-08-30 1999-03-08 株式会社アドバンテスト レーザ加工装置の位置決め方法
US6938335B2 (en) 1996-12-13 2005-09-06 Matsushita Electric Industrial Co., Ltd. Electronic component mounting method
WO1998026641A1 (en) * 1996-12-13 1998-06-18 Matsushita Electric Industrial Co., Ltd. Electronic component and mounting method and device therefor
US6064750A (en) * 1997-01-10 2000-05-16 Hunter Engineering Company Apparatus and method for determining vehicle wheel alignment measurements from three dimensional wheel positions and orientations
TW335527B (en) * 1997-11-08 1998-07-01 United Microelectronics Corp The rework testing method of semiconductor device
US6077756A (en) * 1998-04-24 2000-06-20 Vanguard International Semiconductor Overlay target pattern and algorithm for layer-to-layer overlay metrology for semiconductor processing
US6473261B1 (en) 2000-11-09 2002-10-29 Exabyte Corporation Cartridge overinsertion protection for cartridge library
USD456404S1 (en) 2000-11-09 2002-04-30 Exabye Corporation Cartridge library
US6462900B1 (en) 2000-11-09 2002-10-08 Exabyte Corporation Cartridge picker robot with ribbon cable for cartridge library
USD464354S1 (en) 2000-11-09 2002-10-15 Exabye Corporation Magazine for data cartridges
US6466396B1 (en) 2000-11-09 2002-10-15 Exabyte Corporation Cartridge library
US6486956B2 (en) * 2001-03-23 2002-11-26 Micron Technology, Inc. Reducing asymmetrically deposited film induced registration error
US7053495B2 (en) 2001-09-17 2006-05-30 Matsushita Electric Industrial Co., Ltd. Semiconductor integrated circuit device and method for fabricating the same
US6612499B2 (en) 2002-01-24 2003-09-02 Exabyte Corporation Calibration cartridge for automated cartridge library and method of using same
JP2005109145A (ja) 2003-09-30 2005-04-21 Toshiba Corp 半導体装置
USD554084S1 (en) * 2005-10-31 2007-10-30 Kabushiki Kaisha Toshiba Portion of a semiconductor apparatus mounting-position accuracy measurement jig
US7777986B2 (en) * 2007-05-11 2010-08-17 Tandberg Data Corporation Multi-dimensional transport method and drive subsystems in a cartridge library apparatus
US20080278847A1 (en) * 2007-05-11 2008-11-13 Barkley John A Method and apparatus for positioning drives in cartridge library
US7777985B2 (en) * 2007-05-11 2010-08-17 Tandberg Data Corporation Transport method and apparatus for cartridge library utilizing cam slot and follower for moving a robot carriage
US20080282281A1 (en) * 2007-05-11 2008-11-13 White Christopher M Cartridge engagement apparatus and method for cartridge library
US20080282275A1 (en) * 2007-05-11 2008-11-13 Zaczek Thomas E Entry/exit port method and apparatus for cartridge library
US9583401B2 (en) 2014-02-12 2017-02-28 International Business Machines Corporation Nano deposition and ablation for the repair and fabrication of integrated circuits
JP6219227B2 (ja) 2014-05-12 2017-10-25 東京エレクトロン株式会社 ヒータ給電機構及びステージの温度制御方法
JP2017053999A (ja) * 2015-09-09 2017-03-16 株式会社東芝 半導体装置および検査パターン配置方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3660157A (en) * 1969-08-18 1972-05-02 Computervision Corp Enhanced contrast semiconductor wafer alignment target
DE3247560A1 (de) * 1981-12-23 1983-06-30 Canon K.K., Tokyo Uebertragungseinrichtung zur kompensation eines uebertragungsfehlers

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JPS55162229A (en) * 1979-06-04 1980-12-17 Chiyou Lsi Gijutsu Kenkyu Kumiai Detection of electron beam exposure position
US4385838A (en) * 1980-01-19 1983-05-31 Nippon Kogaku K. K. Alignment device
JPS57192028A (en) * 1981-05-20 1982-11-26 Matsushita Electric Ind Co Ltd Mask set and positioning method for mask
JPS58116541A (ja) * 1981-12-29 1983-07-11 Canon Inc 整合方法
JPS59200905A (ja) * 1983-04-28 1984-11-14 Mitsubishi Electric Corp 位置検出装置
JPS61258420A (ja) * 1985-05-13 1986-11-15 Canon Inc 位置検出装置
JPS62193124A (ja) * 1986-02-19 1987-08-25 Sanyo Electric Co Ltd パタ−ン位置合わせ方法
ES2023135B3 (es) * 1986-04-18 1992-01-01 Heidelberger Druckmasch Ag Determinacion de errores de registro de impresion multicolor.
JPS63204722A (ja) * 1987-02-20 1988-08-24 Nec Corp 半導体集積回路の製造方法
JP2629709B2 (ja) * 1987-05-28 1997-07-16 株式会社ニコン 位置合わせ方法及び装置
JPH01301030A (ja) * 1988-05-26 1989-12-05 Toshiba Corp Ｘｙ方向送り装置
FR2676129A1 (fr) * 1991-04-30 1992-11-06 Cer Ets Procede destine a positionner un objet par rapport a un element a emplacement determine ou vice et versa et machine pour sa mise en óoeuvre.

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3660157A (en) * 1969-08-18 1972-05-02 Computervision Corp Enhanced contrast semiconductor wafer alignment target
DE3247560A1 (de) * 1981-12-23 1983-06-30 Canon K.K., Tokyo Uebertragungseinrichtung zur kompensation eines uebertragungsfehlers

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP 59200905 A. In: Pat. Abstr. of Japan *

Also Published As

Publication number Publication date
DE4210774A1 (de) 1992-10-15
KR920020700A (ko) 1992-11-21
US5414519A (en) 1995-05-09
JPH05109873A (ja) 1993-04-30
JP2802561B2 (ja) 1998-09-24
KR940000910B1 (ko) 1994-02-04
TW232744B (enExample) 1994-10-21

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8127 New person/name/address of the applicant

Owner name: HYNIX SEMICONDUCTOR INC., ICHON, KYONGGI, KR

8127 New person/name/address of the applicant

Owner name: MAGNACHIP SEMICONDUCTOR, LTD., CHEONGJU, KR

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee