DE4025615A1 - Verfahren zur erzeugung eines duennen metalloberflaechenfilms mit einer hohen korrosionsbestaendigkeit und einer guten haftung - Google Patents

Verfahren zur erzeugung eines duennen metalloberflaechenfilms mit einer hohen korrosionsbestaendigkeit und einer guten haftung

Info

Publication number
DE4025615A1
DE4025615A1 DE4025615A DE4025615A DE4025615A1 DE 4025615 A1 DE4025615 A1 DE 4025615A1 DE 4025615 A DE4025615 A DE 4025615A DE 4025615 A DE4025615 A DE 4025615A DE 4025615 A1 DE4025615 A1 DE 4025615A1
Authority
DE
Germany
Prior art keywords
film
metal substrate
metal
producing
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE4025615A
Other languages
German (de)
English (en)
Other versions
DE4025615C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hiroshi Yamagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YKK Corp
Original Assignee
Yoshida Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yoshida Kogyo KK filed Critical Yoshida Kogyo KK
Publication of DE4025615A1 publication Critical patent/DE4025615A1/de
Application granted granted Critical
Publication of DE4025615C2 publication Critical patent/DE4025615C2/de
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
DE4025615A 1989-08-24 1990-08-13 Verfahren zur erzeugung eines duennen metalloberflaechenfilms mit einer hohen korrosionsbestaendigkeit und einer guten haftung Granted DE4025615A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1216011A JPH0735564B2 (ja) 1989-08-24 1989-08-24 耐食性と密着性とに優れた金属表面薄膜の形成方法

Publications (2)

Publication Number Publication Date
DE4025615A1 true DE4025615A1 (de) 1991-02-28
DE4025615C2 DE4025615C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-09

Family

ID=16681905

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4025615A Granted DE4025615A1 (de) 1989-08-24 1990-08-13 Verfahren zur erzeugung eines duennen metalloberflaechenfilms mit einer hohen korrosionsbestaendigkeit und einer guten haftung

Country Status (3)

Country Link
US (1) US5024721A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH0735564B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE4025615A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0647727A1 (en) * 1993-10-01 1995-04-12 Kodak Limited Production of carriers for surface plasmon resonance

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5728431A (en) * 1996-09-20 1998-03-17 Texas A&M University System Process for forming self-assembled polymer layers on a metal surface
JP2009173975A (ja) * 2008-01-22 2009-08-06 Canon Anelva Corp 金属微粒子の生成方法、金属含有ペーストの製造方法及び金属薄膜配線の形成方法
CN103014628B (zh) * 2012-12-31 2014-12-31 厦门建霖工业有限公司 一种金属基材全干法拉丝表面处理的方法
DE102015106811B4 (de) 2015-04-30 2022-02-03 VON ARDENNE Asset GmbH & Co. KG Verwendung einer Folienstruktur in einem Energiespeicher und Energiespeicher

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3829969A (en) * 1969-07-28 1974-08-20 Gillette Co Cutting tool with alloy coated sharpened edge
US4428812A (en) * 1983-04-04 1984-01-31 Borg-Warner Corporation Rapid rate reactive sputtering of metallic compounds

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP 62-1 20 470, Pat. Abstr. JP, C-456, 14.11.87, Vol. 11, No. 349 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0647727A1 (en) * 1993-10-01 1995-04-12 Kodak Limited Production of carriers for surface plasmon resonance

Also Published As

Publication number Publication date
US5024721A (en) 1991-06-18
JPH0735564B2 (ja) 1995-04-19
JPH0382747A (ja) 1991-04-08
DE4025615C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-04-09

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: YKK CORP., TOKIO/TOKYO, JP

8328 Change in the person/name/address of the agent

Free format text: ZIMMERMANN, H., DIPL.-ING. GRAF VON WENGERSKY, A., DIPL.-ING. KRAUS, J., DIPL.-PHYS. DR.RER.NAT. BUSCH, T., DIPL.-ING., PAT.-ANWAELTE, 80331 MUENCHEN

8339 Ceased/non-payment of the annual fee