DE3932618A1 - Vorrichtung zur messung mechanischer kraefte und kraftwirkungen - Google Patents

Vorrichtung zur messung mechanischer kraefte und kraftwirkungen

Info

Publication number
DE3932618A1
DE3932618A1 DE3932618A DE3932618A DE3932618A1 DE 3932618 A1 DE3932618 A1 DE 3932618A1 DE 3932618 A DE3932618 A DE 3932618A DE 3932618 A DE3932618 A DE 3932618A DE 3932618 A1 DE3932618 A1 DE 3932618A1
Authority
DE
Germany
Prior art keywords
support body
housing
intermediate piece
sensor element
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE3932618A
Other languages
German (de)
English (en)
Other versions
DE3932618C2 (enExample
Inventor
Hermann Dr Ing Sandmaier
Henderikus Dipl Ing Offereins
Godehard Dipl Phys Mayer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to DE3932618A priority Critical patent/DE3932618A1/de
Priority to EP90915082A priority patent/EP0493512B1/de
Priority to DD90344276A priority patent/DD298307A5/de
Priority to AT90915082T priority patent/ATE117798T1/de
Priority to PCT/DE1990/000738 priority patent/WO1991005231A1/de
Priority to DE59008380T priority patent/DE59008380D1/de
Publication of DE3932618A1 publication Critical patent/DE3932618A1/de
Application granted granted Critical
Publication of DE3932618C2 publication Critical patent/DE3932618C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
DE3932618A 1989-09-29 1989-09-29 Vorrichtung zur messung mechanischer kraefte und kraftwirkungen Granted DE3932618A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE3932618A DE3932618A1 (de) 1989-09-29 1989-09-29 Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
EP90915082A EP0493512B1 (de) 1989-09-29 1990-09-28 Vorrichtung zur messung mechanischer kräfte und kraftwirkungen
DD90344276A DD298307A5 (de) 1989-09-29 1990-09-28 Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
AT90915082T ATE117798T1 (de) 1989-09-29 1990-09-28 Vorrichtung zur messung mechanischer kräfte und kraftwirkungen.
PCT/DE1990/000738 WO1991005231A1 (de) 1989-09-29 1990-09-28 Vorrichtung zur messung mechanischer kräfte und kraftwirkungen
DE59008380T DE59008380D1 (de) 1989-09-29 1990-09-28 Vorrichtung zur messung mechanischer kräfte und kraftwirkungen.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3932618A DE3932618A1 (de) 1989-09-29 1989-09-29 Vorrichtung zur messung mechanischer kraefte und kraftwirkungen

Publications (2)

Publication Number Publication Date
DE3932618A1 true DE3932618A1 (de) 1991-04-18
DE3932618C2 DE3932618C2 (enExample) 1991-07-18

Family

ID=6390528

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3932618A Granted DE3932618A1 (de) 1989-09-29 1989-09-29 Vorrichtung zur messung mechanischer kraefte und kraftwirkungen
DE59008380T Expired - Fee Related DE59008380D1 (de) 1989-09-29 1990-09-28 Vorrichtung zur messung mechanischer kräfte und kraftwirkungen.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE59008380T Expired - Fee Related DE59008380D1 (de) 1989-09-29 1990-09-28 Vorrichtung zur messung mechanischer kräfte und kraftwirkungen.

Country Status (5)

Country Link
EP (1) EP0493512B1 (enExample)
AT (1) ATE117798T1 (enExample)
DD (1) DD298307A5 (enExample)
DE (2) DE3932618A1 (enExample)
WO (1) WO1991005231A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19844808C1 (de) * 1998-09-30 2000-04-20 Bosch Gmbh Robert Drucksensorvorrichtung
WO2003031926A1 (de) * 2001-10-04 2003-04-17 Robert Bosch Gmbh Mikromechanisches bauelement (auf drucksensormembran) mit balgartiger struktur für temperaturbewegungen
EP1498068A1 (en) * 2003-07-18 2005-01-19 Radi Medical Systems Ab Sensor and guide wire assembly

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT396921B (de) * 1992-01-22 1993-12-27 Betonwerk Nageler Ges Mbh Kleinkläranlage
DE102015120881A1 (de) 2015-12-02 2017-06-08 CiS Forschungsinstitut für Mikrosensorik GmbH Verfahren zur Herstellung einer räumlichen Struktur in einem Halbleitersubstrat sowie Sensorstruktur

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3426165A1 (de) * 1983-09-16 1985-04-04 Mettler Instrumente AG, Greifensee Kraftmesser
US4528855A (en) * 1984-07-02 1985-07-16 Itt Corporation Integral differential and static pressure transducer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI69211C (fi) * 1984-02-21 1985-12-10 Vaisala Oy Kapacitiv styckgivare
DE3436440A1 (de) * 1984-10-04 1986-04-10 Siemens AG, 1000 Berlin und 8000 München Halbleiter-messeinrichtung
US4800758A (en) * 1986-06-23 1989-01-31 Rosemount Inc. Pressure transducer with stress isolation for hard mounting

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3426165A1 (de) * 1983-09-16 1985-04-04 Mettler Instrumente AG, Greifensee Kraftmesser
US4528855A (en) * 1984-07-02 1985-07-16 Itt Corporation Integral differential and static pressure transducer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DE-B.: A. Heuberger "Mikromechanik" Springer-Verlag, Berlin 1989 *
DE-B.: Dissertation von H. Sandmaier, Technische Universität München, 1988, S. 22-43 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19844808C1 (de) * 1998-09-30 2000-04-20 Bosch Gmbh Robert Drucksensorvorrichtung
WO2003031926A1 (de) * 2001-10-04 2003-04-17 Robert Bosch Gmbh Mikromechanisches bauelement (auf drucksensormembran) mit balgartiger struktur für temperaturbewegungen
US6840111B2 (en) 2001-10-04 2005-01-11 Robert Bosch Gmbh Micromechanical component and pressure sensor having a component of this type
EP1498068A1 (en) * 2003-07-18 2005-01-19 Radi Medical Systems Ab Sensor and guide wire assembly

Also Published As

Publication number Publication date
DE59008380D1 (de) 1995-03-09
EP0493512A1 (de) 1992-07-08
DE3932618C2 (enExample) 1991-07-18
ATE117798T1 (de) 1995-02-15
WO1991005231A1 (de) 1991-04-18
EP0493512B1 (de) 1995-01-25
DD298307A5 (de) 1992-02-13

Similar Documents

Publication Publication Date Title
DE69328500T2 (de) In konstantem elektrischen feldangetriebener schwingungswandler mit mikromechanischem balken
DE69509773T2 (de) Verfahren zum einbau eines absolutdrucksensors
DE69523649T2 (de) Austauschbarer auf mehrere Messgrössen empfindlicher Wirbelsensor
DE4335588C2 (de) Drucksensor
DE2237535A1 (de) Dehnungsmesser-druckwandler
WO2002066948A1 (de) Drucksensormodul
DE102006013414A1 (de) Drucksensorvorrichtung
DE19743749A1 (de) Halbleiterdrucksensor
DE102011006517A1 (de) Druckfest gekapselter Differenzdrucksensor
DE102004041388A1 (de) Drucksensorzelle und diese verwendende Drucksensorvorrichtung
DE102004049899A1 (de) Drucksensor mit Sensorchip und Signalverarbeitungsschaltkreis auf einer gemeinsamen Trägersäule
DE102004006201A1 (de) Drucksensor mit Siliziumchip auf einer Stahlmembran
EP2335039B1 (de) Sensoranordnung, verfahren zum betrieb einer sensoranordnung und verfahren zur herstellung einer sensoranordnung
DE10130375B4 (de) Differenzdrucksensor
EP1065488A1 (de) Relativdrucksensor
DE69714204T2 (de) Druckmessgerät
EP0317664B1 (de) Messzelle, insbesondere für Relativ- und Differenzdruckmessungen
EP0096156B1 (de) Verfahren zur quasihermetischen, rückwirkungsarmen Abdeckung empfindlicher physikalischer Strukturen, insbesondere Dehnungsmessstreifen
DE3932618C2 (enExample)
DE102017212422A1 (de) Drucksensoranordnung und Verfahren zu deren Herstellung
EP0557917A1 (de) Beschleunigungsgeber
WO2002079740A1 (de) Kapazitives mikrosystem zur erfassung mechanischer verformungen, verwendung und betriebsverfahren
EP1516167A1 (de) Sensor und verfahren zur herstellung eines sensors
DE19752439C2 (de) Mikromechanischer Neigungssensor, insbesondere für Kraftfahrzeuge
DE10130376B4 (de) Differenzdrucksensor

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8363 Opposition against the patent
8365 Fully valid after opposition proceedings
8339 Ceased/non-payment of the annual fee