DD298307A5 - Vorrichtung zur messung mechanischer kraefte und kraftwirkungen - Google Patents
Vorrichtung zur messung mechanischer kraefte und kraftwirkungen Download PDFInfo
- Publication number
- DD298307A5 DD298307A5 DD90344276A DD34427690A DD298307A5 DD 298307 A5 DD298307 A5 DD 298307A5 DD 90344276 A DD90344276 A DD 90344276A DD 34427690 A DD34427690 A DD 34427690A DD 298307 A5 DD298307 A5 DD 298307A5
- Authority
- DD
- German Democratic Republic
- Prior art keywords
- intermediate piece
- sensor element
- housing
- support body
- mechanical
- Prior art date
Links
- 230000000694 effects Effects 0.000 title claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 claims abstract description 7
- 239000012528 membrane Substances 0.000 claims description 23
- 238000005530 etching Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 15
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000035882 stress Effects 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 230000018109 developmental process Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/145—Housings with stress relieving means
- G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Child & Adolescent Psychology (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3932618A DE3932618A1 (de) | 1989-09-29 | 1989-09-29 | Vorrichtung zur messung mechanischer kraefte und kraftwirkungen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DD298307A5 true DD298307A5 (de) | 1992-02-13 |
Family
ID=6390528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DD90344276A DD298307A5 (de) | 1989-09-29 | 1990-09-28 | Vorrichtung zur messung mechanischer kraefte und kraftwirkungen |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0493512B1 (enExample) |
| AT (1) | ATE117798T1 (enExample) |
| DD (1) | DD298307A5 (enExample) |
| DE (2) | DE3932618A1 (enExample) |
| WO (1) | WO1991005231A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT396921B (de) * | 1992-01-22 | 1993-12-27 | Betonwerk Nageler Ges Mbh | Kleinkläranlage |
| DE19844808C1 (de) * | 1998-09-30 | 2000-04-20 | Bosch Gmbh Robert | Drucksensorvorrichtung |
| DE10148859A1 (de) * | 2001-10-04 | 2003-04-10 | Bosch Gmbh Robert | Mikromechanisches Bauelement und Drucksensor mit einem solchen Bauelement |
| US7021152B2 (en) * | 2003-07-18 | 2006-04-04 | Radi Medical Systems Ab | Sensor and guide wire assembly |
| DE102015120881A1 (de) | 2015-12-02 | 2017-06-08 | CiS Forschungsinstitut für Mikrosensorik GmbH | Verfahren zur Herstellung einer räumlichen Struktur in einem Halbleitersubstrat sowie Sensorstruktur |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH662181A5 (de) * | 1983-09-16 | 1987-09-15 | Mettler Instrumente Ag | Kraftmesser. |
| FI69211C (fi) * | 1984-02-21 | 1985-12-10 | Vaisala Oy | Kapacitiv styckgivare |
| US4528855A (en) * | 1984-07-02 | 1985-07-16 | Itt Corporation | Integral differential and static pressure transducer |
| DE3436440A1 (de) * | 1984-10-04 | 1986-04-10 | Siemens AG, 1000 Berlin und 8000 München | Halbleiter-messeinrichtung |
| US4800758A (en) * | 1986-06-23 | 1989-01-31 | Rosemount Inc. | Pressure transducer with stress isolation for hard mounting |
-
1989
- 1989-09-29 DE DE3932618A patent/DE3932618A1/de active Granted
-
1990
- 1990-09-28 EP EP90915082A patent/EP0493512B1/de not_active Expired - Lifetime
- 1990-09-28 AT AT90915082T patent/ATE117798T1/de active
- 1990-09-28 DD DD90344276A patent/DD298307A5/de not_active IP Right Cessation
- 1990-09-28 DE DE59008380T patent/DE59008380D1/de not_active Expired - Fee Related
- 1990-09-28 WO PCT/DE1990/000738 patent/WO1991005231A1/de not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO1991005231A1 (de) | 1991-04-18 |
| ATE117798T1 (de) | 1995-02-15 |
| DE3932618C2 (enExample) | 1991-07-18 |
| DE3932618A1 (de) | 1991-04-18 |
| EP0493512A1 (de) | 1992-07-08 |
| DE59008380D1 (de) | 1995-03-09 |
| EP0493512B1 (de) | 1995-01-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ENJ | Ceased due to non-payment of renewal fee |