DE3930642C2 - Hochempfindlicher Teilchengrößendetektor mit Rauschunterdrückung - Google Patents
Hochempfindlicher Teilchengrößendetektor mit RauschunterdrückungInfo
- Publication number
- DE3930642C2 DE3930642C2 DE19893930642 DE3930642A DE3930642C2 DE 3930642 C2 DE3930642 C2 DE 3930642C2 DE 19893930642 DE19893930642 DE 19893930642 DE 3930642 A DE3930642 A DE 3930642A DE 3930642 C2 DE3930642 C2 DE 3930642C2
- Authority
- DE
- Germany
- Prior art keywords
- particle
- noise suppression
- particles
- detector
- detector elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 title claims description 102
- 230000001629 suppression Effects 0.000 title claims description 25
- 238000012545 processing Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 10
- 238000000149 argon plasma sintering Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 19
- 230000009467 reduction Effects 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 11
- 239000007789 gas Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000011109 contamination Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 230000018109 developmental process Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004377 microelectronic Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- -1 argon ion Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
- G01N2015/0244—Investigating particle size or size distribution by optical means with cutting-out molecular scatter
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/243,988 US4893928A (en) | 1986-04-14 | 1988-09-13 | Highly sensitive particle size detection device having noise cancellation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3930642A1 DE3930642A1 (de) | 1990-05-10 |
| DE3930642C2 true DE3930642C2 (de) | 1999-09-23 |
Family
ID=22920943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19893930642 Expired - Lifetime DE3930642C2 (de) | 1988-09-13 | 1989-09-13 | Hochempfindlicher Teilchengrößendetektor mit Rauschunterdrückung |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2879798B2 (ja) |
| DE (1) | DE3930642C2 (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07306133A (ja) * | 1994-03-14 | 1995-11-21 | Hitachi Electron Eng Co Ltd | 微粒子検出器 |
| DE19752034C1 (de) * | 1997-11-24 | 1999-08-12 | Andreas Trampe | Vorrichtung zur Detektion von Partikeln |
| CN106081777B (zh) * | 2016-06-26 | 2018-04-17 | 苏州中远电梯有限公司 | 一种垂直电梯用手动防坠曲柄连杆装置 |
| CN106959262B (zh) * | 2017-03-31 | 2023-09-26 | 中煤科工集团重庆研究院有限公司 | 基于光学的无动力粉尘检测系统、装置和检测方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3406289A (en) * | 1965-11-10 | 1968-10-15 | Univ Iowa State Res Found Inc | Laser small-particle detector and method |
| US3941982A (en) * | 1974-07-22 | 1976-03-02 | Particle Measuring Systems, Inc. | Method and apparatus for two-dimensional data acquisition |
| US4571079A (en) * | 1983-12-29 | 1986-02-18 | Particle Measuring Systems, Inc. | Aerosol sampling device and method with improved sample flow characteristics |
| US4594715A (en) * | 1983-11-17 | 1986-06-10 | Particle Measuring Systems, Inc. | Laser with stabilized external passive cavity |
| DE3712665A1 (de) * | 1986-04-14 | 1987-10-15 | Particle Measuring Syst | Teilchengroessendetektor mit hoher empfindlichkeit fuer umgebungen mit starker molekularstreuung |
-
1989
- 1989-09-13 DE DE19893930642 patent/DE3930642C2/de not_active Expired - Lifetime
- 1989-09-13 JP JP1238334A patent/JP2879798B2/ja not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3406289A (en) * | 1965-11-10 | 1968-10-15 | Univ Iowa State Res Found Inc | Laser small-particle detector and method |
| US3941982A (en) * | 1974-07-22 | 1976-03-02 | Particle Measuring Systems, Inc. | Method and apparatus for two-dimensional data acquisition |
| US4594715A (en) * | 1983-11-17 | 1986-06-10 | Particle Measuring Systems, Inc. | Laser with stabilized external passive cavity |
| US4571079A (en) * | 1983-12-29 | 1986-02-18 | Particle Measuring Systems, Inc. | Aerosol sampling device and method with improved sample flow characteristics |
| DE3712665A1 (de) * | 1986-04-14 | 1987-10-15 | Particle Measuring Syst | Teilchengroessendetektor mit hoher empfindlichkeit fuer umgebungen mit starker molekularstreuung |
Non-Patent Citations (2)
| Title |
|---|
| US Federal Standard 209 * |
| VDI-Norm 2083 * |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3930642A1 (de) | 1990-05-10 |
| JPH02193042A (ja) | 1990-07-30 |
| JP2879798B2 (ja) | 1999-04-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition |