DE3925274A1 - Feinbearbeitungsmaschine zum laeppen, feinschleifen oder polieren - Google Patents

Feinbearbeitungsmaschine zum laeppen, feinschleifen oder polieren

Info

Publication number
DE3925274A1
DE3925274A1 DE19893925274 DE3925274A DE3925274A1 DE 3925274 A1 DE3925274 A1 DE 3925274A1 DE 19893925274 DE19893925274 DE 19893925274 DE 3925274 A DE3925274 A DE 3925274A DE 3925274 A1 DE3925274 A1 DE 3925274A1
Authority
DE
Germany
Prior art keywords
working
disk
finishing machine
lapping
working disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19893925274
Other languages
German (de)
English (en)
Other versions
DE3925274C2 (enrdf_load_stackoverflow
Inventor
Dieter Dr Ing Simpfendoerfer
Alexander Dipl Ing Hofsess
Klaus Biebesheimer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diskus Werke Frankfurt am Main AG
Original Assignee
Diskus Werke Frankfurt am Main AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Diskus Werke Frankfurt am Main AG filed Critical Diskus Werke Frankfurt am Main AG
Priority to DE19893925274 priority Critical patent/DE3925274A1/de
Priority to EP90113032A priority patent/EP0411345B1/de
Priority to DE90113032T priority patent/DE59002816D1/de
Priority to EP19900113033 priority patent/EP0411346A3/de
Priority to US07/554,144 priority patent/US5109631A/en
Priority to US07/553,727 priority patent/US5197230A/en
Publication of DE3925274A1 publication Critical patent/DE3925274A1/de
Application granted granted Critical
Publication of DE3925274C2 publication Critical patent/DE3925274C2/de
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE19893925274 1989-07-31 1989-07-31 Feinbearbeitungsmaschine zum laeppen, feinschleifen oder polieren Granted DE3925274A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE19893925274 DE3925274A1 (de) 1989-07-31 1989-07-31 Feinbearbeitungsmaschine zum laeppen, feinschleifen oder polieren
EP90113032A EP0411345B1 (de) 1989-07-31 1990-07-07 Zuführ- und Dosiereinrichtung für das Läppgemisch bei Feinbearbeitungsmaschinen zum Läppen, Feinschleifen oder Polieren
DE90113032T DE59002816D1 (de) 1989-07-31 1990-07-07 Zuführ- und Dosiereinrichtung für das Läppgemisch bei Feinbearbeitungsmaschinen zum Läppen, Feinschleifen oder Polieren.
EP19900113033 EP0411346A3 (en) 1989-07-31 1990-07-07 Precision grinding machine for lapping, precision grinding or polishing
US07/554,144 US5109631A (en) 1989-07-31 1990-07-16 Finish-machining machine comprising means for feeding an abrasive slurry at a controlled rate
US07/553,727 US5197230A (en) 1989-07-31 1990-07-16 Finish-machining machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19893925274 DE3925274A1 (de) 1989-07-31 1989-07-31 Feinbearbeitungsmaschine zum laeppen, feinschleifen oder polieren

Publications (2)

Publication Number Publication Date
DE3925274A1 true DE3925274A1 (de) 1991-02-07
DE3925274C2 DE3925274C2 (enrdf_load_stackoverflow) 1991-10-24

Family

ID=6386197

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19893925274 Granted DE3925274A1 (de) 1989-07-31 1989-07-31 Feinbearbeitungsmaschine zum laeppen, feinschleifen oder polieren

Country Status (1)

Country Link
DE (1) DE3925274A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106956193A (zh) * 2017-02-28 2017-07-18 常熟市双月机械有限公司 一种具有抛光功能的磨床

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10007390B4 (de) * 1999-03-13 2008-11-13 Peter Wolters Gmbh Zweischeiben-Poliermaschine, insbesondere zur Bearbeitung von Halbleiterwafern

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1943659A1 (de) * 1968-08-28 1970-03-12 Liquid Abrasive Processes Ltd Laeppmaschine
DE2442081C3 (de) * 1974-09-03 1979-11-15 Jmj-Werkzeugmaschinen Gmbh Fuer Feinbearbeitung, 4020 Mettmann Läppmaschine
DE2950881A1 (de) * 1979-12-18 1981-06-25 Fa. Peter Wolters, 2370 Rendsburg Vorrichtung zum steuern einer werkzeugmaschine, deren werkzeug gegenueber dem werkstueck um eine achse rotiert und in dieser achse vorschiebbar ist
JPS61103774A (ja) * 1984-10-29 1986-05-22 Kokoro:Kk ラツピング装置
US4665658A (en) * 1984-05-21 1987-05-19 Commissariat A L'energie Atomique Double face abrading machine and device for transmitting current and fluid between a rotary structure and a non-rotary structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1943659A1 (de) * 1968-08-28 1970-03-12 Liquid Abrasive Processes Ltd Laeppmaschine
DE2442081C3 (de) * 1974-09-03 1979-11-15 Jmj-Werkzeugmaschinen Gmbh Fuer Feinbearbeitung, 4020 Mettmann Läppmaschine
DE2950881A1 (de) * 1979-12-18 1981-06-25 Fa. Peter Wolters, 2370 Rendsburg Vorrichtung zum steuern einer werkzeugmaschine, deren werkzeug gegenueber dem werkstueck um eine achse rotiert und in dieser achse vorschiebbar ist
US4665658A (en) * 1984-05-21 1987-05-19 Commissariat A L'energie Atomique Double face abrading machine and device for transmitting current and fluid between a rotary structure and a non-rotary structure
JPS61103774A (ja) * 1984-10-29 1986-05-22 Kokoro:Kk ラツピング装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DE-Z.: Werkstatt & Betrieb 121 (1988), S. 746-752 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106956193A (zh) * 2017-02-28 2017-07-18 常熟市双月机械有限公司 一种具有抛光功能的磨床

Also Published As

Publication number Publication date
DE3925274C2 (enrdf_load_stackoverflow) 1991-10-24

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee