DE69811420T2 - Schleifmaschine und Verfahren - Google Patents

Schleifmaschine und Verfahren

Info

Publication number
DE69811420T2
DE69811420T2 DE69811420T DE69811420T DE69811420T2 DE 69811420 T2 DE69811420 T2 DE 69811420T2 DE 69811420 T DE69811420 T DE 69811420T DE 69811420 T DE69811420 T DE 69811420T DE 69811420 T2 DE69811420 T2 DE 69811420T2
Authority
DE
Germany
Prior art keywords
grinding machine
grinding
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69811420T
Other languages
English (en)
Other versions
DE69811420D1 (de
Inventor
Kenichiro Nishi
Mitsuru Nukui
Kazuo Nakajima
Shirou Murai
Toyotaka Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippei Toyama Corp
Original Assignee
Nippei Toyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP8136897A external-priority patent/JPH10277897A/ja
Application filed by Nippei Toyama Corp filed Critical Nippei Toyama Corp
Application granted granted Critical
Publication of DE69811420D1 publication Critical patent/DE69811420D1/de
Publication of DE69811420T2 publication Critical patent/DE69811420T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/04—Headstocks; Working-spindles; Features relating thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00—Drives or gearings; Equipment therefor
    • B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
DE69811420T 1997-03-31 1998-03-26 Schleifmaschine und Verfahren Expired - Fee Related DE69811420T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP8136897A JPH10277897A (ja) 1997-03-31 1997-03-31 両頭研削盤
JP30086197 1997-10-31

Publications (2)

Publication Number Publication Date
DE69811420D1 DE69811420D1 (de) 2003-03-27
DE69811420T2 true DE69811420T2 (de) 2003-07-17

Family

ID=26422393

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69811420T Expired - Fee Related DE69811420T2 (de) 1997-03-31 1998-03-26 Schleifmaschine und Verfahren

Country Status (6)

Country Link
US (2) US6036585A (de)
EP (1) EP0868968B1 (de)
KR (1) KR100483738B1 (de)
DE (1) DE69811420T2 (de)
MY (1) MY118832A (de)
TW (1) TW434100B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006037490A1 (de) * 2006-08-10 2008-02-14 Peter Wolters Ag Doppelseiten-Bearbeitungsmaschine

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69811420T2 (de) * 1997-03-31 2003-07-17 Nippei Toyama Corp Schleifmaschine und Verfahren
KR20000076987A (ko) * 1999-03-31 2000-12-26 다구마시로오 피가공물 연삭방법 및 장치
US7648409B1 (en) * 1999-05-17 2010-01-19 Sumitomo Mitsubishi Silicon Corporation Double side polishing method and apparatus
US6206765B1 (en) * 1999-08-16 2001-03-27 Komag, Incorporated Non-rotational dresser for grinding stones
IL131525A0 (en) * 1999-08-23 2001-01-28 Leonid Kashchenevsky Hydrostatic spindle unit with automatic self centering of the workpiece
KR100453637B1 (ko) * 2002-07-11 2004-10-20 남상권 궁형연삭기용 연삭축의 전후조정장치
US20040176017A1 (en) * 2003-02-25 2004-09-09 Aleksander Zelenski Apparatus and methods for abrading a work piece
GB0504228D0 (en) * 2005-03-01 2005-04-06 Westwind Air Bearings Ltd Machining spindles
KR100926025B1 (ko) * 2005-09-14 2009-11-11 가부시키가이샤 오카모도 코사쿠 기카이 세이사쿠쇼 직사각형 기판의 양면 연마 장치 및 양면 연마 방법
EP2087965B1 (de) * 2008-01-16 2011-04-27 WENDT GmbH Planschleifmaschine
CN101774156A (zh) * 2010-03-03 2010-07-14 天津市中马骏腾精密机械制造有限公司 高精度磨床
EP2444199A1 (de) * 2010-10-20 2012-04-25 Supfina Grieshaber GmbH & Co. KG Doppelseiten-Planschleifmaschine
US20120110818A1 (en) * 2010-11-05 2012-05-10 Leonid Kashchenevsky Machine for rotating a part and method for doing the same
TWM421860U (en) * 2011-02-18 2012-02-01 Green Energy Technology Inc Position adjusting mechanism for grinding wheel
CH711186A1 (de) * 2015-06-15 2016-12-15 Reishauer Ag Spindeleinheit für eine Werkzeugmaschine zur Feinbearbeitung von Werkstücken mit nutförmigen Profilen.
JP6707831B2 (ja) * 2015-10-09 2020-06-10 株式会社Sumco 研削装置および研削方法
KR102531086B1 (ko) * 2021-01-06 2023-05-11 (주)미래컴퍼니 연마 장치 및 연마 방법
CN115338768B (zh) * 2022-08-11 2023-10-27 恒迈新材料科技(南通)有限公司 一种具有抛光压力反馈补偿功能的抛光装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2709321A (en) * 1951-03-14 1955-05-31 Norton Co Lapping machine
US3173230A (en) * 1962-12-03 1965-03-16 Wolters Peter Lapping machine
DE1652055B2 (de) * 1967-07-20 1973-02-22 Hahn & KoIb, 7000 Stuttgart Flachlaeppmaschine
GB1339266A (en) * 1970-08-28 1973-11-28 Williams D G Grinding or the like machine
DE2204581B2 (de) * 1972-02-01 1977-12-08 Wolters, Peter, 4020 Mettmann Steuereinrichtung fuer den bearbeitungsdruck einer laepp- oder honmaschine
US3916573A (en) * 1973-05-17 1975-11-04 Colorant Schmuckstein Gmbh Apparatus for grinding a gem stone
DE2950881C2 (de) * 1979-12-18 1983-06-01 Fa. Peter Wolters, 2370 Rendsburg Steuereinrichtung für den Bearbeitungsdruck an Läpp-, Hon- und Schleißmaschinen
JPS58196970A (ja) * 1982-05-12 1983-11-16 Citizen Watch Co Ltd 研削盤
DE8503153U1 (de) * 1985-02-06 1985-05-09 Benteler-Werke Ag Werk Neuhaus, 4790 Paderborn Bohrvorrichtung zum bohren von bruchempfindlichen platten
JPH0692042B2 (ja) * 1985-05-22 1994-11-16 豊田工機株式会社 主軸装置
JPS6244372A (ja) * 1985-08-16 1987-02-26 Citizen Watch Co Ltd 主軸構造
JPS648282A (en) * 1987-06-30 1989-01-12 Kanegafuchi Chemical Ind Brush-etching device
EP0411345B1 (de) * 1989-07-31 1993-09-22 Diskus Werke Frankfurt Am Main Aktiengesellschaft Zuführ- und Dosiereinrichtung für das Läppgemisch bei Feinbearbeitungsmaschinen zum Läppen, Feinschleifen oder Polieren
US5016399A (en) * 1990-04-09 1991-05-21 Paul Vinson Planetary lap
JP2567178B2 (ja) * 1992-02-14 1996-12-25 株式会社ノリタケカンパニーリミテド 砥石研削機
JPH0741603B2 (ja) * 1992-06-09 1995-05-10 株式会社太平製作所 木工用長尺刃物及びその研削方法並びに装置
US5516328A (en) * 1992-10-27 1996-05-14 Seiko Electronic Components Ltd. End surface polishing machine
US5558560A (en) * 1994-03-07 1996-09-24 Amada Metrecs Company, Limited Tool grinding machine
JP3555634B2 (ja) * 1995-11-24 2004-08-18 豊田工機株式会社 主軸装置
DE69811420T2 (de) * 1997-03-31 2003-07-17 Nippei Toyama Corp Schleifmaschine und Verfahren

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006037490A1 (de) * 2006-08-10 2008-02-14 Peter Wolters Ag Doppelseiten-Bearbeitungsmaschine
DE102006037490B4 (de) * 2006-08-10 2011-04-07 Peter Wolters Gmbh Doppelseiten-Bearbeitungsmaschine

Also Published As

Publication number Publication date
TW434100B (en) 2001-05-16
KR100483738B1 (ko) 2005-09-02
KR19980080910A (ko) 1998-11-25
US6220931B1 (en) 2001-04-24
DE69811420D1 (de) 2003-03-27
US6036585A (en) 2000-03-14
EP0868968A2 (de) 1998-10-07
EP0868968A3 (de) 2000-07-19
EP0868968B1 (de) 2003-02-19
MY118832A (en) 2005-01-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee