DE3902096A1 - Verfahren und vorrichtung zum bestimmen der dicke eines ueberzuges auf einem metallsubstrat - Google Patents
Verfahren und vorrichtung zum bestimmen der dicke eines ueberzuges auf einem metallsubstratInfo
- Publication number
- DE3902096A1 DE3902096A1 DE3902096A DE3902096A DE3902096A1 DE 3902096 A1 DE3902096 A1 DE 3902096A1 DE 3902096 A DE3902096 A DE 3902096A DE 3902096 A DE3902096 A DE 3902096A DE 3902096 A1 DE3902096 A1 DE 3902096A1
- Authority
- DE
- Germany
- Prior art keywords
- probe
- coating
- voltage
- substrate
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000576 coating method Methods 0.000 title claims description 215
- 239000011248 coating agent Substances 0.000 title claims description 205
- 239000000758 substrate Substances 0.000 title claims description 73
- 238000000034 method Methods 0.000 title claims description 28
- 239000000523 sample Substances 0.000 claims description 249
- 239000000463 material Substances 0.000 claims description 40
- 238000010438 heat treatment Methods 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 32
- 239000002184 metal Substances 0.000 claims description 32
- 238000007747 plating Methods 0.000 claims description 14
- 229910052703 rhodium Inorganic materials 0.000 claims description 14
- 239000010948 rhodium Substances 0.000 claims description 14
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 14
- 230000003647 oxidation Effects 0.000 claims description 12
- 238000007254 oxidation reaction Methods 0.000 claims description 12
- 238000005299 abrasion Methods 0.000 claims description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052802 copper Inorganic materials 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 5
- 239000010931 gold Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 230000010354 integration Effects 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims 2
- 239000004020 conductor Substances 0.000 description 20
- 238000005259 measurement Methods 0.000 description 16
- 238000012360 testing method Methods 0.000 description 14
- 230000007704 transition Effects 0.000 description 13
- 238000012546 transfer Methods 0.000 description 10
- 239000000203 mixture Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000011253 protective coating Substances 0.000 description 6
- 230000003321 amplification Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 230000001066 destructive effect Effects 0.000 description 5
- 238000013508 migration Methods 0.000 description 5
- 230000005012 migration Effects 0.000 description 5
- 238000003199 nucleic acid amplification method Methods 0.000 description 5
- 238000009675 coating thickness measurement Methods 0.000 description 4
- 230000005496 eutectics Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000003908 quality control method Methods 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 101100346656 Drosophila melanogaster strat gene Proteins 0.000 description 1
- 235000008694 Humulus lupulus Nutrition 0.000 description 1
- 244000025221 Humulus lupulus Species 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- -1 gold and copper Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 229910000601 superalloy Inorganic materials 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US07/153,292 US4920319A (en) | 1988-02-03 | 1988-02-03 | Method and apparatus for determining the thickness of a coating on a metal substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE3902096A1 true DE3902096A1 (de) | 1989-08-17 |
Family
ID=22546570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3902096A Withdrawn DE3902096A1 (de) | 1988-02-03 | 1989-01-25 | Verfahren und vorrichtung zum bestimmen der dicke eines ueberzuges auf einem metallsubstrat |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4920319A (https=) |
| JP (1) | JPH01282401A (https=) |
| CH (1) | CH678762A5 (https=) |
| DE (1) | DE3902096A1 (https=) |
| GB (1) | GB2215470A (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994016288A1 (de) * | 1993-01-12 | 1994-07-21 | Drm, Dr. Müller Ag | Verfahren und vorrichtung zur messung der dicke eines filterkuchens |
| DE10001516A1 (de) * | 2000-01-15 | 2001-07-19 | Alstom Power Schweiz Ag Baden | Zerstörungsfreies Verfahren zur Bestimmung der Schichtdicke einer metallischen Schutzschicht auf einem metalliscshen Grundmaterial |
| WO2005106381A1 (de) * | 2004-04-30 | 2005-11-10 | Fi Test- Und Messtechnik Gmbh | Messverfahren und anordnung zur bestimmung metallischer oberflächenschichten auf metallischen werkstücken |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5430376A (en) * | 1993-06-09 | 1995-07-04 | General Electric Company | Combined thermoelectric and eddy-current method and apparatus for nondestructive testing of metallic of semiconductor coated objects |
| US5544953A (en) * | 1994-05-18 | 1996-08-13 | General Electric Co. | Rolling-ball thermoelectric potential probe and housing for nondestructive testing of metallic and semiconductor objects |
| US6242926B1 (en) * | 1999-01-12 | 2001-06-05 | Ipec Precision, Inc. | Method and apparatus for moving an article relative to and between a pair of thickness measuring probes to develop a thickness map for the article |
| JP3705736B2 (ja) * | 2000-08-29 | 2005-10-12 | 株式会社リガク | 熱電気測定装置の試料組立体 |
| KR100846783B1 (ko) * | 2005-11-30 | 2008-07-16 | 삼성전자주식회사 | 불량기판 검출장치 및 방법 |
| US10060830B2 (en) * | 2014-06-09 | 2018-08-28 | United Technologies Corporation | In-situ system and method of determining coating integrity of turbomachinery components |
| CN104034250B (zh) * | 2014-06-30 | 2016-08-24 | 山东中科普锐检测技术有限公司 | 涂层测厚仪温度补偿测量方法 |
| US9582621B2 (en) | 2015-06-24 | 2017-02-28 | Globalfoundries Inc. | Modeling localized temperature changes on an integrated circuit chip using thermal potential theory |
| DE102019112238A1 (de) * | 2019-05-10 | 2020-11-12 | HELLA GmbH & Co. KGaA | Verfahren zur Kontrolle der Beschichtung eines elektronischen Bauteils |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA624746A (en) * | 1961-08-01 | J. Martin Edward | Method and apparatus for thickness measurement | |
| US2972882A (en) * | 1952-08-12 | 1961-02-28 | Gen Motors Corp | Apparatus for measuring coating thicknesses |
| US3016732A (en) * | 1952-10-01 | 1962-01-16 | Gen Motors Corp | Measurement of coating thicknesses by thermal means |
| US2750791A (en) * | 1952-11-06 | 1956-06-19 | Gen Motors Corp | Thermoelectric instrument for testing materials |
| GB768448A (en) * | 1954-03-08 | 1957-02-20 | British Non Ferrous Metals Res | Method and apparatus for the measurement of the thickness of metallic and other conducting coatings on backings of conducting materials |
| GB858345A (en) * | 1956-04-06 | 1961-01-11 | British Non Ferrous Metals Res | Method and apparatus for the measurement of the thickness of metallic and other conducting coatings on backings of conducting materials |
| SU110354A1 (ru) * | 1957-03-11 | 1957-11-30 | Л.М. Суворов | Способ определени толщины гальванического покрыти |
| US4419416A (en) * | 1981-08-05 | 1983-12-06 | United Technologies Corporation | Overlay coatings for superalloys |
-
1988
- 1988-02-03 US US07/153,292 patent/US4920319A/en not_active Expired - Fee Related
-
1989
- 1989-01-25 DE DE3902096A patent/DE3902096A1/de not_active Withdrawn
- 1989-01-26 CH CH236/89A patent/CH678762A5/de not_active IP Right Cessation
- 1989-02-02 GB GB8902289A patent/GB2215470A/en not_active Withdrawn
- 1989-02-03 JP JP1024073A patent/JPH01282401A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994016288A1 (de) * | 1993-01-12 | 1994-07-21 | Drm, Dr. Müller Ag | Verfahren und vorrichtung zur messung der dicke eines filterkuchens |
| DE10001516A1 (de) * | 2000-01-15 | 2001-07-19 | Alstom Power Schweiz Ag Baden | Zerstörungsfreies Verfahren zur Bestimmung der Schichtdicke einer metallischen Schutzschicht auf einem metalliscshen Grundmaterial |
| DE10001516B4 (de) * | 2000-01-15 | 2014-05-08 | Alstom Technology Ltd. | Zerstörungsfreies Verfahren zur Bestimmung der Schichtdicke einer metallischen Schutzschicht auf einem metallischen Grundmaterial |
| WO2005106381A1 (de) * | 2004-04-30 | 2005-11-10 | Fi Test- Und Messtechnik Gmbh | Messverfahren und anordnung zur bestimmung metallischer oberflächenschichten auf metallischen werkstücken |
Also Published As
| Publication number | Publication date |
|---|---|
| CH678762A5 (https=) | 1991-10-31 |
| US4920319A (en) | 1990-04-24 |
| JPH01282401A (ja) | 1989-11-14 |
| GB2215470A (en) | 1989-09-20 |
| GB8902289D0 (en) | 1989-03-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8139 | Disposal/non-payment of the annual fee |