DE3889232T2 - Verfahren zum quantitativen Nachweis von Sauerstoff. - Google Patents

Verfahren zum quantitativen Nachweis von Sauerstoff.

Info

Publication number
DE3889232T2
DE3889232T2 DE3889232T DE3889232T DE3889232T2 DE 3889232 T2 DE3889232 T2 DE 3889232T2 DE 3889232 T DE3889232 T DE 3889232T DE 3889232 T DE3889232 T DE 3889232T DE 3889232 T2 DE3889232 T2 DE 3889232T2
Authority
DE
Germany
Prior art keywords
oxygen
quantitative detection
quantitative
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3889232T
Other languages
English (en)
Other versions
DE3889232D1 (de
Inventor
Takashi Suzuki
Teruo Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Oxygen Co Ltd
Original Assignee
Japan Oxygen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Oxygen Co Ltd filed Critical Japan Oxygen Co Ltd
Application granted granted Critical
Publication of DE3889232D1 publication Critical patent/DE3889232D1/de
Publication of DE3889232T2 publication Critical patent/DE3889232T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/76Chemiluminescence; Bioluminescence
    • G01N21/766Chemiluminescence; Bioluminescence of gases
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/20Oxygen containing
    • Y10T436/207497Molecular oxygen
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/20Oxygen containing
    • Y10T436/207497Molecular oxygen
    • Y10T436/209163Dissolved or trace oxygen or oxygen content of a sealed environment
DE3889232T 1987-01-29 1988-01-28 Verfahren zum quantitativen Nachweis von Sauerstoff. Expired - Fee Related DE3889232T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1924187 1987-01-29

Publications (2)

Publication Number Publication Date
DE3889232D1 DE3889232D1 (de) 1994-06-01
DE3889232T2 true DE3889232T2 (de) 1994-11-24

Family

ID=11993902

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3889232T Expired - Fee Related DE3889232T2 (de) 1987-01-29 1988-01-28 Verfahren zum quantitativen Nachweis von Sauerstoff.

Country Status (4)

Country Link
US (2) US5021352A (de)
EP (1) EP0276858B1 (de)
JP (1) JP2726930B2 (de)
DE (1) DE3889232T2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2799885B2 (ja) * 1989-08-28 1998-09-21 日本酸素株式会社 微量酸素測定方法及びその装置
DE69423038T2 (de) * 1993-12-29 2000-06-29 Sony Corp Aufzeichnungsgerät für digitale Signale
GB9502050D0 (en) * 1995-02-02 1995-03-22 Euratom Apparatus and method for tritium measurement by gas scintillation
JP4791856B2 (ja) * 2006-03-02 2011-10-12 大陽日酸株式会社 微量酸素濃度計の排気ガスの除害装置およびこれを備える微量酸素濃度計ならびに微量酸素濃度計の排気ガスの除害方法
TWI348528B (en) * 2008-01-15 2011-09-11 Ind Tech Res Inst A protection gas control method for non-sealed process chamber

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3285703A (en) * 1963-05-31 1966-11-15 Nippon Oxygen Co Ltd Photosensitive means for determining trace oxygen by measuring chemiluminescence
US3528779A (en) * 1968-06-27 1970-09-15 Aerochem Res Lab Chemiluminescent method of detecting ozone
GB1596784A (en) * 1977-04-12 1981-08-26 British American Tobacco Co Gas detection

Also Published As

Publication number Publication date
EP0276858A2 (de) 1988-08-03
EP0276858A3 (en) 1990-08-22
EP0276858B1 (de) 1994-04-27
US5158746A (en) 1992-10-27
DE3889232D1 (de) 1994-06-01
JPS63302348A (ja) 1988-12-09
US5021352A (en) 1991-06-04
JP2726930B2 (ja) 1998-03-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee