DE3885436D1 - Halbleiterkristallstruktur und deren Herstellungsverfahren. - Google Patents
Halbleiterkristallstruktur und deren Herstellungsverfahren.Info
- Publication number
- DE3885436D1 DE3885436D1 DE88312391T DE3885436T DE3885436D1 DE 3885436 D1 DE3885436 D1 DE 3885436D1 DE 88312391 T DE88312391 T DE 88312391T DE 3885436 T DE3885436 T DE 3885436T DE 3885436 D1 DE3885436 D1 DE 3885436D1
- Authority
- DE
- Germany
- Prior art keywords
- layer
- semiconductor crystal
- semiconductor
- atom mono
- stratified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title abstract 7
- 239000013078 crystal Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010410 layer Substances 0.000 abstract 6
- 239000002356 single layer Substances 0.000 abstract 4
- 230000008021 deposition Effects 0.000 abstract 3
- 150000001875 compounds Chemical class 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02387—Group 13/15 materials
- H01L21/02395—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/02433—Crystal orientation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02463—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02546—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
- H01L29/045—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes by their particular orientation of crystalline planes
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Ceramic Engineering (AREA)
- Recrystallisation Techniques (AREA)
- Junction Field-Effect Transistors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33603687A JPH0748474B2 (ja) | 1987-12-29 | 1987-12-29 | 半導体結晶の構造 |
JP33603987A JPH0748475B2 (ja) | 1987-12-29 | 1987-12-29 | 半導体結晶の構造 |
JP33604087A JPH0748476B2 (ja) | 1987-12-29 | 1987-12-29 | 半導体結晶の構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3885436D1 true DE3885436D1 (de) | 1993-12-09 |
DE3885436T2 DE3885436T2 (de) | 1994-05-19 |
Family
ID=27340760
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE3885436T Expired - Fee Related DE3885436T2 (de) | 1987-12-29 | 1988-12-29 | Halbleiterkristallstruktur und deren Herstellungsverfahren. |
Country Status (3)
Country | Link |
---|---|
US (1) | US4980750A (de) |
EP (1) | EP0323249B1 (de) |
DE (1) | DE3885436T2 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5448084A (en) * | 1991-05-24 | 1995-09-05 | Raytheon Company | Field effect transistors on spinel substrates |
JP2776716B2 (ja) * | 1993-01-14 | 1998-07-16 | 日本電気株式会社 | 電界効果型トランジスタ |
US6833294B1 (en) * | 2003-06-26 | 2004-12-21 | Rj Mears, Llc | Method for making semiconductor device including band-engineered superlattice |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE634299A (de) * | 1962-06-29 | 1900-01-01 | ||
NL295293A (de) * | 1962-07-13 | |||
US3764424A (en) * | 1971-05-03 | 1973-10-09 | Bell Telephone Labor Inc | Fabrication of gallium arsenide devices |
US4205329A (en) * | 1976-03-29 | 1980-05-27 | Bell Telephone Laboratories, Incorporated | Periodic monolayer semiconductor structures grown by molecular beam epitaxy |
US4261771A (en) * | 1979-10-31 | 1981-04-14 | Bell Telephone Laboratories, Incorporated | Method of fabricating periodic monolayer semiconductor structures by molecular beam epitaxy |
JPS59207667A (ja) * | 1983-05-11 | 1984-11-24 | Hitachi Ltd | 半導体装置 |
NL8301745A (nl) * | 1983-05-17 | 1984-12-17 | Philips Nv | Halfgeleiderinrichting. |
JPS60176276A (ja) * | 1984-02-22 | 1985-09-10 | Nec Corp | ガリウム砒素集積回路 |
JPH0728080B2 (ja) * | 1984-09-25 | 1995-03-29 | 日本電気株式会社 | 半導体超格子構造体 |
US4835583A (en) * | 1985-08-30 | 1989-05-30 | Hitachi, Ltd. | Semiconductor device having strained superlattice buffer layers with In-doped GaAs substrate |
JPH0815212B2 (ja) * | 1985-08-30 | 1996-02-14 | ソニー株式会社 | 半導体装置 |
JPH084138B2 (ja) * | 1986-05-23 | 1996-01-17 | 日本電気株式会社 | 半導体装置 |
-
1988
- 1988-12-29 EP EP88312391A patent/EP0323249B1/de not_active Expired - Lifetime
- 1988-12-29 DE DE3885436T patent/DE3885436T2/de not_active Expired - Fee Related
- 1988-12-29 US US07/291,646 patent/US4980750A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US4980750A (en) | 1990-12-25 |
DE3885436T2 (de) | 1994-05-19 |
EP0323249A2 (de) | 1989-07-05 |
EP0323249B1 (de) | 1993-11-03 |
EP0323249A3 (en) | 1989-10-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |