DE3875957D1 - Verfahren und vorrichtung zur herstellung eines duennen organischen films. - Google Patents

Verfahren und vorrichtung zur herstellung eines duennen organischen films.

Info

Publication number
DE3875957D1
DE3875957D1 DE8888312200T DE3875957T DE3875957D1 DE 3875957 D1 DE3875957 D1 DE 3875957D1 DE 8888312200 T DE8888312200 T DE 8888312200T DE 3875957 T DE3875957 T DE 3875957T DE 3875957 D1 DE3875957 D1 DE 3875957D1
Authority
DE
Germany
Prior art keywords
producing
organic film
thin organic
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8888312200T
Other languages
English (en)
Other versions
DE3875957T2 (de
Inventor
Syun C O Patent Division Egusa
Akira C O Patent Divisio Miura
Nobuhiro C O Patent Divi Gemma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE3875957D1 publication Critical patent/DE3875957D1/de
Application granted granted Critical
Publication of DE3875957T2 publication Critical patent/DE3875957T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/18Processes for applying liquids or other fluent materials performed by dipping
    • B05D1/20Processes for applying liquids or other fluent materials performed by dipping substances to be applied floating on a fluid
    • B05D1/202Langmuir Blodgett films (LB films)
    • B05D1/206LB troughs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C3/00Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material
    • B05C3/02Apparatus in which the work is brought into contact with a bulk quantity of liquid or other fluent material the work being immersed in the liquid or other fluent material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
DE8888312200T 1988-03-16 1988-12-22 Verfahren und vorrichtung zur herstellung eines duennen organischen films. Expired - Fee Related DE3875957T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP6226388 1988-03-16
JP63235301A JP2558839B2 (ja) 1988-03-16 1988-09-20 有機薄膜の製造方法及び製膜装置

Publications (2)

Publication Number Publication Date
DE3875957D1 true DE3875957D1 (de) 1992-12-17
DE3875957T2 DE3875957T2 (de) 1993-03-25

Family

ID=26403331

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888312200T Expired - Fee Related DE3875957T2 (de) 1988-03-16 1988-12-22 Verfahren und vorrichtung zur herstellung eines duennen organischen films.

Country Status (4)

Country Link
US (1) US4927589A (de)
EP (1) EP0332786B1 (de)
JP (1) JP2558839B2 (de)
DE (1) DE3875957T2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2444036A (en) * 2006-11-21 2008-05-28 Univ Muenster Wilhelms Rotating a substrate through material on a liquid surface, to obtain a striped effect
US8455055B1 (en) * 2007-10-26 2013-06-04 The Boeing Company Aligning nanotubes
US20130112705A1 (en) * 2010-07-16 2013-05-09 Mcgill Technology Limited Dispensing apparatus
KR101684258B1 (ko) * 2015-05-13 2016-12-20 한국표준과학연구원 나노입자 충진 시스템

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4279855A (en) * 1973-05-02 1981-07-21 General Electric Company Method for the casting of ultrathin polymer membranes
DE3024288C2 (de) * 1980-06-27 1982-03-25 Europäisches Laboratorium für Molekularbiologie (EMBL), 6900 Heidelberg Verfahren und Vorrichtung zur Herstellung dünner Schichten
JPS5922724A (ja) * 1982-07-29 1984-02-06 Asahi Glass Co Ltd 薄膜の製造方法
FR2541936B1 (fr) * 1983-03-04 1985-10-04 Commissariat Energie Atomique Procede et dispositif pour la realisation de couches monomoleculaires alternees
FR2556244B1 (fr) * 1983-12-09 1986-08-08 Commissariat Energie Atomique Dispositif de formation et de depot sur un substrat de couches monomoleculaires
US4674436A (en) * 1984-04-19 1987-06-23 Canon Kabushiki Kaisha Film forming apparatus
US4716851A (en) * 1984-08-06 1988-01-05 Canon Kabushiki Kaisha Curved surface shaping apparatus and curved surface shaping method using the same
EP0200287B1 (de) * 1985-01-25 1991-03-20 Toray Industries, Inc. Verfahren und Vorrichtung zur Herstellung eines dünnen Gegenstandes
US4801476A (en) * 1986-09-24 1989-01-31 Exxon Research And Engineering Company Method for production of large area 2-dimensional arrays of close packed colloidal particles
US4987851A (en) * 1988-01-12 1991-01-29 Kabushiki Kaisha Toshiba Apparatus for forming organic thin film

Also Published As

Publication number Publication date
DE3875957T2 (de) 1993-03-25
JP2558839B2 (ja) 1996-11-27
EP0332786A2 (de) 1989-09-20
EP0332786B1 (de) 1992-11-11
EP0332786A3 (en) 1990-03-14
JPH01315368A (ja) 1989-12-20
US4927589A (en) 1990-05-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee