DE68900391D1 - Verfahren und vorrichtung zur herstellung eines duennen organischen filmes. - Google Patents

Verfahren und vorrichtung zur herstellung eines duennen organischen filmes.

Info

Publication number
DE68900391D1
DE68900391D1 DE8989300066T DE68900391T DE68900391D1 DE 68900391 D1 DE68900391 D1 DE 68900391D1 DE 8989300066 T DE8989300066 T DE 8989300066T DE 68900391 T DE68900391 T DE 68900391T DE 68900391 D1 DE68900391 D1 DE 68900391D1
Authority
DE
Germany
Prior art keywords
producing
organic film
thin organic
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8989300066T
Other languages
English (en)
Inventor
Satoshi C O Patent Divi Yasuda
Shigeru C O Patent Di Wakayama
Yoshiaki C O Patent Di Tsukumo
Takashi C O Patent D Haraguchi
Syun C O Patent Division Egusa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63306039A external-priority patent/JPH02152573A/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE68900391D1 publication Critical patent/DE68900391D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
    • B05D1/20—Processes for applying liquids or other fluent materials performed by dipping substances to be applied floating on a fluid
    • B05D1/202—Langmuir Blodgett films (LB films)
    • B05D1/206—LB troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Coating Apparatus (AREA)
DE8989300066T 1988-01-12 1989-01-05 Verfahren und vorrichtung zur herstellung eines duennen organischen filmes. Expired - Lifetime DE68900391D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP323788 1988-01-12
JP63306039A JPH02152573A (ja) 1988-12-05 1988-12-05 有機薄膜の形成装置および形成方法

Publications (1)

Publication Number Publication Date
DE68900391D1 true DE68900391D1 (de) 1991-12-12

Family

ID=26336771

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8989300066T Expired - Lifetime DE68900391D1 (de) 1988-01-12 1989-01-05 Verfahren und vorrichtung zur herstellung eines duennen organischen filmes.

Country Status (3)

Country Link
US (1) US4987851A (de)
EP (1) EP0327193B1 (de)
DE (1) DE68900391D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2558839B2 (ja) * 1988-03-16 1996-11-27 株式会社東芝 有機薄膜の製造方法及び製膜装置
JPH047031A (ja) * 1990-04-24 1992-01-10 Pioneer Electron Corp Ｌｂ膜作成装置
US6159291A (en) * 1997-08-11 2000-12-12 Dainippon Screen Mfg. Co., Ltd. Substrate treating apparatus
US6068878A (en) * 1998-09-03 2000-05-30 Micron Technology, Inc. Methods of forming layers of particulates on substrates
SG149680A1 (en) 2001-12-12 2009-02-27 Semiconductor Energy Lab Film formation apparatus and film formation method and cleaning method
WO2004054325A1 (ja) * 2002-12-12 2004-06-24 Semiconductor Energy Laboratory Co., Ltd. 発光装置、製造装置、成膜方法、およびクリーニング方法
US20040202793A1 (en) * 2003-04-08 2004-10-14 Harper Bruce M. Dip-spin coater
KR101281165B1 (ko) * 2006-02-08 2013-07-02 삼성전자주식회사 대류 정렬을 이용한 나노입자의 배열방법 및 그에 적용되는대류 정렬 장치
GB2444036A (en) * 2006-11-21 2008-05-28 Univ Muenster Wilhelms Rotating a substrate through material on a liquid surface, to obtain a striped effect
US10625298B2 (en) 2015-04-28 2020-04-21 Kaneka Corporation Dip coating device and method for producing coated member
CN106480453B (zh) * 2016-10-21 2018-12-07 陕西师范大学 单分子膜制备仪
US20230051995A1 (en) * 2021-08-10 2023-02-16 International Business Machines Corporation Multi-directional three-dimensional printing with a dynamic supporting base

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1832514A (en) * 1929-06-28 1931-11-17 Dunlop Rubber Co Ornamented rubber article and method of making the same
GB686259A (en) * 1949-05-26 1953-01-21 British Thomson Houston Co Ltd Improvements in and relating to powder coatings and processes of manufacture of the same
FR2541936B1 (fr) * 1983-03-04 1985-10-04 Commissariat Energie Atomique Procede et dispositif pour la realisation de couches monomoleculaires alternees
US4674436A (en) * 1984-04-19 1987-06-23 Canon Kabushiki Kaisha Film forming apparatus
EP0183426B1 (de) * 1984-11-13 1989-09-20 Joyce Loebl Limited Zusammenbau und Methode zur Herstellung eines Langmuir-Blodgettfilms
US4801476A (en) * 1986-09-24 1989-01-31 Exxon Research And Engineering Company Method for production of large area 2-dimensional arrays of close packed colloidal particles
DE3634976C2 (de) * 1986-10-14 1997-09-11 Tiyoda Seisakusho Koushoku Kk Vorrichtung zur automatischen Färbung von Präparaten zur mikroskopischen Untersuchung
US4848270A (en) * 1986-12-02 1989-07-18 Kabushiki Kaisha Toshiba Method and apparatus for forming thin organic film
JPH01291058A (ja) * 1988-05-17 1989-11-22 Mitsubishi Electric Corp 暖房機

Also Published As

Publication number Publication date
US4987851A (en) 1991-01-29
EP0327193A1 (de) 1989-08-09
EP0327193B1 (de) 1991-11-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee