DE3873871D1 - Anomalie-detektor in einem laseroszillator-leitungssystem. - Google Patents
Anomalie-detektor in einem laseroszillator-leitungssystem.Info
- Publication number
- DE3873871D1 DE3873871D1 DE8888901920T DE3873871T DE3873871D1 DE 3873871 D1 DE3873871 D1 DE 3873871D1 DE 8888901920 T DE8888901920 T DE 8888901920T DE 3873871 T DE3873871 T DE 3873871T DE 3873871 D1 DE3873871 D1 DE 3873871D1
- Authority
- DE
- Germany
- Prior art keywords
- medium gas
- pipes
- pump
- conduit system
- laseroscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62062445A JPS63229793A (ja) | 1987-03-19 | 1987-03-19 | レ−ザ発振器配管系の異常検出装置 |
PCT/JP1988/000171 WO1988007275A1 (en) | 1987-03-19 | 1988-02-19 | Abnormal condition detector in a laser oscillator conduit system |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3873871D1 true DE3873871D1 (de) | 1992-09-24 |
DE3873871T2 DE3873871T2 (de) | 1993-04-01 |
Family
ID=13200414
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8888901920T Expired - Fee Related DE3873871T2 (de) | 1987-03-19 | 1988-02-19 | Anomalie-detektor in einem laseroszillator-leitungssystem. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4935937A (de) |
EP (1) | EP0310670B1 (de) |
JP (1) | JPS63229793A (de) |
DE (1) | DE3873871T2 (de) |
WO (1) | WO1988007275A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0810775B2 (ja) * | 1988-08-03 | 1996-01-31 | ファナック株式会社 | Ncレーザ装置 |
US5383217A (en) * | 1989-05-09 | 1995-01-17 | Nikon Corporation | Exposure apparatus with laser source requiring new gas introduction |
JPH081972B2 (ja) * | 1991-07-29 | 1996-01-10 | 株式会社東芝 | ガスレーザ発振器 |
DE69427095T2 (de) | 1993-09-17 | 2001-11-15 | Exxonmobil Chem Patents Inc | Polymerisations katalysator systeme, ihre herstellung und verwendung |
JP3985416B2 (ja) * | 2000-03-02 | 2007-10-03 | 松下電器産業株式会社 | ガスレーザ発振装置 |
US20050070673A1 (en) * | 2001-10-01 | 2005-03-31 | Novak Leo R. | Thermoformable propylene polymer compositions |
JP3952057B2 (ja) * | 2004-10-07 | 2007-08-01 | 松下電器産業株式会社 | ガスレーザ発振装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4283686A (en) * | 1979-03-21 | 1981-08-11 | Avco Everett Research Laboratory, Inc. | Laser operation with closed gas and tuned duct pulsing |
JPS55145068U (de) * | 1979-04-06 | 1980-10-17 | ||
JPS5937253B2 (ja) * | 1979-04-23 | 1984-09-08 | 新明和工業株式会社 | ダンプカ− |
JPS55160483A (en) * | 1979-05-31 | 1980-12-13 | Nippon Sekigaisen Kogyo Kk | Laser device |
JPS57104287A (en) * | 1980-12-22 | 1982-06-29 | Sumitomo Electric Ind Ltd | Laser output controlling device |
JPS57146356A (en) * | 1981-03-04 | 1982-09-09 | Fujitsu Ltd | Data transfer controller |
JPS57146356U (de) * | 1981-03-06 | 1982-09-14 | ||
JPS6041276A (ja) * | 1983-08-17 | 1985-03-04 | Mitsubishi Electric Corp | レ−ザ媒質ガス交換装置 |
JPS6052081A (ja) * | 1983-09-01 | 1985-03-23 | Mitsubishi Electric Corp | 炭酸ガスレ−ザ発振器のガス交換装置 |
JPS6185883A (ja) * | 1984-10-04 | 1986-05-01 | Mitsubishi Electric Corp | ガス循環型レ−ザ発振装置 |
FR2591816B1 (fr) * | 1985-12-16 | 1990-10-05 | Asulab Sa | Laser a gaz equipe de vannes a trois fonctions |
JPS62282478A (ja) * | 1986-05-31 | 1987-12-08 | Toshiba Corp | ガスレ−ザ発振装置 |
DE3768410D1 (de) * | 1986-09-30 | 1991-04-11 | Siemens Ag | Einrichtung zur herstellung eines gasgemisches. |
US4794613A (en) * | 1987-07-27 | 1988-12-27 | Prc Corporation | Laser fluid flow control apparatus and method |
DE4211454C2 (de) * | 1992-04-06 | 1995-11-02 | Degussa | Verfahren zum Verlängern der Topfzeit bei der Härtung von Epoxidharzen mit Isophorondiamin-Isomerengemischen |
JPH0652081A (ja) * | 1992-07-28 | 1994-02-25 | Fujitsu Ltd | パケット通信におけるローカルメモリ型dma制御方式 |
-
1987
- 1987-03-19 JP JP62062445A patent/JPS63229793A/ja active Granted
-
1988
- 1988-02-19 DE DE8888901920T patent/DE3873871T2/de not_active Expired - Fee Related
- 1988-02-19 EP EP88901920A patent/EP0310670B1/de not_active Expired
- 1988-02-19 WO PCT/JP1988/000171 patent/WO1988007275A1/ja active IP Right Grant
- 1988-03-19 US US07/295,950 patent/US4935937A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1988007275A1 (en) | 1988-09-22 |
EP0310670A4 (de) | 1989-08-09 |
JPS63229793A (ja) | 1988-09-26 |
JPH0341996B2 (de) | 1991-06-25 |
DE3873871T2 (de) | 1993-04-01 |
US4935937A (en) | 1990-06-19 |
EP0310670B1 (de) | 1992-08-19 |
EP0310670A1 (de) | 1989-04-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: BLUMBACH, KRAMER & PARTNER, 81245 MUENCHEN |
|
8328 | Change in the person/name/address of the agent |
Representative=s name: KRAMER - BARSKE - SCHMIDTCHEN, 81245 MUENCHEN |
|
8320 | Willingness to grant licences declared (paragraph 23) | ||
8339 | Ceased/non-payment of the annual fee |