DE3852296D1 - Beugungsgitter und Herstellungsverfahren dafür. - Google Patents

Beugungsgitter und Herstellungsverfahren dafür.

Info

Publication number
DE3852296D1
DE3852296D1 DE3852296T DE3852296T DE3852296D1 DE 3852296 D1 DE3852296 D1 DE 3852296D1 DE 3852296 T DE3852296 T DE 3852296T DE 3852296 T DE3852296 T DE 3852296T DE 3852296 D1 DE3852296 D1 DE 3852296D1
Authority
DE
Germany
Prior art keywords
facets
diffraction grating
manufacturing process
process therefor
propagative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE3852296T
Other languages
English (en)
Other versions
DE3852296T2 (de
Inventor
Jean-Pierre Laude
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Jobin Yvon SAS
Original Assignee
Horiba Jobin Yvon SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8200363&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3852296(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Horiba Jobin Yvon SAS filed Critical Horiba Jobin Yvon SAS
Publication of DE3852296D1 publication Critical patent/DE3852296D1/de
Application granted granted Critical
Publication of DE3852296T2 publication Critical patent/DE3852296T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Head (AREA)
  • Optical Integrated Circuits (AREA)
DE3852296T 1988-03-18 1988-03-18 Beugungsgitter und Herstellungsverfahren dafür. Revoked DE3852296T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88400664A EP0332790B1 (de) 1988-03-18 1988-03-18 Beugungsgitter und Herstellungsverfahren dafür

Publications (2)

Publication Number Publication Date
DE3852296D1 true DE3852296D1 (de) 1995-01-12
DE3852296T2 DE3852296T2 (de) 1995-04-13

Family

ID=8200363

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3852296T Revoked DE3852296T2 (de) 1988-03-18 1988-03-18 Beugungsgitter und Herstellungsverfahren dafür.

Country Status (6)

Country Link
US (1) US5080465A (de)
EP (1) EP0332790B1 (de)
JP (1) JP2852757B2 (de)
AT (1) ATE114826T1 (de)
CA (1) CA1323516C (de)
DE (1) DE3852296T2 (de)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04211202A (ja) * 1990-03-19 1992-08-03 Canon Inc 反射型回折格子および該回折格子を用いた装置
US5895111A (en) 1992-04-08 1999-04-20 Anthony's Manufacturing Company, Inc. Display case with lens lighting system
JPH07505302A (ja) * 1992-04-08 1995-06-15 ニュー　アンソニー　インコーポレイテッド レンズ照明システムを備えるディスプレイケース
US5902034A (en) * 1992-04-08 1999-05-11 Anthony's Manufacturing Company, Inc. Display case with lens lighting system
JPH06194123A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置
US5471372A (en) * 1993-12-06 1995-11-28 Ardco, Inc. Lighting system for commercial refrigerator doors
US5801889A (en) * 1995-08-16 1998-09-01 Eastman Kodak Company Technique to eliminate scattered light in diffractive optical elements
DE69827604T2 (de) * 1997-01-17 2005-04-28 Cymer, Inc., San Diego Reflektierender überzug für wiederholtes beugungsgitter
US6162495A (en) * 1997-09-29 2000-12-19 Cymer, Inc. Protective overcoat for replicated diffraction gratings
US6330261B1 (en) 1997-07-18 2001-12-11 Cymer, Inc. Reliable, modular, production quality narrow-band high rep rate ArF excimer laser
US6511703B2 (en) * 1997-09-29 2003-01-28 Cymer, Inc. Protective overcoat for replicated diffraction gratings
US6424407B1 (en) 1998-03-09 2002-07-23 Otm Technologies Ltd. Optical translation measurement
JPH11326617A (ja) 1998-05-13 1999-11-26 Olympus Optical Co Ltd 回折光学素子を含む光学系及びその設計方法
JP3559710B2 (ja) 1998-05-25 2004-09-02 キヤノン株式会社 回折光学素子及びそれを用いた走査光学装置
US6795473B1 (en) * 1999-06-23 2004-09-21 Lambda Physik Ag Narrow band excimer laser with a prism-grating as line-narrowing optical element
FR2779534B1 (fr) * 1998-06-09 2000-07-07 Commissariat Energie Atomique Procede de fabrication de composants optiques par replication
US6608679B1 (en) * 1998-12-21 2003-08-19 Xerox Corporation Spectrophotometric analysis of input light
US6539149B1 (en) * 1999-08-10 2003-03-25 Lucent Technologies Inc. Waveguide grating router employing transmissive Echelle gratings
JP2001156393A (ja) * 1999-11-29 2001-06-08 Ando Electric Co Ltd Ｖ溝格子ミラー及びこれを用いた外部共振器型波長可変光源
US6400509B1 (en) * 2000-04-07 2002-06-04 Zolo Technologies, Inc. Apparatus and method for the reduction of polarization sensitivity in diffraction gratings used in fiber optic communications devices
US20040196556A1 (en) * 2000-06-02 2004-10-07 Cappiello Gregory G. Diffraction grating for wavelength division multiplexing/demultiplexing devices
US6577786B1 (en) 2000-06-02 2003-06-10 Digital Lightwave, Inc. Device and method for optical performance monitoring in an optical communications network
US6517734B1 (en) * 2000-07-13 2003-02-11 Network Photonics, Inc. Grating fabrication process using combined crystalline-dependent and crystalline-independent etching
AU2001279319A1 (en) * 2000-08-01 2002-02-13 James Cowan Directional diffuser
JP2002148115A (ja) * 2000-11-09 2002-05-22 Mitsubishi Gas Chem Co Inc 分光器およびそれを用いた光波長多重器
US6597452B1 (en) 2000-11-17 2003-07-22 Jobin Yvon, Inc. Compact littrow-type scanning spectrometer
US7245432B2 (en) * 2001-03-28 2007-07-17 Main Street Ventures, Llc Dual diffraction-grating device
JP2003240931A (ja) * 2001-12-13 2003-08-27 Canon Inc 回折光学素子及びその製造方法
DE10304551A1 (de) * 2003-02-04 2004-08-12 Mann + Hummel Gmbh Stellelement mit Lageerkennung
US20040183220A1 (en) * 2003-03-18 2004-09-23 Avinash Dalmia Ultra thin layer coating using self-assembled molecules as a separating layer for diffraction grating application
JP4475501B2 (ja) * 2003-10-09 2010-06-09 インターナショナル・ビジネス・マシーンズ・コーポレーション 分光素子、回折格子、複合回折格子、カラー表示装置、および分波器
US7561611B2 (en) * 2005-02-03 2009-07-14 Corning Incorporated Extended-lifetime elements for excimer lasers
US20060268418A1 (en) * 2005-05-05 2006-11-30 Kim Jong M Optical films, method of making and method of using
US8314989B1 (en) 2006-12-29 2012-11-20 Lightsmyth Technologies Inc. Decorative, ornamental, or jewelry articles having arrays of diffraction gratings
DE102007032371A1 (de) * 2007-07-06 2009-01-15 Carl Zeiss Laser Optics Gmbh Verfahren zum Beschichten eines optischen Bauelements für eine Laseranordnung
US8233218B1 (en) 2007-07-18 2012-07-31 Lightsmyth Technologies Inc. Decorative, ornamental, or jewelry articles having diffraction gratings
US8270079B1 (en) 2007-11-15 2012-09-18 Lightsmyth Technologies Inc. Decorative, ornamental, or jewelry articles having diffraction gratings
US8593732B1 (en) 2010-01-23 2013-11-26 Lightsmyth Technologies, Inc. Partially metallized total internal reflection immersion grating
JP5522448B2 (ja) * 2010-02-09 2014-06-18 株式会社ニコン 回折光学素子
GB201005964D0 (en) * 2010-04-09 2010-05-26 The Technology Partnership Plc Embedded grating structure
WO2013096974A1 (en) * 2011-12-21 2013-06-27 THE UNITED STATES OF AMERICA, as represented by THE SECRETARY DEPT. OF HEALTH AND HUMAN SERVICES Multilayer-coated micro grating array for x-ray phase sensitive and scattering sensitive imaging
TWI440833B (zh) * 2011-12-30 2014-06-11 Oto Photonics Inc 混合式繞射光柵、模具及繞射光柵及其模具的製造方法
WO2015062641A1 (en) * 2013-10-29 2015-05-07 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Optical grating coupling structure
JP2015169862A (ja) * 2014-03-10 2015-09-28 キヤノン株式会社 回折格子、レーザ装置、および回折格子の製造方法
WO2015168182A1 (en) 2014-04-28 2015-11-05 Finisar Corporation Reflective diffraction gratings employing efficiency enhancement or etch barrier layers
TWI715599B (zh) 2016-07-12 2021-01-11 台灣超微光學股份有限公司 光譜儀模組及其製作方法
US10234694B2 (en) * 2016-07-15 2019-03-19 Canon U.S.A., Inc. Spectrally encoded probes
CN106547146A (zh) * 2017-01-22 2017-03-29 京东方科技集团股份有限公司 像素结构及其制造方法、阵列基板和显示装置
US10690831B2 (en) 2018-11-20 2020-06-23 Facebook Technologies, Llc Anisotropically formed diffraction grating device
US11399709B2 (en) * 2019-03-18 2022-08-02 Welch Allyn, Inc. Speculum tip element and method for optimizing light efficiency/emission of a speculum tip element
CN112965228B (zh) * 2021-03-19 2023-01-31 重庆京东方显示照明有限公司 一种防窥膜、显示面板及显示装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3237508A (en) * 1962-04-12 1966-03-01 Bausch & Lomb Reflecting diffraction grating for minimizing anomalies
US3384756A (en) * 1965-04-21 1968-05-21 Applied Res Lab Inc Peaked monochromator having a sharply blazed diffraction grating which is always operated at the peak of the blaze
FR2172883B1 (de) * 1972-02-25 1974-12-13 Anvar
JPS5092148A (de) * 1973-12-14 1975-07-23
EP0007108B1 (de) * 1978-07-18 1983-04-13 Nippon Telegraph and Telephone Public Corporation Verfahren zur Herstellung einer Beugungsgitterstruktur
JPS5965810A (ja) * 1982-10-08 1984-04-14 Hitachi Ltd 回折格子の製作方法
JPS60230601A (ja) * 1984-05-01 1985-11-16 Masayasu Negishi 膜処理方法
NL8402304A (nl) * 1984-07-20 1986-02-17 Philips Nv Beeldbuis.

Also Published As

Publication number Publication date
EP0332790A1 (de) 1989-09-20
EP0332790B1 (de) 1994-11-30
JPH0220802A (ja) 1990-01-24
US5080465A (en) 1992-01-14
JP2852757B2 (ja) 1999-02-03
CA1323516C (en) 1993-10-26
DE3852296T2 (de) 1995-04-13
ATE114826T1 (de) 1994-12-15

Similar Documents

Publication Publication Date Title
DE3852296T2 (de) Beugungsgitter und Herstellungsverfahren dafür.
ATE234488T1 (de) Optisches datenelement
EP0344810A3 (de) Anzeigevorrichtung
CA2013538A1 (en) Optical element and optical pickup device comprising it
DE3682675D1 (de) Interferometrische maskensubstratausrichtung.
DE3789200D1 (de) Würfeleckige retroreflektierende Körper mit vorgegebenem Divergenzprofil.
DE3587071D1 (de) Optische anordnung mit einem konkavspiegel oder konkavgitter.
EP0435194A3 (en) Multi-core optical waveguide bragg grating light redirecting arrangement
KR860005250A (ko) 광학적 저역 필터
EP0390092A3 (de) Kodiereinrichtung
CA2013764A1 (en) Optical diffraction grating element, and optical pick-up device and optical scan device that respectively comprise optical diffraction grating element
CA2264843A1 (en) Phase mask for machining optical fibers, and its fabrication method
IT8420660A0 (it) Multiplatore/demultiplatore ottico a divisione di lunghezza d'onda a reticolo di diffrazione.
CA2138436A1 (en) Optical Pickup
IT1250930B (it) Apparecchio per produrre un regolo di misura ad ologramma e regolo di misura ad ologramma cosi' prodotto
DE3888813T2 (de) Spektralphotometer mit Verwendung eines konkaven holographischen Beugungsgitters.
GB8706023D0 (en) Optical beam expanders
EP0348863A3 (de) Laserstrahlblende
EP0380320A3 (de) Optisches Abtastgerät
CA2043978A1 (en) Polarization diffraction element and polarization detector employing the same
EP0251815A3 (de) Dekorative Oberfläche und Verfahren zu ihrer Herstellung
CA2029674A1 (en) Manufacturing method of optical diffraction grating element
JPS6474414A (en) Optical displacement detector
JPS6476005A (en) Wavelength multiple optical demultiplexer
JPS5616104A (en) Diffraction grating type optical branching filter

Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation