ATE114826T1 - Beugungsgitter und herstellungsverfahren dafür. - Google Patents
Beugungsgitter und herstellungsverfahren dafür.Info
- Publication number
- ATE114826T1 ATE114826T1 AT88400664T AT88400664T ATE114826T1 AT E114826 T1 ATE114826 T1 AT E114826T1 AT 88400664 T AT88400664 T AT 88400664T AT 88400664 T AT88400664 T AT 88400664T AT E114826 T1 ATE114826 T1 AT E114826T1
- Authority
- AT
- Austria
- Prior art keywords
- facets
- manufacturing
- diffraction gratings
- propagative
- oriented
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/90—Methods
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Head (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP88400664A EP0332790B1 (de) | 1988-03-18 | 1988-03-18 | Beugungsgitter und Herstellungsverfahren dafür |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE114826T1 true ATE114826T1 (de) | 1994-12-15 |
Family
ID=8200363
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT88400664T ATE114826T1 (de) | 1988-03-18 | 1988-03-18 | Beugungsgitter und herstellungsverfahren dafür. |
Country Status (6)
Country | Link |
---|---|
US (1) | US5080465A (de) |
EP (1) | EP0332790B1 (de) |
JP (1) | JP2852757B2 (de) |
AT (1) | ATE114826T1 (de) |
CA (1) | CA1323516C (de) |
DE (1) | DE3852296T2 (de) |
Families Citing this family (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04211202A (ja) * | 1990-03-19 | 1992-08-03 | Canon Inc | 反射型回折格子および該回折格子を用いた装置 |
US5895111A (en) | 1992-04-08 | 1999-04-20 | Anthony's Manufacturing Company, Inc. | Display case with lens lighting system |
WO1993020733A1 (en) * | 1992-04-08 | 1993-10-28 | Anthony's Manufacturing Company, Inc. | Display case with lens lighting system |
US5902034A (en) * | 1992-04-08 | 1999-05-11 | Anthony's Manufacturing Company, Inc. | Display case with lens lighting system |
JPH06194123A (ja) * | 1992-12-24 | 1994-07-15 | Canon Inc | 変位検出装置 |
US5471372A (en) * | 1993-12-06 | 1995-11-28 | Ardco, Inc. | Lighting system for commercial refrigerator doors |
US5801889A (en) * | 1995-08-16 | 1998-09-01 | Eastman Kodak Company | Technique to eliminate scattered light in diffractive optical elements |
JP2920164B2 (ja) * | 1997-01-17 | 1999-07-19 | サイマー,インコーポレーテッド | 複製回折格子のための反射性保護膜 |
US6330261B1 (en) | 1997-07-18 | 2001-12-11 | Cymer, Inc. | Reliable, modular, production quality narrow-band high rep rate ArF excimer laser |
US6162495A (en) | 1997-09-29 | 2000-12-19 | Cymer, Inc. | Protective overcoat for replicated diffraction gratings |
US6511703B2 (en) * | 1997-09-29 | 2003-01-28 | Cymer, Inc. | Protective overcoat for replicated diffraction gratings |
US6424407B1 (en) | 1998-03-09 | 2002-07-23 | Otm Technologies Ltd. | Optical translation measurement |
JPH11326617A (ja) * | 1998-05-13 | 1999-11-26 | Olympus Optical Co Ltd | 回折光学素子を含む光学系及びその設計方法 |
JP3559710B2 (ja) * | 1998-05-25 | 2004-09-02 | キヤノン株式会社 | 回折光学素子及びそれを用いた走査光学装置 |
US6795473B1 (en) * | 1999-06-23 | 2004-09-21 | Lambda Physik Ag | Narrow band excimer laser with a prism-grating as line-narrowing optical element |
FR2779534B1 (fr) * | 1998-06-09 | 2000-07-07 | Commissariat Energie Atomique | Procede de fabrication de composants optiques par replication |
US6608679B1 (en) * | 1998-12-21 | 2003-08-19 | Xerox Corporation | Spectrophotometric analysis of input light |
US6539149B1 (en) * | 1999-08-10 | 2003-03-25 | Lucent Technologies Inc. | Waveguide grating router employing transmissive Echelle gratings |
JP2001156393A (ja) * | 1999-11-29 | 2001-06-08 | Ando Electric Co Ltd | V溝格子ミラー及びこれを用いた外部共振器型波長可変光源 |
US6400509B1 (en) * | 2000-04-07 | 2002-06-04 | Zolo Technologies, Inc. | Apparatus and method for the reduction of polarization sensitivity in diffraction gratings used in fiber optic communications devices |
US6577786B1 (en) | 2000-06-02 | 2003-06-10 | Digital Lightwave, Inc. | Device and method for optical performance monitoring in an optical communications network |
US20040196556A1 (en) * | 2000-06-02 | 2004-10-07 | Cappiello Gregory G. | Diffraction grating for wavelength division multiplexing/demultiplexing devices |
US6517734B1 (en) * | 2000-07-13 | 2003-02-11 | Network Photonics, Inc. | Grating fabrication process using combined crystalline-dependent and crystalline-independent etching |
TW571121B (en) | 2000-08-01 | 2004-01-11 | James Cowan | Directional reflector, method for making directional reflector and method for obtaining white light using directional reflector having a reflective surface |
JP2002148115A (ja) * | 2000-11-09 | 2002-05-22 | Mitsubishi Gas Chem Co Inc | 分光器およびそれを用いた光波長多重器 |
US6597452B1 (en) | 2000-11-17 | 2003-07-22 | Jobin Yvon, Inc. | Compact littrow-type scanning spectrometer |
US7245432B2 (en) * | 2001-03-28 | 2007-07-17 | Main Street Ventures, Llc | Dual diffraction-grating device |
JP2003240931A (ja) * | 2001-12-13 | 2003-08-27 | Canon Inc | 回折光学素子及びその製造方法 |
DE10304551A1 (de) * | 2003-02-04 | 2004-08-12 | Mann + Hummel Gmbh | Stellelement mit Lageerkennung |
US20040183220A1 (en) * | 2003-03-18 | 2004-09-23 | Avinash Dalmia | Ultra thin layer coating using self-assembled molecules as a separating layer for diffraction grating application |
JP4475501B2 (ja) * | 2003-10-09 | 2010-06-09 | インターナショナル・ビジネス・マシーンズ・コーポレーション | 分光素子、回折格子、複合回折格子、カラー表示装置、および分波器 |
US7561611B2 (en) * | 2005-02-03 | 2009-07-14 | Corning Incorporated | Extended-lifetime elements for excimer lasers |
US20060268418A1 (en) * | 2005-05-05 | 2006-11-30 | Kim Jong M | Optical films, method of making and method of using |
US8314989B1 (en) | 2006-12-29 | 2012-11-20 | Lightsmyth Technologies Inc. | Decorative, ornamental, or jewelry articles having arrays of diffraction gratings |
DE102007032371A1 (de) * | 2007-07-06 | 2009-01-15 | Carl Zeiss Laser Optics Gmbh | Verfahren zum Beschichten eines optischen Bauelements für eine Laseranordnung |
US8233218B1 (en) | 2007-07-18 | 2012-07-31 | Lightsmyth Technologies Inc. | Decorative, ornamental, or jewelry articles having diffraction gratings |
US8270079B1 (en) * | 2007-11-15 | 2012-09-18 | Lightsmyth Technologies Inc. | Decorative, ornamental, or jewelry articles having diffraction gratings |
US8593732B1 (en) | 2010-01-23 | 2013-11-26 | Lightsmyth Technologies, Inc. | Partially metallized total internal reflection immersion grating |
JP5522448B2 (ja) * | 2010-02-09 | 2014-06-18 | 株式会社ニコン | 回折光学素子 |
GB201005964D0 (en) * | 2010-04-09 | 2010-05-26 | The Technology Partnership Plc | Embedded grating structure |
WO2013096974A1 (en) * | 2011-12-21 | 2013-06-27 | THE UNITED STATES OF AMERICA, as represented by THE SECRETARY DEPT. OF HEALTH AND HUMAN SERVICES | Multilayer-coated micro grating array for x-ray phase sensitive and scattering sensitive imaging |
TWI440833B (zh) * | 2011-12-30 | 2014-06-11 | Oto Photonics Inc | 混合式繞射光柵、模具及繞射光柵及其模具的製造方法 |
US9557458B2 (en) | 2013-10-29 | 2017-01-31 | CSEM Centre Suisse d'Electronique et de Microtechnique SA—Recherche et Développement | Optical grating coupling structure |
JP2015169862A (ja) * | 2014-03-10 | 2015-09-28 | キヤノン株式会社 | 回折格子、レーザ装置、および回折格子の製造方法 |
WO2015168182A1 (en) | 2014-04-28 | 2015-11-05 | Finisar Corporation | Reflective diffraction gratings employing efficiency enhancement or etch barrier layers |
TWI715599B (zh) | 2016-07-12 | 2021-01-11 | 台灣超微光學股份有限公司 | 光譜儀模組及其製作方法 |
WO2018013838A1 (en) * | 2016-07-15 | 2018-01-18 | Canon U.S.A. Inc. | Spectrally encoded probes |
CN106547146A (zh) * | 2017-01-22 | 2017-03-29 | 京东方科技集团股份有限公司 | 像素结构及其制造方法、阵列基板和显示装置 |
US10690831B2 (en) * | 2018-11-20 | 2020-06-23 | Facebook Technologies, Llc | Anisotropically formed diffraction grating device |
US11399709B2 (en) * | 2019-03-18 | 2022-08-02 | Welch Allyn, Inc. | Speculum tip element and method for optimizing light efficiency/emission of a speculum tip element |
CN112965228B (zh) * | 2021-03-19 | 2023-01-31 | 重庆京东方显示照明有限公司 | 一种防窥膜、显示面板及显示装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3237508A (en) * | 1962-04-12 | 1966-03-01 | Bausch & Lomb | Reflecting diffraction grating for minimizing anomalies |
US3384756A (en) * | 1965-04-21 | 1968-05-21 | Applied Res Lab Inc | Peaked monochromator having a sharply blazed diffraction grating which is always operated at the peak of the blaze |
FR2172883B1 (de) * | 1972-02-25 | 1974-12-13 | Anvar | |
JPS5092148A (de) * | 1973-12-14 | 1975-07-23 | ||
EP0007108B1 (de) * | 1978-07-18 | 1983-04-13 | Nippon Telegraph and Telephone Public Corporation | Verfahren zur Herstellung einer Beugungsgitterstruktur |
JPS5965810A (ja) * | 1982-10-08 | 1984-04-14 | Hitachi Ltd | 回折格子の製作方法 |
JPS60230601A (ja) * | 1984-05-01 | 1985-11-16 | Masayasu Negishi | 膜処理方法 |
NL8402304A (nl) * | 1984-07-20 | 1986-02-17 | Philips Nv | Beeldbuis. |
-
1988
- 1988-03-18 DE DE3852296T patent/DE3852296T2/de not_active Revoked
- 1988-03-18 EP EP88400664A patent/EP0332790B1/de not_active Revoked
- 1988-03-18 AT AT88400664T patent/ATE114826T1/de not_active IP Right Cessation
-
1989
- 1989-02-06 US US07/307,325 patent/US5080465A/en not_active Expired - Lifetime
- 1989-03-08 CA CA000593093A patent/CA1323516C/en not_active Expired - Fee Related
- 1989-03-14 JP JP1061955A patent/JP2852757B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0332790A1 (de) | 1989-09-20 |
DE3852296D1 (de) | 1995-01-12 |
DE3852296T2 (de) | 1995-04-13 |
JPH0220802A (ja) | 1990-01-24 |
US5080465A (en) | 1992-01-14 |
JP2852757B2 (ja) | 1999-02-03 |
EP0332790B1 (de) | 1994-11-30 |
CA1323516C (en) | 1993-10-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |