DE3832088C2 - - Google Patents
Info
- Publication number
- DE3832088C2 DE3832088C2 DE19883832088 DE3832088A DE3832088C2 DE 3832088 C2 DE3832088 C2 DE 3832088C2 DE 19883832088 DE19883832088 DE 19883832088 DE 3832088 A DE3832088 A DE 3832088A DE 3832088 C2 DE3832088 C2 DE 3832088C2
- Authority
- DE
- Germany
- Prior art keywords
- lens
- scanning
- sensor
- optical
- button
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims description 30
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 230000001939 inductive effect Effects 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims 1
- 238000013461 design Methods 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3832088A DE3832088A1 (de) | 1988-09-21 | 1988-09-21 | Optischer taster |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3832088A DE3832088A1 (de) | 1988-09-21 | 1988-09-21 | Optischer taster |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3832088A1 DE3832088A1 (de) | 1990-03-22 |
| DE3832088C2 true DE3832088C2 (cs) | 1993-03-25 |
Family
ID=6363427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3832088A Granted DE3832088A1 (de) | 1988-09-21 | 1988-09-21 | Optischer taster |
Country Status (1)
| Country | Link |
|---|---|
| DE (1) | DE3832088A1 (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4425879A1 (de) * | 1994-07-09 | 1996-01-11 | Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev | Vorrichtung zum Ritzen von im wesentlichen einkristallinen Substraten |
| DE10320165A1 (de) * | 2003-05-05 | 2004-12-02 | Vision & Control Gmbh | Vorrichtung zur Inspektion von Bauteilen, insbesondere von Bohrlöchern |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19930628A1 (de) * | 1999-07-02 | 2001-02-01 | Graul Renate | Topographiemeßgerät |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0652170B2 (ja) * | 1986-02-25 | 1994-07-06 | 株式会社オカダ | 光結像式非接触位置測定装置 |
-
1988
- 1988-09-21 DE DE3832088A patent/DE3832088A1/de active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4425879A1 (de) * | 1994-07-09 | 1996-01-11 | Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev | Vorrichtung zum Ritzen von im wesentlichen einkristallinen Substraten |
| DE10320165A1 (de) * | 2003-05-05 | 2004-12-02 | Vision & Control Gmbh | Vorrichtung zur Inspektion von Bauteilen, insbesondere von Bohrlöchern |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3832088A1 (de) | 1990-03-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: FEINPRUEF PERTHEN GMBH, 37073 GOETTINGEN, DE |
|
| 8339 | Ceased/non-payment of the annual fee |