DE3807710C2 - - Google Patents

Info

Publication number
DE3807710C2
DE3807710C2 DE3807710A DE3807710A DE3807710C2 DE 3807710 C2 DE3807710 C2 DE 3807710C2 DE 3807710 A DE3807710 A DE 3807710A DE 3807710 A DE3807710 A DE 3807710A DE 3807710 C2 DE3807710 C2 DE 3807710C2
Authority
DE
Germany
Prior art keywords
tube
substrates
longitudinal edges
profiles
tray according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3807710A
Other languages
German (de)
English (en)
Other versions
DE3807710A1 (de
Inventor
Klaus 6458 Rodenbach De Reimann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
Original Assignee
Heraeus Quarzglas GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzglas GmbH and Co KG filed Critical Heraeus Quarzglas GmbH and Co KG
Priority to DE3807710A priority Critical patent/DE3807710A1/de
Publication of DE3807710A1 publication Critical patent/DE3807710A1/de
Application granted granted Critical
Publication of DE3807710C2 publication Critical patent/DE3807710C2/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/13—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Packaging Frangible Articles (AREA)
DE3807710A 1988-03-09 1988-03-09 Traegerhorde Granted DE3807710A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE3807710A DE3807710A1 (de) 1988-03-09 1988-03-09 Traegerhorde

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3807710A DE3807710A1 (de) 1988-03-09 1988-03-09 Traegerhorde

Publications (2)

Publication Number Publication Date
DE3807710A1 DE3807710A1 (de) 1989-09-21
DE3807710C2 true DE3807710C2 (https=) 1991-06-27

Family

ID=6349240

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3807710A Granted DE3807710A1 (de) 1988-03-09 1988-03-09 Traegerhorde

Country Status (1)

Country Link
DE (1) DE3807710A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007063017A1 (de) * 2007-12-21 2009-06-25 Von Ardenne Anlagentechnik Gmbh Substrathalterung für Gasdiffusionsöfen

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2732224B2 (ja) * 1994-09-30 1998-03-25 信越半導体株式会社 ウエーハ支持ボート

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2558041C3 (de) * 1975-12-22 1979-01-04 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Transport von Halbleiterscheiben durch ein Temperaturbehandlungsrohr
DE3419866C2 (de) * 1984-05-28 1986-06-26 Heraeus Quarzschmelze Gmbh, 6450 Hanau Trägerhorde aus Quarzglas für scheibenförmige Substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007063017A1 (de) * 2007-12-21 2009-06-25 Von Ardenne Anlagentechnik Gmbh Substrathalterung für Gasdiffusionsöfen
DE102007063017B4 (de) * 2007-12-21 2012-03-01 Von Ardenne Anlagentechnik Gmbh Substrathalterung für Gasdiffusionsöfen

Also Published As

Publication number Publication date
DE3807710A1 (de) 1989-09-21

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8127 New person/name/address of the applicant

Owner name: HERAEUS QUARZGLAS GMBH, 6450 HANAU, DE

D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee