DE3789271D1 - Magnetische Eisenoxydfilme und ihre Herstellung. - Google Patents

Magnetische Eisenoxydfilme und ihre Herstellung.

Info

Publication number
DE3789271D1
DE3789271D1 DE87309310T DE3789271T DE3789271D1 DE 3789271 D1 DE3789271 D1 DE 3789271D1 DE 87309310 T DE87309310 T DE 87309310T DE 3789271 T DE3789271 T DE 3789271T DE 3789271 D1 DE3789271 D1 DE 3789271D1
Authority
DE
Germany
Prior art keywords
production
iron oxide
oxide films
magnetic iron
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE87309310T
Other languages
English (en)
Other versions
DE3789271T2 (de
Inventor
Hideo Torii
Eiji Fujii
Masaki Aoki
Nobuyuki Aoki
Keiichi Ochiai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24999186A external-priority patent/JPH06101416B2/ja
Priority claimed from JP1290087A external-priority patent/JPS63181305A/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of DE3789271D1 publication Critical patent/DE3789271D1/de
Publication of DE3789271T2 publication Critical patent/DE3789271T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/85—Coating a support with a magnetic layer by vapour deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/406—Oxides of iron group metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/90—Magnetic feature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y10T428/256—Heavy metal or aluminum or compound thereof
    • Y10T428/257—Iron oxide or aluminum oxide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Thin Magnetic Films (AREA)
  • Magnetic Record Carriers (AREA)
  • Chemical Vapour Deposition (AREA)
DE3789271T 1986-10-21 1987-10-21 Magnetische Eisenoxydfilme und ihre Herstellung. Expired - Fee Related DE3789271T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP24999186A JPH06101416B2 (ja) 1986-10-21 1986-10-21 ガンマ酸化鉄薄膜の製造方法
JP1290087A JPS63181305A (ja) 1987-01-22 1987-01-22 酸化鉄垂直磁化薄膜の製造方法

Publications (2)

Publication Number Publication Date
DE3789271D1 true DE3789271D1 (de) 1994-04-14
DE3789271T2 DE3789271T2 (de) 1994-07-14

Family

ID=26348586

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3789271T Expired - Fee Related DE3789271T2 (de) 1986-10-21 1987-10-21 Magnetische Eisenoxydfilme und ihre Herstellung.

Country Status (3)

Country Link
US (1) US4975324A (de)
EP (1) EP0265246B1 (de)
DE (1) DE3789271T2 (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5094897A (en) * 1989-05-02 1992-03-10 Tdk Corporation Magnetic recording medium comprising a glass substrate and a gamma Fe2 3 magnetic thin film with specified X-ray diffraction and surface roughness
DE3918932A1 (de) * 1989-06-08 1990-12-13 Schering Ag Verfahren zur herstellung duenner oxydschichten durch die plasma-umsetzung metallorganischer verbindungen
JP2896193B2 (ja) * 1989-07-27 1999-05-31 株式会社東芝 酸化物結晶配向膜の製造方法及び酸化物結晶配向膜並びに光磁気記録媒体
JP2840966B2 (ja) * 1989-11-08 1998-12-24 ティーディーケイ株式会社 磁気記録媒体および磁気記録再生方法
EP0461834A2 (de) * 1990-06-11 1991-12-18 Matsushita Electric Industrial Co., Ltd. Magnetischer Aufzeichnungsträger und sein Herstellungsverfahren
KR930011413B1 (ko) * 1990-09-25 1993-12-06 가부시키가이샤 한도오따이 에네루기 겐큐쇼 펄스형 전자파를 사용한 플라즈마 cvd 법
US5320881A (en) * 1991-08-27 1994-06-14 Northeastern University Fabrication of ferrite films using laser deposition
US5227204A (en) * 1991-08-27 1993-07-13 Northeastern University Fabrication of ferrite films using laser deposition
JP2872226B2 (ja) * 1992-03-30 1999-03-17 戸田工業株式会社 垂直磁化膜及びその製造法
JP2872229B2 (ja) * 1992-11-30 1999-03-17 戸田工業株式会社 垂直磁化膜、垂直磁化膜用多層膜及び垂直磁化膜の製造法
FR2714205A1 (fr) * 1993-12-17 1995-06-23 Atg Sa Matériau composite pour l'enregistrement magnéto-optique, sa préparation et son utilisation.
WO1995034885A2 (en) * 1994-06-09 1995-12-21 Philips Electronics N.V. Magneto-optical recording medium
US5460704A (en) * 1994-09-28 1995-10-24 Motorola, Inc. Method of depositing ferrite film
JPH08259386A (ja) * 1995-03-20 1996-10-08 Matsushita Electric Ind Co Ltd 酸化物薄膜の製造方法及びそれに用いる化学蒸着装置
SG87798A1 (en) * 1998-03-20 2002-04-16 Toda Kogyo Corp Magnetic recording medium and process for producing the same
KR100492833B1 (ko) * 1999-10-15 2005-06-07 가부시키가이샤 히타치세이사쿠쇼 광 기능성 소자 및 그 용도
US6746786B2 (en) 2000-10-17 2004-06-08 Toda Kogyo Corporation Magnetic recording medium and process for producing the same
US7319942B2 (en) * 2003-11-26 2008-01-15 Raytheon Company Molecular contaminant film modeling tool
US7939129B2 (en) 2004-01-26 2011-05-10 Pilington North America, Inc. Deposition of iron oxide coatings on a glass substrate
US7648933B2 (en) 2006-01-13 2010-01-19 Dynamic Abrasives Llc Composition comprising spinel crystals, glass, and calcium iron silicate
ITPD20110285A1 (it) * 2011-09-08 2013-03-09 Univ Padova Metodo per preparare nanomateriali supportati a base di ossido di ferro (iii) con tecnica cvd e metodo di sintesi di fe(hfa)2tmeda
CN104030366B (zh) * 2014-02-17 2016-02-10 瑞安市浙工大技术转移中心 一种具有成分梯度的一维CoxFe3-xO4磁性纳米线的制备方法
CN104030367B (zh) * 2014-02-17 2016-01-13 瑞安市浙工大技术转移中心 一种成分梯度的一维CoxFe3-xO4磁性纳米线的制备方法
CN104030368B (zh) * 2014-02-17 2016-01-13 瑞安市浙工大技术转移中心 一种具有成分梯度的一维NixFe3-xO4磁性纳米线的制备方法
CN104030370B (zh) * 2014-02-17 2016-02-10 瑞安市浙工大技术转移中心 一种成分梯度的一维NixFe3-xO4磁性纳米线的制备方法
DE112020000814T5 (de) * 2019-02-15 2021-11-11 Sony Group Corporation Kobaltferrit-magnetpulver, verfahren zur herstellung desselben und magnetisches aufzeichnungsmedium

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1142214A (en) * 1966-02-21 1969-02-05 Nippon Electric Co Improvements in or relating to ferrite particles and process for manufacturing same
US4255492A (en) * 1969-09-25 1981-03-10 Eastman Kodak Company Magnetic recording crystals, process for producing same, and magnetic recording webs using same
JPS533977A (en) * 1976-07-01 1978-01-14 Nippon Telegr & Teleph Corp <Ntt> Production of magnetic film
GB1599161A (en) * 1976-07-15 1981-09-30 Matsushita Electric Ind Co Ltd Magnetic recording medium and method of making the same
JPS55108928A (en) * 1979-02-09 1980-08-21 Tdk Corp Magnetic recording medium
JPS57143729A (en) * 1981-02-27 1982-09-06 Fuji Photo Film Co Ltd Magnetic recording medium
US4544612A (en) * 1982-09-22 1985-10-01 Nippon Telegraph & Telephone Public Corporation Iron oxide magnetic film and process for fabrication thereof
CA1235808A (en) * 1984-03-22 1988-04-26 Tetsuo Oka Vertical magnetic recording medium and process for preparation thereof
JPS60217619A (ja) * 1984-04-12 1985-10-31 Yaskawa Electric Mfg Co Ltd 硬質磁性膜の製造方法
EP0169928A1 (de) * 1984-08-02 1986-02-05 Konica Corporation Magnetischer Aufzeichnungsträger

Also Published As

Publication number Publication date
EP0265246A2 (de) 1988-04-27
EP0265246B1 (de) 1994-03-09
DE3789271T2 (de) 1994-07-14
EP0265246A3 (en) 1990-01-10
US4975324A (en) 1990-12-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee