DE3786063D1 - Bedampfen von fluessigen monomeren. - Google Patents
Bedampfen von fluessigen monomeren.Info
- Publication number
- DE3786063D1 DE3786063D1 DE8787904345T DE3786063T DE3786063D1 DE 3786063 D1 DE3786063 D1 DE 3786063D1 DE 8787904345 T DE8787904345 T DE 8787904345T DE 3786063 T DE3786063 T DE 3786063T DE 3786063 D1 DE3786063 D1 DE 3786063D1
- Authority
- DE
- Germany
- Prior art keywords
- liquid monomers
- steaming liquid
- steaming
- monomers
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 title 1
- 239000000178 monomer Substances 0.000 title 1
- 238000010025 steaming Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
- B01D1/16—Evaporating by spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/06—Flash distillation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4486—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by producing an aerosol and subsequent evaporation of the droplets or particles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/14—Organic dielectrics
- H01G4/145—Organic dielectrics vapour deposited
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US87717586A | 1986-06-23 | 1986-06-23 | |
PCT/US1987/001455 WO1987007848A1 (en) | 1986-06-23 | 1987-06-23 | Flash evaporation of monomer fluids |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3786063D1 true DE3786063D1 (de) | 1993-07-08 |
DE3786063T2 DE3786063T2 (de) | 1993-09-09 |
Family
ID=25369416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787904345T Expired - Lifetime DE3786063T2 (de) | 1986-06-23 | 1987-06-23 | Bedampfen von fluessigen monomeren. |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0270656B1 (de) |
JP (1) | JP2530350B2 (de) |
DE (1) | DE3786063T2 (de) |
WO (1) | WO1987007848A1 (de) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE139580T1 (de) * | 1989-09-26 | 1996-07-15 | Canon Kk | Gasversorgungsvorrichtung und ihre verwendung für eine filmabscheidungsanlage |
US5078092A (en) * | 1989-12-22 | 1992-01-07 | Corning Incorporated | Flash vaporizer system for use in manufacturing optical waveguide fiber |
US6110531A (en) * | 1991-02-25 | 2000-08-29 | Symetrix Corporation | Method and apparatus for preparing integrated circuit thin films by chemical vapor deposition |
DE4124018C1 (de) * | 1991-07-19 | 1992-11-19 | Leybold Ag, 6450 Hanau, De | |
JP3222518B2 (ja) * | 1991-12-26 | 2001-10-29 | キヤノン株式会社 | 液体原料気化装置および薄膜形成装置 |
US5383970A (en) * | 1991-12-26 | 1995-01-24 | Canon Kabushiki Kaisha | Chemical vapor deposition method for forming a deposited film with the use of a liquid raw material and apparatus suitable for practicing said method |
EP0585848A1 (de) * | 1992-09-02 | 1994-03-09 | Hoechst Aktiengesellschaft | Verfahren und Vorrichtung zur chemischen Gasphasenabscheidung dünner Schichten |
US5681615A (en) * | 1995-07-27 | 1997-10-28 | Battelle Memorial Institute | Vacuum flash evaporated polymer composites |
US5997642A (en) | 1996-05-21 | 1999-12-07 | Symetrix Corporation | Method and apparatus for misted deposition of integrated circuit quality thin films |
US6116184A (en) | 1996-05-21 | 2000-09-12 | Symetrix Corporation | Method and apparatus for misted liquid source deposition of thin film with reduced mist particle size |
EP0814177A3 (de) * | 1996-05-23 | 2000-08-30 | Ebara Corporation | Verdampfer und Vorrichtung mit diesem Verdampfer zum Aufdampfen von Schichten |
US5902641A (en) * | 1997-09-29 | 1999-05-11 | Battelle Memorial Institute | Flash evaporation of liquid monomer particle mixture |
US6224948B1 (en) | 1997-09-29 | 2001-05-01 | Battelle Memorial Institute | Plasma enhanced chemical deposition with low vapor pressure compounds |
US6207238B1 (en) | 1998-12-16 | 2001-03-27 | Battelle Memorial Institute | Plasma enhanced chemical deposition for high and/or low index of refraction polymers |
US6274204B1 (en) | 1998-12-16 | 2001-08-14 | Battelle Memorial Institute | Method of making non-linear optical polymer |
WO2000036665A1 (en) | 1998-12-16 | 2000-06-22 | Battelle Memorial Institute | Environmental barrier material for organic light emitting device and method of making |
US6207239B1 (en) | 1998-12-16 | 2001-03-27 | Battelle Memorial Institute | Plasma enhanced chemical deposition of conjugated polymer |
US6268695B1 (en) | 1998-12-16 | 2001-07-31 | Battelle Memorial Institute | Environmental barrier material for organic light emitting device and method of making |
US6217947B1 (en) | 1998-12-16 | 2001-04-17 | Battelle Memorial Institute | Plasma enhanced polymer deposition onto fixtures |
US6228436B1 (en) | 1998-12-16 | 2001-05-08 | Battelle Memorial Institute | Method of making light emitting polymer composite material |
US6228434B1 (en) | 1998-12-16 | 2001-05-08 | Battelle Memorial Institute | Method of making a conformal coating of a microtextured surface |
US6358570B1 (en) | 1999-03-31 | 2002-03-19 | Battelle Memorial Institute | Vacuum deposition and curing of oligomers and resins |
US6506461B2 (en) | 1999-03-31 | 2003-01-14 | Battelle Memorial Institute | Methods for making polyurethanes as thin films |
US6548912B1 (en) | 1999-10-25 | 2003-04-15 | Battelle Memorial Institute | Semicoductor passivation using barrier coatings |
US6573652B1 (en) | 1999-10-25 | 2003-06-03 | Battelle Memorial Institute | Encapsulated display devices |
US6866901B2 (en) | 1999-10-25 | 2005-03-15 | Vitex Systems, Inc. | Method for edge sealing barrier films |
US20100330748A1 (en) | 1999-10-25 | 2010-12-30 | Xi Chu | Method of encapsulating an environmentally sensitive device |
US6623861B2 (en) | 2001-04-16 | 2003-09-23 | Battelle Memorial Institute | Multilayer plastic substrates |
US6413645B1 (en) | 2000-04-20 | 2002-07-02 | Battelle Memorial Institute | Ultrabarrier substrates |
US6492026B1 (en) | 2000-04-20 | 2002-12-10 | Battelle Memorial Institute | Smoothing and barrier layers on high Tg substrates |
DE10049856A1 (de) * | 2000-10-09 | 2002-03-07 | Siemens Ag | Vorrichtung zum kontinuierlichen Verdampfen kleiner Mengen einer Flüssigkeit |
US8808457B2 (en) | 2002-04-15 | 2014-08-19 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
US8900366B2 (en) | 2002-04-15 | 2014-12-02 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
CN101351868B (zh) | 2005-12-29 | 2013-03-13 | 3M创新有限公司 | 使用涂覆工艺雾化材料的方法 |
EP2125361B1 (de) | 2006-12-28 | 2019-01-23 | 3M Innovative Properties Company | Keimbildungsschicht zur ausbildung dünner metallschichten |
WO2010035446A1 (ja) * | 2008-09-24 | 2010-04-01 | 出光興産株式会社 | 複合有機エレクトロルミネッセンス材料 |
US9337446B2 (en) | 2008-12-22 | 2016-05-10 | Samsung Display Co., Ltd. | Encapsulated RGB OLEDs having enhanced optical output |
US9184410B2 (en) | 2008-12-22 | 2015-11-10 | Samsung Display Co., Ltd. | Encapsulated white OLEDs having enhanced optical output |
US8590338B2 (en) | 2009-12-31 | 2013-11-26 | Samsung Mobile Display Co., Ltd. | Evaporator with internal restriction |
JPWO2014103756A1 (ja) * | 2012-12-25 | 2017-01-12 | コニカミノルタ株式会社 | ガスバリア性フィルム |
DE102016225257A1 (de) * | 2016-12-16 | 2018-06-21 | Robert Bosch Gmbh | Vorrichtung und Verfahren zum Verdampfen eines Ausgangsstoffs |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1766699A (en) * | 1926-09-11 | 1930-06-24 | Ig Farbenindustrie Ag | Apparatus for continuous distillation of difficultly-distillable liquids |
US2258445A (en) * | 1940-02-06 | 1941-10-07 | Du Pont | Apparatus for vaporization |
DE886441C (de) * | 1941-07-04 | 1953-08-13 | Siemens Ag | Verfahren und Vorrichtung zum UEberziehen von Traegerstoffen mit moeglichst gleichmaessigen duennen Schichten organischer Stoffe |
GB1253124A (de) * | 1969-02-28 | 1971-11-10 | ||
US4076866A (en) * | 1975-03-30 | 1978-02-28 | Massachusetts Institute Of Technology | Method of growing films by flash vaporization |
JPS57134558A (en) * | 1981-02-16 | 1982-08-19 | Fuji Photo Film Co Ltd | Production of organic vapor deposited thin film |
JPS59177365A (ja) * | 1983-03-24 | 1984-10-08 | Matsushita Electric Ind Co Ltd | 蒸発方法とその装置 |
JPS60145372A (ja) * | 1984-01-09 | 1985-07-31 | Furukawa Electric Co Ltd:The | 耐熱性樹脂の被覆方法 |
JPS6184367A (ja) * | 1984-10-03 | 1986-04-28 | Ulvac Corp | 有機薄膜の形成法 |
-
1987
- 1987-06-23 EP EP19870904345 patent/EP0270656B1/de not_active Expired - Lifetime
- 1987-06-23 JP JP62503964A patent/JP2530350B2/ja not_active Expired - Lifetime
- 1987-06-23 WO PCT/US1987/001455 patent/WO1987007848A1/en active IP Right Grant
- 1987-06-23 DE DE8787904345T patent/DE3786063T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63503552A (ja) | 1988-12-22 |
EP0270656A1 (de) | 1988-06-15 |
EP0270656B1 (de) | 1993-06-02 |
EP0270656A4 (de) | 1989-05-30 |
JP2530350B2 (ja) | 1996-09-04 |
WO1987007848A1 (en) | 1987-12-30 |
DE3786063T2 (de) | 1993-09-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |