DE3781188D1 - Zweischeiben-laeppmaschine mit komparator zum ununterbrochenen messen der werkstueckdicke. - Google Patents

Zweischeiben-laeppmaschine mit komparator zum ununterbrochenen messen der werkstueckdicke.

Info

Publication number
DE3781188D1
DE3781188D1 DE8787830086T DE3781188T DE3781188D1 DE 3781188 D1 DE3781188 D1 DE 3781188D1 DE 8787830086 T DE8787830086 T DE 8787830086T DE 3781188 T DE3781188 T DE 3781188T DE 3781188 D1 DE3781188 D1 DE 3781188D1
Authority
DE
Germany
Prior art keywords
comparator
lapping machine
double disc
workpiece thickness
uninterrupted measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Revoked
Application number
DE8787830086T
Other languages
English (en)
Other versions
DE3781188T2 (de
Inventor
Michele Melchiorre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MELCHIORRE OFF MECC
Original Assignee
MELCHIORRE OFF MECC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11262207&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3781188(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by MELCHIORRE OFF MECC filed Critical MELCHIORRE OFF MECC
Application granted granted Critical
Publication of DE3781188D1 publication Critical patent/DE3781188D1/de
Publication of DE3781188T2 publication Critical patent/DE3781188T2/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
DE8787830086T 1986-03-07 1987-03-05 Zweischeiben-laeppmaschine mit komparator zum ununterbrochenen messen der werkstueckdicke. Revoked DE3781188T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT47738/86A IT1190231B (it) 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti

Publications (2)

Publication Number Publication Date
DE3781188D1 true DE3781188D1 (de) 1992-09-24
DE3781188T2 DE3781188T2 (de) 1992-12-17

Family

ID=11262207

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787830086T Revoked DE3781188T2 (de) 1986-03-07 1987-03-05 Zweischeiben-laeppmaschine mit komparator zum ununterbrochenen messen der werkstueckdicke.

Country Status (3)

Country Link
EP (1) EP0241433B1 (de)
DE (1) DE3781188T2 (de)
IT (1) IT1190231B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3818159A1 (de) * 1988-05-28 1989-11-30 Wolters Peter Fa Verfahren und vorrichtung zur steuerung des betriebs von hon- oder schleifmaschinen
IT1243537B (it) * 1990-10-19 1994-06-16 Melchiorre Off Mecc Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau
DE10007390B4 (de) * 1999-03-13 2008-11-13 Peter Wolters Gmbh Zweischeiben-Poliermaschine, insbesondere zur Bearbeitung von Halbleiterwafern
CN115808145B (zh) * 2022-12-02 2023-09-01 江苏希太芯科技有限公司 一种用于晶圆厚度多点测量装置及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097458A (en) * 1960-05-13 1963-07-16 Method of accurately machining semiconductor bodies
US3304662A (en) * 1964-04-28 1967-02-21 Speedlap Corp Apparatus for lapping
JPS603949B2 (ja) * 1975-09-23 1985-01-31 株式会社 東精エンジニアリングサ−ビス ラツプ盤の寸法測定装置
JPS57168109A (en) * 1981-04-10 1982-10-16 Shinetsu Eng Kk Device for measuring thickness of work piece in lapping plate
JPS59129664A (ja) * 1983-01-18 1984-07-26 Fujikoshi Kikai Kogyo Kk 自動定寸装置付ラツプ盤
JPS59156665A (ja) * 1984-02-03 1984-09-05 Supiide Fuamu Kk 平面研削装置

Also Published As

Publication number Publication date
EP0241433A3 (en) 1989-07-26
EP0241433A2 (de) 1987-10-14
EP0241433B1 (de) 1992-08-19
DE3781188T2 (de) 1992-12-17
IT1190231B (it) 1988-02-16
IT8647738A0 (it) 1986-03-07

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8331 Complete revocation