EP0241433B1 - Zweischeiben-Läppmaschine mit Komparator zum ununterbrochenen Messen der Werkstückdicke - Google Patents

Zweischeiben-Läppmaschine mit Komparator zum ununterbrochenen Messen der Werkstückdicke Download PDF

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Publication number
EP0241433B1
EP0241433B1 EP87830086A EP87830086A EP0241433B1 EP 0241433 B1 EP0241433 B1 EP 0241433B1 EP 87830086 A EP87830086 A EP 87830086A EP 87830086 A EP87830086 A EP 87830086A EP 0241433 B1 EP0241433 B1 EP 0241433B1
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EP
European Patent Office
Prior art keywords
lapping
machine
lapped
comparator
satellites
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Expired - Lifetime
Application number
EP87830086A
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English (en)
French (fr)
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EP0241433A3 (en
EP0241433A2 (de
Inventor
Michele Melchiorre
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Melchiorre Off Mecc-Srl
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Melchiorre Off Mecc-Srl
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Application filed by Melchiorre Off Mecc-Srl filed Critical Melchiorre Off Mecc-Srl
Publication of EP0241433A2 publication Critical patent/EP0241433A2/de
Publication of EP0241433A3 publication Critical patent/EP0241433A3/en
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion

Definitions

  • Both plates having lapping surfaces are rotated contrariwise to each other, thus being subjected to wear together with the workpieces.
  • the workpieces to be lapped are put on a predetermined number of circular jigs socalled "satellites" which are arranged about the axis of the lower plate at a constant angular phase to one another.
  • the jigs should be rotated about their axis.
  • Each jig is then constrained to an epicyclical motion about the axis of the lapping machine.
  • the main problem of these lapping machine is the setting of the thickness of the workpiece to be lapped, i.e. the vertical size thereof.
  • the jigs consist each of a circular plate and are arranged on the lapping surface of the lower lapping plate having the form of a circular crown, the central opening of which is defined by a rotating crown gear transmitting to the jigs the above mentioned epyciclal motion about the axis of the lapping machine.
  • JP- A-59129664 it has been known a device to effect an automatic sizing wherein a non contact sensor, such as a hydraulic micrometer or the like for measuring the thickness of the piece to be lapped is arranged at a position where the piece in a carrier, rotating under revolving between a sun gear and a internal gear, are protruded out of upper and lower level blocks. Axially revolving with the sun gear, the device may measure sequentially the thickness of respective workpieces.
  • a non contact sensor such as a hydraulic micrometer or the like for measuring the thickness of the piece to be lapped
  • the main object of this invention is to avoid this drawbacks by providing during the lapping operation the continuous measurement of the vertical size of the workpieces arranged on the jigs rotating by an epicyclical motion between the lapping plates, compensating the wear of the lower lapping plate.
  • each measurement carried out on a first workpieces by the measuring device is carried out, after a revolution of the jig about the axis of the machine, on a second workpiece located in the same jig at a diametrally opposite position of said first workpiece.
  • the measurement of the worpieces is carried out by a comparator having two arms facing each other, between which the edges of the jigs projecting from the lapping plate run after one another during the lapping operation, a workpiece to be lapped being at least partially arranged at said edges.
  • the upper arm is slidably mounted on a vertical guide and rests on the upper surface of the workpieces at the edges of the rotating jigs.
  • the lower arm is hinged at the opposite end of that brought into contact with the lower surface of said workpieces at the edges of the rotating jigs.
  • a self-setting system for the arms of said comparator means is provided according to another feature of the invention.
  • the arms of the sensing means should be set for following reasons.
  • both lapping plate are subjected to wear, thus changing their positions with respect to both arms of the sensing means, between which the workpiece to be measured is running.
  • Both arms are perpendicular to the running workpieces at the beginning of the lapping operation, i.e. the upper arm to the upper surface of the workpieces, the lower arm to the lower surface of the same.
  • the upper arm fo the sensing means resting on the workpieces follows that lowering along the path of its vertical guide.
  • the lower arm which is hinged at the opposite end far away from the end in contact with the workpieces, tilts about its hinge point.
  • an electronic system is used for aligning both arms to each other.
  • Said electronic system operates an electromechanical device the operation of which is as follows.
  • the inclination of the lower arm with respect to the upper arm which is always perpendicular to the workpiece to be measured, is sensed so as to provide an electrical signal at the output of a circuit connected to the comparator.
  • Such electrical signal is received by a suitable device generating a pressure in a fluid which acts on a piston and causes by a jack the rotation of a lead screw, which in turn causes the hinge point of the lower arm to be lowered, thus aligning both arms again in their positions perpendicular to the workpiece to be measured.
  • the vertical lowering of the upper arm of the comparator provides the continuous check of the lapping operation and causes the lapping machine to be stopped when the desired thickness is reached.
  • the self-setting system provides for the alignement of the two arms of the sensing means when a limit inclination of the lower arm is reached.
  • the US-A-3304662 described an apparatus for automatically loading and unloading the workpieces together their retaining members on a staging table adjacent the lapping disc.
  • the jigs are arranged on a rotatable idling plate having the same form of the lapping plate.
  • Such idling plate is approached to a chute connected to the lower lapping plate at an opening in the circular guard wall of the lapping machine.
  • each jig is caused by the operator to slide up on the chute and to reach the lower lapping plate.
  • the machine of this invention comprises a mount 2 from which an upper presser 4 descend downwards.
  • a round iron sheet bucket which surrounds a lower lapping plate 8 on which a certain number of piece-holders 10 or satellites are arranged at constant angle distances.
  • Plate 8 has at its center a large circular cavity at the center of which a wheel is disposed which is provided at its periphery with a crown of vertical dragging studs or teeth 2 with which the peripheries 10a are engaged of the satellites disposed on the lower plate.
  • Satellites 10 are also surrounded by a crown of stationary studs 14 with which they engage always with the exterior periphery.
  • Such studs can be lowered below the plate plane for allowing the satellites to slip out.
  • Satellites 10 are pressed between the lower plate and the upper plate and are motor driven both about the axis of the machine and about their own center.
  • the lapping machine 17 is provided with a motor 18 which actuates the upper plate through belt 19 and by a motor 20 which actuates the lower lapping plate through belt 24.
  • Motors 18 and 20, provided with gear reducers 26 and 28 drive each one of the two lapping plates and have therefore the same power.
  • the upper lapping plate gives the pieces to be lapped, a downwards thrust which is generated in addition to the weight, by hydraulic pressure which thrust produces the rubbing that is the lapping of the pieces contained over the satellite.
  • Fig. 5 the manoeuvre is illustrated for charging the satellite on the lower plate.
  • Suitable handles facilitate the operator's task for rotating the table in the suitable direction. Supposing that the lapping machine comprises six satellites as illustrated in Fig. 5 the support table will have the capacity of seven satellites.
  • a plane 34 provided with a side slide 35 is inserted between the same support table and the lapping machine.
  • a device for measuring the thickness attained by each piece which takes part on the lot being machined, a device (Fig. 4) is provided which is called comparator 50 adapted for measuring the distance between a point (pont A) of the tangential horizontal upper plane of the piece and the point (point B) which lies (at the beginning) on the same vertical but belongs to the tangential lower surface of the same piece.
  • the comparator 50 device (Fig. 2 and 6) is provided with an upper point 36 and a lower point 38, both being diamond points which hold therebetween, as shears, a limb circularly projecting from each of the rotating satellites in which limb at least one of the pieces to be lapped is partially included.
  • the comparator can for instance be located at the place of one of the studs or teeth 14 with which the outer periphery of each satellite is engaged.
  • the comparator device verifies the lowering of the piece and then of its vertical dimension and consequently it interrupts the working cycle and at the same time it sums successive rotations, that is angular lowerings and activates the recovering of the plate wear device.
  • transducer 52 which transforms an electrical signal at the output of the comparator 50 into a control for the piston 46 which, through a jack 48 produces the rotation of a screw 45 which lowers the support assembly 47, 49 of comparator 50.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Claims (8)

  1. Läpp-Maschine mit einer unteren Läppplatte (8) und einer oberen Anpressplatte (21), die konzentrisch übereinander angeordnet und jeweils durch ein Antriebsorgan bzw. einen Motor so antreibbar sind, daß sie in Bezug zueinander entgegengesetzt rotieren, bei der die zu läppenden Artikel in gleiche Gruppen aufgeteilt sind, von denen jede innerhalb der Grenzen einer in die untere Platte führbare Trabantenplatte bzw. eines Satelliten (10) verteilt und die Satelliten (10) so über der unteren Platte (8) verteilt sind, daß mindestens ein Raum bedeckt ist, der der Oberfläche zwischen dem maximalen und minimalen Kreis der gleichen Läppplatte entspricht, und bei der jeder Satellit (10) mit einer peripheren, kreisförmigen Erhöhung (10a) bzw. Kranz von Erhöhungen und Vertiefungen versehen ist, die bzw. der an einer Erhöhung bzw. einem ebensolchen Kranz von Stutzen oder Zähnen (14) in Bezug zu den Satelliten stationär angreift und an einer Erhöhung bzw. einem Kranz von Stutzen (12) angreift, welche sich an der Innenseite der Satellitenerhöhung bzw. -Kranzes befindet und durch ein drittes Antriebsorgan antreibbar ist, und bei der die zu läppenden Artikel längs einer Bedienungsebene (30) des Artikelabstütz-Satelliten (10) zu- und abführbar sind, gekennzeichnet durch mindestens einen Komparator (50) zum Abfühlen bzw. Messen der Vertikaldimension (Dicke) eines zu läppenden Artikels mit Hilfe zweier entgegengesetzter Punkte (36, 38), zwischen denen beim Läppen ein kreisförmiges, von jedem Satelliten (10) abstehendes Organ während des Läppens in Aufeinanderfolge bzw. Sukzession vorbeitritt, wobei mindestens ein zu läppender Artikel in dem Organ aufgenommen ist, und eine Ausrichteinrichtung (52, 46, 48, 45, 47, 49) die Ausrichtung der zwei Punkte des Komparators (50) zur Kompensation der Abnutzung der unteren Läppplatte wiederherstellt.
  2. Läpp-Maschine nach Anspruch 1, bei der der Komparator (50) ein Kaliber ist, der mit zwei Punkten, in Bezug zu dem zu läppenden Artikel einem oberen Punkt (36) und einem unteren Punkt (38), versehen ist zum Abfühlen bzw. Messen der Vertikaldimension eines zu läppenden Artikel, bei der der obere Punkt (36) so abgegrenzt ist, daß er einem gradlinigen Weg folgt, und bei der der untere Punkt (38) an einer Stelle angelenkt ist, die sich in Bezug zu den Läppplatten außerhalb im Abstand von diesen befindet und in einer Vertikalebene um eine solche Stelle, oder umgekehrt, drehbar ist.
  3. Läpp-Maschine nach Anspruch 1, bei der sämtlich gezahnten, kreisförmigen Satelliten (10) in einer Schleife bzw. einem Kreis rings um die Maschinenachse angeordnet sind.
  4. Läpp-Maschine nach Anspruch 1 und 3, bei der das Verhältnis zwischen den Zähnen des inneren Kranzes (12), den Zähnen des äußeren Kranzes (14) der unteren Läppplatte und den Zähnen der Satelliten (10) derart gewählt ist, daß das Abfühlen bzw. Messen durch den Komparator (50) an einem Artikel nach einer Umdrehung eines Satelliten (10) um die Maschinenachse an einem Artikel wiederholbar ist, der sich auf dem gleichen Satelliten in einer diametral entgegengesetzten Position (in Bezug zu der Position, bei der das Abfühlen bzw. das Messen stattfindet) befindet.
  5. Läpp-Maschine nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet,
    daß die Ausrichteinrichtung zwischen den Komparatorpunkten (36, 38) einen Transducer (52) bzw. Wandler aufweist und das elektrische Ausgangssignal für die vertikale Abweichung der Komparatorpunkte (36, 38), welche von dort abgegeben wird, in den Druck einer Flüssigkeit transformiert wird, welche auf einen Kolben (46) durch einen Sperrhebel (48) einwirkt, der eine Schraube (45) zum Absenken der Stützeinrichtung (47, 49) des Komparators (50) derart rotierend antreibt, daß die Punkte in ihre Vertikalposition, d.h. in Ausrichtung und rechtwinklig zu dem Artikel, zurückgestellt werden.
  6. Läpp-Maschine nach einem der vorhergehenden Ansprüche, bei der die Bedienungsebene (30) der Artikelabstützsatelliten eine kreisförmige Ebene ist, welche manuell gedreht werden kann, so daß soviele Stellen wie auf der Läpp-Maschine zu beladende Satelliten (10) zuzüglich einer weiteren Stelle derart vorgesehen sind, daß immer dann, wenn ein kreisförmiger Satellit (10) mit einem geläppten Artikel von der unteren Läppplatte (8) der Einrichtung abgenommen ist, die Einrichtung an die Läpp-Maschine vor einer Öffnung (32) heranführbar ist, welche sich an der kreisförmigen Vertikalwand (6) befindet, wodurch die Maschinenläppplatten geschützt werden und ein Satellit (10) mit den geläppten Artikeln dazu gebracht wird, in Richtung zu einer leeren Stelle der Behandlungsebene (30) zu rutschen, die daraufhin rotierend antreibbar ist, damit ein neuer Satellit mit zu läppenden Artikeln veranlaßt wird, an die vom zurückgezogenen Satelliten freigewordene Stelle auf der unteren Lappplatte zu rutschen.
  7. Läpp-Maschine nach Anspruch 2, bei der alle Satelliten (10) rings über die Läppplatte (21, 8) in einem solchen Maß vorstehen, das ausreicht, daß die zu läppenden Artikel beim Rotieren der Maschine aufeinanderfolgend zwischen zwei Komparatorpunkten (36, 38), mindestens für einen Teil des Artikels, einsetzbar sind.
  8. Läpp-Maschine nach Anspruch 6, die auch eine Stützplatte (34) mit einer seitlichen, flachen Gleitbahn (35) aufweist, welche zwischen die untere Läppplatte (8) und die Satellitenbedienungsebene (30) an der Öffnung (32) der als Maschinenschutz angeordneten kreisförmigen Wand (6) eingesetzt ist.
EP87830086A 1986-03-07 1987-03-05 Zweischeiben-Läppmaschine mit Komparator zum ununterbrochenen Messen der Werkstückdicke Expired - Lifetime EP0241433B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT4773886 1986-03-07
IT47738/86A IT1190231B (it) 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti

Publications (3)

Publication Number Publication Date
EP0241433A2 EP0241433A2 (de) 1987-10-14
EP0241433A3 EP0241433A3 (en) 1989-07-26
EP0241433B1 true EP0241433B1 (de) 1992-08-19

Family

ID=11262207

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87830086A Expired - Lifetime EP0241433B1 (de) 1986-03-07 1987-03-05 Zweischeiben-Läppmaschine mit Komparator zum ununterbrochenen Messen der Werkstückdicke

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EP (1) EP0241433B1 (de)
DE (1) DE3781188T2 (de)
IT (1) IT1190231B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3818159A1 (de) * 1988-05-28 1989-11-30 Wolters Peter Fa Verfahren und vorrichtung zur steuerung des betriebs von hon- oder schleifmaschinen
IT1243537B (it) * 1990-10-19 1994-06-16 Melchiorre Off Mecc Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau
DE10007390B4 (de) * 1999-03-13 2008-11-13 Peter Wolters Gmbh Zweischeiben-Poliermaschine, insbesondere zur Bearbeitung von Halbleiterwafern
CN115808145B (zh) * 2022-12-02 2023-09-01 江苏希太芯科技有限公司 一种用于晶圆厚度多点测量装置及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097458A (en) * 1960-05-13 1963-07-16 Method of accurately machining semiconductor bodies
US3304662A (en) * 1964-04-28 1967-02-21 Speedlap Corp Apparatus for lapping
JPS57168109A (en) * 1981-04-10 1982-10-16 Shinetsu Eng Kk Device for measuring thickness of work piece in lapping plate

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1, n° 99 (M-77), 31st August 1977, page 2770 & JP- A - 52 39889 (TOSEI ENGINEERING SERVICE) 28-03-1977 *
PATENT ABSTRACTS OF JAPAN vol. 8, n° 258 (M340)(1695), 27 th November 1984 & JP-A-59 129 664 (FUJIKOSHI KIKAI KOGYO) 26-07-1984 *
PATENT ABSTRACTS OF JAPAN, vol. 9, n° 7 (M350)(1730), 12th January 1985 & JP - A - 59 156 665 (SUPIIDO FUA MU) 05-09-1984 *

Also Published As

Publication number Publication date
DE3781188D1 (de) 1992-09-24
IT8647738A0 (it) 1986-03-07
EP0241433A3 (en) 1989-07-26
EP0241433A2 (de) 1987-10-14
DE3781188T2 (de) 1992-12-17
IT1190231B (it) 1988-02-16

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