EP0241433A2 - Zweischeiben-Läppmaschine mit Komparator zum ununterbrochenen Messen der Werkstückdicke - Google Patents

Zweischeiben-Läppmaschine mit Komparator zum ununterbrochenen Messen der Werkstückdicke Download PDF

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Publication number
EP0241433A2
EP0241433A2 EP87830086A EP87830086A EP0241433A2 EP 0241433 A2 EP0241433 A2 EP 0241433A2 EP 87830086 A EP87830086 A EP 87830086A EP 87830086 A EP87830086 A EP 87830086A EP 0241433 A2 EP0241433 A2 EP 0241433A2
Authority
EP
European Patent Office
Prior art keywords
lapping
machine
satellites
lapped
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP87830086A
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English (en)
French (fr)
Other versions
EP0241433A3 (en
EP0241433B1 (de
Inventor
Michele Melchiorre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Melchiorre Off Mecc-Srl
Original Assignee
Melchiorre Off Mecc-Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Melchiorre Off Mecc-Srl filed Critical Melchiorre Off Mecc-Srl
Publication of EP0241433A2 publication Critical patent/EP0241433A2/de
Publication of EP0241433A3 publication Critical patent/EP0241433A3/en
Application granted granted Critical
Publication of EP0241433B1 publication Critical patent/EP0241433B1/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion

Definitions

  • Both plates having lapping surfaces are rotated contrariwise to each other, thus being subjected to wear together with the workpieces.
  • the workpieces to be lapped are put on a predetermined number of circular jigs socalled "satellites" which are arranged about the axis of the lower plate at a constant angular phase to one another.
  • the jigs should be rotated about their axis.
  • Each jig is then constrained to an epicyclical motion about the axis of the lapping machine.
  • the main problem of these lapping machines is the setting of the thickness of the workpiece to be lapped, i.e. the vertical size thereof.
  • a first object of this invention is to avoid this drawback by providing a two face lapping machine provided with means to automatically carry out a continuous millesimal measurement of the workpieces.
  • the jigs consist each of a circular plate and are arranged on the lapping surface of the lower lapping plate having the form of a circular crown, the central opening of which is defined by a rotating crown gear transmitting to the jigs the above mentioned epicyclical motion about the axis of the lapping machine.
  • the main object of this invention is to provide during the lapping operation the continuous measurement of the vertical size of the workpieces arranged on the jigs rotating by an epicyclical motion between the lapping plates.
  • each measurement carried out on a first workpiece by the measuring device is carried out, after a revolution of the jig about the axis of the machine, on a second workpiece located in the same jig at a diametrally opposite position of said first workpiece.
  • the measurement according to this invention is much more precise and is carried out in a strongly reduced time and almost continuosly while the workpieces continue being lapped.
  • a comparator having two arms facing each other, between which the edges of the jigs projecting from the lapping plate run after one another during the lapping operation, a workpiece to be lapped being at least partially arranged at said edges.
  • the upper arm is slidably mounted on a vertical guide and rests on the upper surface of the workpieces at the edges of the rotating jigs.
  • the lower arm is hinged at the opposite end of that brought into contact with the lower surface of said workpieces at the edges of the rotating jigs.
  • a self-setting system for the arms of said comparator means is provided according to another feature of the invention.
  • the arms of the sensing means should be set for following reasons.
  • both lapping plates are subjected to wear, thus changing their positions with respect to both arms of the sensing means, between which the workpiece to be measured is running.
  • Both arms are perpendicular to the running workpieces at the beginning of the lapping operation, i.e. the upper arm to the upper surface of the workpieces, the lower arm to the lower surface of the same.
  • the lower arm which is hinged at the opposite end far away from the end in contact with the workpieces, tilts about its hinge point.
  • anelectronic system is used for aligning both arms to each other.
  • Said electronic system operates an electromechanical device the operation of which is as follows.
  • the inclination of the lower arm with respect to the upper arm which is always perpendicular to the workpiece to be measured, is sensed so as to provide an electrical signal at the output of a circuit connected to the comparator.
  • Such electrical signal is received by a suitable device generating a pressure in a fluid which acts on a piston and causes by a jack the rotation of a lead screw, which in turn causes the hinge point of the lower arm to be lowered, thus aligning both arms again in their positions perpendicular to the workpiece to be measured.
  • the vertical lowering of the upper ar, of the comparator provides the continuous check of the lapping operation and causes the lapping machine to be stopped when the desired thickness is reached.
  • the self-setting system provides for the alignement of the two arms of the sensing means when a limit inclination of the lower arm is reached.
  • a system for charging the jigs in the machine is provided.
  • Such jigs are arranged on a idling plate the same form of the lapping plate.
  • Such idling plate is approached to a chute connected to the lower lapping plate at an opening in the circular body of the lapping machine.
  • each jig is caused by the operator to slide up on the chute and to reach the lower lapping plate.
  • the machine of this invention comprises a mount 2 from which an upper presser 4 descends downwards.In an underlying position a round iron sheet bucket which surrounds a lower lapping plate 8 on which a certain number of piece-holders 10 or satellites are arranged at constant angle distances. Plate 8 has at its center a large circular cavity at the center of which a wheel is disposed which is provided at its periphery with a crown of vertical dragging studs or teeth 2 with which the peripheries 10a are engaged of the satellites disposed on the lower plate.
  • Satellites 10 are also surrounded by a crown of stationary studs 14 with which they engage always with the exterior periphery.
  • Such studs can be lowered below the plate plane for allowing the satellites to slip out.
  • Satellites 10 are pressed between the lower plate and the upper plate and are motor driven both about the axis of the machine and about their own center.
  • the lapping machine 17 is provided with a motor 18 which actuates the upper plate through belt 19 and by a motor 20 which actuates the lower lapping plate through belt 24.
  • Motor 18 and 20 provided with gear reducers 26 and 28 drive each one of the two lapping plates and have therefore the same power.
  • the upper lapping plate gives the pieces to be lapped, a downwards thrust which is generated in addition to the weight, by hydraulic pressure which thrust produces the rubbing that is the lapping of the pieces contained over the satellite.
  • Fig.5 the manoeuvre is illustrated for charging the satellite on the lower plate.
  • Suitable handles facilitate the operator's task for rotating the table in the suitable direction.Supposing that the lapping machine comprises six satellites as illustrated in Fig.5 the support table will have the capacity of seven satellites.
  • a plane 34 provided with a side slide 32 is inserted between the same support table and the lapping machine.
  • a device for measuring the thickness attained by each piece which takes part on the lot being machined, a device (Fig.4) is provided which is called comparator 50 adapted for measuring the distance between a point (pont A) of the tangential horizontal upper plane of the piece and the point (point - B) which lies (at the beginning) on the same vertical but belongs to the tangential lower surface of the same piece.
  • the comparator 50 device (Fig.2 and 6) is provided with an upper point 36 and a lower point 38, both being diamond points which hold therebetween, as shears, a limb circularly projecting from each of the rotating satellites in which limb at least one of the pieces to be lapped is partially included.
  • the comparator can for instance be located at the place of one of the studs or teeth 14 with which the outer periphery of each satellite is engaged.
  • the comparator device verifies the lowering of the piece and then of its vertical dimension and consequently it interrupts the working cycle and at the same time it sums successive rotations, that is angular lowerings and activates the recovering of the plate wear device.
  • transducer 52 which transforms an electrical signal at the output of the comparator 50 into a control for the piston 46 which,- through a jack 48 produces the rotation of a screw 45 which lowers the support assembly 47,49 of comparator 50.
EP87830086A 1986-03-07 1987-03-05 Zweischeiben-Läppmaschine mit Komparator zum ununterbrochenen Messen der Werkstückdicke Revoked EP0241433B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT47738/86A IT1190231B (it) 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti
IT4773886 1986-03-07

Publications (3)

Publication Number Publication Date
EP0241433A2 true EP0241433A2 (de) 1987-10-14
EP0241433A3 EP0241433A3 (en) 1989-07-26
EP0241433B1 EP0241433B1 (de) 1992-08-19

Family

ID=11262207

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87830086A Revoked EP0241433B1 (de) 1986-03-07 1987-03-05 Zweischeiben-Läppmaschine mit Komparator zum ununterbrochenen Messen der Werkstückdicke

Country Status (3)

Country Link
EP (1) EP0241433B1 (de)
DE (1) DE3781188T2 (de)
IT (1) IT1190231B (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344548A2 (de) * 1988-05-28 1989-12-06 Peter Wolters Ag Verfahren und Vorrichtung zur Steuerung des Betriebs von Hon- oder Schleifmaschinen
EP0481935A2 (de) * 1990-10-19 1992-04-22 MELCHIORRE OFFICINA MECCANICA S.r.l. Verfahren und Gerät zum Kontrollieren von Werkstücken auf einer zweiseitigen Läppmaschine nach deren Bearbeitung
DE10007390B4 (de) * 1999-03-13 2008-11-13 Peter Wolters Gmbh Zweischeiben-Poliermaschine, insbesondere zur Bearbeitung von Halbleiterwafern
CN115808145A (zh) * 2022-12-02 2023-03-17 江苏希太芯科技有限公司 一种用于晶圆厚度多点测量装置及方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097458A (en) * 1960-05-13 1963-07-16 Method of accurately machining semiconductor bodies
US3304662A (en) * 1964-04-28 1967-02-21 Speedlap Corp Apparatus for lapping
JPS5239889A (en) * 1975-09-23 1977-03-28 Tousei Eng Service:Kk Method for measuring dimensions of lapping
DE3213252A1 (de) * 1981-04-10 1982-12-09 Naoetsu Electronics Co., Ltd., Kubiki, Niigata Verfahren zur staerkenkontrolle waferartiger werkstuecke und laeppvorrichtung hierfuer
JPS59129664A (ja) * 1983-01-18 1984-07-26 Fujikoshi Kikai Kogyo Kk 自動定寸装置付ラツプ盤
JPS59156665A (ja) * 1984-02-03 1984-09-05 Supiide Fuamu Kk 平面研削装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097458A (en) * 1960-05-13 1963-07-16 Method of accurately machining semiconductor bodies
US3304662A (en) * 1964-04-28 1967-02-21 Speedlap Corp Apparatus for lapping
JPS5239889A (en) * 1975-09-23 1977-03-28 Tousei Eng Service:Kk Method for measuring dimensions of lapping
DE3213252A1 (de) * 1981-04-10 1982-12-09 Naoetsu Electronics Co., Ltd., Kubiki, Niigata Verfahren zur staerkenkontrolle waferartiger werkstuecke und laeppvorrichtung hierfuer
JPS59129664A (ja) * 1983-01-18 1984-07-26 Fujikoshi Kikai Kogyo Kk 自動定寸装置付ラツプ盤
JPS59156665A (ja) * 1984-02-03 1984-09-05 Supiide Fuamu Kk 平面研削装置

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN *
PATENT ABSTRACTS OF JAPAN vol. 1, n° 99 (M-77), 31st August 1977, page 2770 & JP- A - 52 39889 (TOSEI ENGINEERING SERVICE) 28-03-1977 *
PATENT ABSTRACTS OF JAPAN vol. 8, n° 258 (M340)(1695), 27 th November 1984 & JP-A-59 129 664 (FUJIKOSHI KIKAI KOGYO) 26-07-1984 *
PATENT ABSTRACTS OF JAPAN, vol. 9, n° 7 (M350)(1730), 12th January 1985 & JP - A - 59 156 665 (SUPIIDO FUA MU) 05-09-1984 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0344548A2 (de) * 1988-05-28 1989-12-06 Peter Wolters Ag Verfahren und Vorrichtung zur Steuerung des Betriebs von Hon- oder Schleifmaschinen
EP0344548A3 (de) * 1988-05-28 1990-08-16 Peter Wolters Ag Verfahren und Vorrichtung zur Steuerung des Betriebs von Hon- oder Schleifmaschinen
EP0481935A2 (de) * 1990-10-19 1992-04-22 MELCHIORRE OFFICINA MECCANICA S.r.l. Verfahren und Gerät zum Kontrollieren von Werkstücken auf einer zweiseitigen Läppmaschine nach deren Bearbeitung
EP0481935A3 (en) * 1990-10-19 1992-09-02 Melchiorre Officina Meccanica S.R.L. Method and apparatus for the post-process check of the workpieces in a double-plate lapping machine
DE10007390B4 (de) * 1999-03-13 2008-11-13 Peter Wolters Gmbh Zweischeiben-Poliermaschine, insbesondere zur Bearbeitung von Halbleiterwafern
CN115808145A (zh) * 2022-12-02 2023-03-17 江苏希太芯科技有限公司 一种用于晶圆厚度多点测量装置及方法
CN115808145B (zh) * 2022-12-02 2023-09-01 江苏希太芯科技有限公司 一种用于晶圆厚度多点测量装置及方法

Also Published As

Publication number Publication date
EP0241433A3 (en) 1989-07-26
DE3781188T2 (de) 1992-12-17
IT1190231B (it) 1988-02-16
EP0241433B1 (de) 1992-08-19
DE3781188D1 (de) 1992-09-24
IT8647738A0 (it) 1986-03-07

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