IT1190231B - Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti - Google Patents

Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti

Info

Publication number
IT1190231B
IT1190231B IT47738/86A IT4773886A IT1190231B IT 1190231 B IT1190231 B IT 1190231B IT 47738/86 A IT47738/86 A IT 47738/86A IT 4773886 A IT4773886 A IT 4773886A IT 1190231 B IT1190231 B IT 1190231B
Authority
IT
Italy
Prior art keywords
satellites
piece
plate
lapping
lapping machine
Prior art date
Application number
IT47738/86A
Other languages
English (en)
Other versions
IT8647738A0 (it
Inventor
Lino Melchiorre
Original Assignee
Melchiorre Off Mecc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11262207&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IT1190231(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Melchiorre Off Mecc filed Critical Melchiorre Off Mecc
Priority to IT47738/86A priority Critical patent/IT1190231B/it
Publication of IT8647738A0 publication Critical patent/IT8647738A0/it
Priority to EP87830086A priority patent/EP0241433B1/en
Priority to DE8787830086T priority patent/DE3781188T2/de
Application granted granted Critical
Publication of IT1190231B publication Critical patent/IT1190231B/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
IT47738/86A 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti IT1190231B (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT47738/86A IT1190231B (it) 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti
EP87830086A EP0241433B1 (en) 1986-03-07 1987-03-05 A two-plate lapping machine with comparator for continuously measuring the workpiece tichness
DE8787830086T DE3781188T2 (de) 1986-03-07 1987-03-05 Zweischeiben-laeppmaschine mit komparator zum ununterbrochenen messen der werkstueckdicke.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT47738/86A IT1190231B (it) 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti

Publications (2)

Publication Number Publication Date
IT8647738A0 IT8647738A0 (it) 1986-03-07
IT1190231B true IT1190231B (it) 1988-02-16

Family

ID=11262207

Family Applications (1)

Application Number Title Priority Date Filing Date
IT47738/86A IT1190231B (it) 1986-03-07 1986-03-07 Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti

Country Status (3)

Country Link
EP (1) EP0241433B1 (it)
DE (1) DE3781188T2 (it)
IT (1) IT1190231B (it)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3818159A1 (de) * 1988-05-28 1989-11-30 Wolters Peter Fa Verfahren und vorrichtung zur steuerung des betriebs von hon- oder schleifmaschinen
IT1243537B (it) * 1990-10-19 1994-06-16 Melchiorre Off Mecc Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau
DE10007390B4 (de) * 1999-03-13 2008-11-13 Peter Wolters Gmbh Zweischeiben-Poliermaschine, insbesondere zur Bearbeitung von Halbleiterwafern
CN115808145B (zh) * 2022-12-02 2023-09-01 江苏希太芯科技有限公司 一种用于晶圆厚度多点测量装置及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097458A (en) * 1960-05-13 1963-07-16 Method of accurately machining semiconductor bodies
US3304662A (en) * 1964-04-28 1967-02-21 Speedlap Corp Apparatus for lapping
JPS57168109A (en) * 1981-04-10 1982-10-16 Shinetsu Eng Kk Device for measuring thickness of work piece in lapping plate

Also Published As

Publication number Publication date
DE3781188T2 (de) 1992-12-17
IT8647738A0 (it) 1986-03-07
EP0241433B1 (en) 1992-08-19
EP0241433A3 (en) 1989-07-26
EP0241433A2 (en) 1987-10-14
DE3781188D1 (de) 1992-09-24

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Legal Events

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TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19940330