IT1243537B - Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau - Google Patents

Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau

Info

Publication number
IT1243537B
IT1243537B IT04838990A IT4838990A IT1243537B IT 1243537 B IT1243537 B IT 1243537B IT 04838990 A IT04838990 A IT 04838990A IT 4838990 A IT4838990 A IT 4838990A IT 1243537 B IT1243537 B IT 1243537B
Authority
IT
Italy
Prior art keywords
cycle
workpieces
lapping machine
control
post process
Prior art date
Application number
IT04838990A
Other languages
English (en)
Other versions
IT9048389A1 (it
IT9048389A0 (it
Inventor
Michele Melchiorre
Original Assignee
Melchiorre Off Mecc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Melchiorre Off Mecc filed Critical Melchiorre Off Mecc
Priority to IT04838990A priority Critical patent/IT1243537B/it
Publication of IT9048389A0 publication Critical patent/IT9048389A0/it
Priority to EP19910830440 priority patent/EP0481935A3/en
Publication of IT9048389A1 publication Critical patent/IT9048389A1/it
Application granted granted Critical
Publication of IT1243537B publication Critical patent/IT1243537B/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
    • B24B49/03—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent according to the final size of the previously ground workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
IT04838990A 1990-10-19 1990-10-19 Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau IT1243537B (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IT04838990A IT1243537B (it) 1990-10-19 1990-10-19 Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau
EP19910830440 EP0481935A3 (en) 1990-10-19 1991-10-16 Method and apparatus for the post-process check of the workpieces in a double-plate lapping machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT04838990A IT1243537B (it) 1990-10-19 1990-10-19 Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau

Publications (3)

Publication Number Publication Date
IT9048389A0 IT9048389A0 (it) 1990-10-19
IT9048389A1 IT9048389A1 (it) 1992-04-19
IT1243537B true IT1243537B (it) 1994-06-16

Family

ID=11266266

Family Applications (1)

Application Number Title Priority Date Filing Date
IT04838990A IT1243537B (it) 1990-10-19 1990-10-19 Metodo e dispositivo per il controllo al termine di ogni ciclo (post process) dei pezzi lavorati in una macchina lappatrice a doppio plateau

Country Status (2)

Country Link
EP (1) EP0481935A3 (it)
IT (1) IT1243537B (it)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU4673797A (en) * 1996-10-04 1998-04-24 Exclusive Design Company, Inc. A method and system for controlling chemical mechanical polishing thickness removal
US6108091A (en) 1997-05-28 2000-08-22 Lam Research Corporation Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing
US6146248A (en) 1997-05-28 2000-11-14 Lam Research Corporation Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
US6111634A (en) * 1997-05-28 2000-08-29 Lam Research Corporation Method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical-mechanical polishing
US6068539A (en) 1998-03-10 2000-05-30 Lam Research Corporation Wafer polishing device with movable window
US7125313B2 (en) 2003-02-25 2006-10-24 Novellus Systems, Inc. Apparatus and method for abrading a workpiece
JP2020015105A (ja) * 2018-07-23 2020-01-30 東京エレクトロン株式会社 基板処理装置および基板処理方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5715668A (en) * 1980-06-27 1982-01-27 Fujikoshi Kikai Kogyo Kk Lapping process and lapping device
JPS57168109A (en) * 1981-04-10 1982-10-16 Shinetsu Eng Kk Device for measuring thickness of work piece in lapping plate
IT1190231B (it) * 1986-03-07 1988-02-16 Melchiorre Off Mecc Lappatrice a due plato' con dispositivo per la misura spessore del pezzo in lavorazione e con tavola di caricamento manuale dei satelliti
US4860498A (en) * 1988-08-15 1989-08-29 General Signal Corp. Automatic workpiece thickness control for dual lapping machines

Also Published As

Publication number Publication date
IT9048389A1 (it) 1992-04-19
IT9048389A0 (it) 1990-10-19
EP0481935A3 (en) 1992-09-02
EP0481935A2 (en) 1992-04-22

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