HUT37985A - Arrangement for interferometric testing technical surface - Google Patents

Arrangement for interferometric testing technical surface

Info

Publication number
HUT37985A
HUT37985A HU446684A HU446684A HUT37985A HU T37985 A HUT37985 A HU T37985A HU 446684 A HU446684 A HU 446684A HU 446684 A HU446684 A HU 446684A HU T37985 A HUT37985 A HU T37985A
Authority
HU
Hungary
Prior art keywords
arrangement
testing technical
technical surface
interferometric testing
interferometric
Prior art date
Application number
HU446684A
Other languages
Hungarian (hu)
Other versions
HU195882B (en
Inventor
Karl-Edmund Elssner
Johannes Schwider
Reiner Spolaczyk
Original Assignee
Akad Wissenschaften Ddr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akad Wissenschaften Ddr filed Critical Akad Wissenschaften Ddr
Publication of HUT37985A publication Critical patent/HUT37985A/en
Publication of HU195882B publication Critical patent/HU195882B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
HU446684A 1983-12-05 1984-12-03 Arrangement for interference examination of the flatness of technical surfaces HU195882B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD25747883A DD219565A1 (en) 1983-12-05 1983-12-05 ARRANGEMENT FOR INTERFEROMETIC QUALITY TESTING OF TECHNICAL SURFACES

Publications (2)

Publication Number Publication Date
HUT37985A true HUT37985A (en) 1986-03-28
HU195882B HU195882B (en) 1988-07-28

Family

ID=5552558

Family Applications (1)

Application Number Title Priority Date Filing Date
HU446684A HU195882B (en) 1983-12-05 1984-12-03 Arrangement for interference examination of the flatness of technical surfaces

Country Status (3)

Country Link
DD (1) DD219565A1 (en)
DE (1) DE3443175A1 (en)
HU (1) HU195882B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4003100A1 (en) * 1990-02-02 1991-08-08 Zeiss Carl Fa METHOD AND DEVICE FOR INTERFEROMETRIC ABSOLUTE TESTING OF SURFACES
FR2664048B1 (en) * 1990-06-29 1993-08-20 Centre Nat Rech Scient MULTICHANNEL ANALOGUE DETECTION METHOD AND DEVICE.
DE4318739C2 (en) * 1993-06-05 1997-07-03 Lamtech Lasermestechnik Gmbh Interferometer and method for measuring the topography of test specimen surfaces
DE4432313C2 (en) * 1994-09-12 2002-11-14 Fraunhofer Ges Forschung Device for examining surface topographies using strip triangulation
DE4439307C2 (en) * 1994-11-03 1999-07-29 Albert Dr Mehl Observation optics for a 3D surface measuring device with high accuracy
CN113465539B (en) * 2021-07-06 2024-03-19 上海大学 Automatic cylindricity measuring device and method based on sub-aperture interference splicing

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1920928A1 (en) * 1968-04-25 1969-11-20 Abramson Nils Hugo Leopold Device for surface testing by interference measurement
JPS516550B1 (en) * 1969-03-31 1976-02-28
DE2500798A1 (en) * 1975-01-10 1976-07-15 Leitz Ernst Gmbh OPTICAL MEASURING SYSTEM
DE3044183A1 (en) * 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich METHOD FOR OPTICALLY MEASURING LENGTHS AND LENGTH CHANGES AND ARRANGEMENT FOR IMPLEMENTING THE METHOD

Also Published As

Publication number Publication date
HU195882B (en) 1988-07-28
DD219565A1 (en) 1985-03-06
DE3443175A1 (en) 1985-06-27

Similar Documents

Publication Publication Date Title
GB8400830D0 (en) Test pad
SG76990G (en) Interferometric methods for device fabrication
GB2150284B (en) Inspecting articles
DE3476583D1 (en) Interferometer
DE3470948D1 (en) Multicoordinate measuring machine
GB8320367D0 (en) Interferometric detector
GB2142427B (en) Surface shape measurement apparatus
GB2138234B (en) Coherent reflectometer
GB8521888D0 (en) Fizeau interferometer
GB2120401B (en) Dual-axis interferometer measuring system
PH22092A (en) Test set
DE3373341D1 (en) White-light interferometer
EP0139867A3 (en) Near surface inspection system
EP0138089A3 (en) Probe
DE3463421D1 (en) Testing pellet-cladding interaction
HUT37985A (en) Arrangement for interferometric testing technical surface
EP0147205A3 (en) Pattern inspection
GB8316332D0 (en) Measuring haemotasis
GB8311170D0 (en) Sixport reflectometer
GB2146116B (en) Surface condition measurement apparatus
GB8323031D0 (en) System for testing articles
GB2149520B (en) Dynamometers
GB2137765B (en) Force measurement
DE3480424D1 (en) Conjugate interferometer
GB8624694D0 (en) Probe

Legal Events

Date Code Title Description
HU90 Patent valid on 900628
HMM4 Cancellation of final prot. due to non-payment of fee