DE3775121D1 - Verfahren zur herstellung eines kontaktes auf einem diamant. - Google Patents

Verfahren zur herstellung eines kontaktes auf einem diamant.

Info

Publication number
DE3775121D1
DE3775121D1 DE8787305451T DE3775121T DE3775121D1 DE 3775121 D1 DE3775121 D1 DE 3775121D1 DE 8787305451 T DE8787305451 T DE 8787305451T DE 3775121 T DE3775121 T DE 3775121T DE 3775121 D1 DE3775121 D1 DE 3775121D1
Authority
DE
Germany
Prior art keywords
conductive regions
diamond
detector
contacts
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787305451T
Other languages
German (de)
English (en)
Inventor
Johan Frans Prins
Tom Leong Nam
Rex James Keddy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
De Beers Industrial Diamond Division Pty Ltd
Original Assignee
De Beers Industrial Diamond Division Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De Beers Industrial Diamond Division Pty Ltd filed Critical De Beers Industrial Diamond Division Pty Ltd
Application granted granted Critical
Publication of DE3775121D1 publication Critical patent/DE3775121D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/26—Measuring radiation intensity with resistance detectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
    • H10D64/0111—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors
    • H10D64/0114—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group IV semiconductors to diamond, semiconducting diamond-like carbon or graphene
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/105—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by conversion of non-conductive material on or in the support into conductive material, e.g. by using an energy beam

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Light Receiving Elements (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE8787305451T 1986-06-20 1987-06-19 Verfahren zur herstellung eines kontaktes auf einem diamant. Expired - Lifetime DE3775121D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ZA864614 1986-06-20

Publications (1)

Publication Number Publication Date
DE3775121D1 true DE3775121D1 (de) 1992-01-23

Family

ID=25578457

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787305451T Expired - Lifetime DE3775121D1 (de) 1986-06-20 1987-06-19 Verfahren zur herstellung eines kontaktes auf einem diamant.

Country Status (7)

Country Link
US (1) US4833328A (enExample)
EP (1) EP0250252B1 (enExample)
JP (1) JPS6345582A (enExample)
KR (1) KR950009929B1 (enExample)
AT (1) ATE70369T1 (enExample)
DE (1) DE3775121D1 (enExample)
ZA (1) ZA874362B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL81537A (en) * 1986-02-24 1991-05-12 De Beers Ind Diamond Method and synthetic diamond detector for detection of nuclear radiation
CA1289683C (en) * 1987-10-27 1991-09-24 De Beers Industrial Diamond Division (Proprietary) Diamond radiation probe
DE68907196T2 (de) * 1988-12-28 1993-10-14 De Beers Ind Diamond Diamant-Szintillationsdetektor.
GB8902443D0 (en) * 1989-02-03 1989-03-22 Jones Barbara L Radiation detector
CA2021020A1 (en) * 1989-07-13 1991-01-14 Johan Frans Prins Diamond diode structure
US5079425A (en) * 1990-01-10 1992-01-07 Sumitomo Electric Industries, Ltd. Radiation detecting element
JP2836790B2 (ja) * 1991-01-08 1998-12-14 株式会社神戸製鋼所 ダイヤモンド薄膜へのオーミック電極形成方法
US5334306A (en) * 1991-12-11 1994-08-02 At&T Bell Laboratories Metallized paths on diamond surfaces
EP0614094B1 (en) * 1993-03-02 2000-06-07 De Beers Industrial Diamond Division (Proprietary) Limited Diamond phosphorescence radiation detector
CA2281972C (en) * 1993-07-20 2000-10-17 Saint-Gobain/Norton Industrial Ceramics Corporation Cvd diamond radiation detector
ZA946002B (en) * 1993-08-12 1995-03-14 De Beers Ind Diamond Detecting ionising radiation
IL124592A (en) 1997-05-23 2002-07-25 Gersan Ets Method of marking a gemstone or diamond
GB9710738D0 (en) * 1997-05-23 1997-07-16 Gersan Ets Diamond marking
JP6634646B2 (ja) * 2015-09-14 2020-01-22 学校法人早稲田大学 グラファイト積層ダイヤモンド基板及びその製造方法、並びに半導体装置及びその製造方法
EP4001970B1 (en) * 2020-11-24 2026-08-19 Commissariat à l'Energie Atomique et aux Energies Alternatives Radiation detector

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3383567A (en) * 1965-09-15 1968-05-14 Ion Physics Corp Solid state translating device comprising irradiation implanted conductivity ions
FR1601100A (enExample) * 1967-03-29 1970-08-10
US3824680A (en) * 1968-03-28 1974-07-23 Levina Fizichesky I I Lebedeva Nuclear radiation detector and method of manufacturing same
US4609520A (en) * 1984-01-30 1986-09-02 The United States Of America As Represented By The Secretary Of The Army Protection of radiation detectors from fast neutron damage

Also Published As

Publication number Publication date
JPH0531951B2 (enExample) 1993-05-13
EP0250252A1 (en) 1987-12-23
KR880000800A (ko) 1988-03-29
ATE70369T1 (de) 1991-12-15
ZA874362B (en) 1988-02-24
EP0250252B1 (en) 1991-12-11
US4833328A (en) 1989-05-23
JPS6345582A (ja) 1988-02-26
KR950009929B1 (en) 1995-09-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee