DE3764850D1 - Messprobe fuer werkstuecke und dazu gehoerige elektrische schaltungen. - Google Patents
Messprobe fuer werkstuecke und dazu gehoerige elektrische schaltungen.Info
- Publication number
- DE3764850D1 DE3764850D1 DE8787105396T DE3764850T DE3764850D1 DE 3764850 D1 DE3764850 D1 DE 3764850D1 DE 8787105396 T DE8787105396 T DE 8787105396T DE 3764850 T DE3764850 T DE 3764850T DE 3764850 D1 DE3764850 D1 DE 3764850D1
- Authority
- DE
- Germany
- Prior art keywords
- workpieces
- electrical circuits
- measuring sample
- related electrical
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/002—Constructional details of contacts for gauges actuating one or more contacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB868610088A GB8610088D0 (en) | 1986-04-24 | 1986-04-24 | Probe |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3764850D1 true DE3764850D1 (de) | 1990-10-18 |
Family
ID=10596791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787105396T Expired - Lifetime DE3764850D1 (de) | 1986-04-24 | 1987-04-11 | Messprobe fuer werkstuecke und dazu gehoerige elektrische schaltungen. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4817362A (de) |
EP (1) | EP0242747B1 (de) |
JP (1) | JP2539824B2 (de) |
DE (1) | DE3764850D1 (de) |
GB (1) | GB8610088D0 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0630721Y2 (ja) * | 1989-02-20 | 1994-08-17 | 三洋電機株式会社 | 生ゴミ収納装置 |
US5339535A (en) * | 1990-02-23 | 1994-08-23 | Renishaw Metrology Limited | Touch probe |
US5253428A (en) * | 1990-02-23 | 1993-10-19 | Renishaw Plc | Touch probe |
US5505005A (en) * | 1990-02-23 | 1996-04-09 | Renishaw Plc | Touch probe |
GB9004117D0 (en) * | 1990-02-23 | 1990-04-18 | Renishaw Plc | Touch probe |
US5491904A (en) * | 1990-02-23 | 1996-02-20 | Mcmurtry; David R. | Touch probe |
DE69205738T2 (de) * | 1991-07-03 | 1996-04-11 | Renishaw Metrology Ltd | Signalverarbeitungsschaltung für Triggersonde. |
GB9116245D0 (en) * | 1991-07-27 | 1991-09-11 | Renishaw Metrology Ltd | Sensing circuit for position-sensing probe |
US5322007A (en) * | 1991-08-15 | 1994-06-21 | Heat And Control, Inc. | Compact, high-capacity oven |
DE4204602A1 (de) * | 1992-02-15 | 1993-08-19 | Zeiss Carl Fa | Verfahren zur koordinatenmessung an werkstuecken |
EP0605140B2 (de) * | 1992-12-24 | 2002-10-09 | Renishaw plc | Tastsonde und Signalverarbeitungsschaltung dafür |
GB9305687D0 (en) * | 1993-03-19 | 1993-05-05 | Renishaw Metrology Ltd | A signal processing for trigger probe |
GB9415338D0 (en) * | 1994-07-29 | 1994-09-21 | Renishaw Plc | Trigger probe circuit |
US5657549A (en) * | 1995-10-04 | 1997-08-19 | Shen; Yin-Lin | Method of improving accuracy of touch trigger probe |
US6131301A (en) * | 1997-07-18 | 2000-10-17 | Renishaw Plc | Method of and apparatus for measuring workpieces using a coordinate positioning machine |
US6718647B2 (en) | 2000-06-14 | 2004-04-13 | Renishaw Plc | Force sensing probe |
JP3628938B2 (ja) * | 2000-06-23 | 2005-03-16 | 株式会社ミツトヨ | タッチ信号プローブ |
JP4274167B2 (ja) * | 2005-10-18 | 2009-06-03 | 村田機械株式会社 | ワーク計測器付き工作機械 |
JP5754971B2 (ja) * | 2011-02-14 | 2015-07-29 | キヤノン株式会社 | 形状測定装置及び形状測定方法 |
US10184773B2 (en) | 2015-12-22 | 2019-01-22 | Mitutoyo Corporation | Sensor signal offset compensation system for a CMM touch probe |
US10145666B2 (en) | 2016-12-19 | 2018-12-04 | Mitutoyo Corporation | Touch probe for CMM including digital signal communication |
US10557770B2 (en) * | 2017-09-14 | 2020-02-11 | Sensata Technologies, Inc. | Pressure sensor with improved strain gauge |
JP6898966B2 (ja) * | 2019-06-07 | 2021-07-07 | 株式会社ミツトヨ | 不具合判定ユニット |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1445977A (en) * | 1972-09-21 | 1976-08-11 | Rolls Royce | Probes |
GB1589297A (en) * | 1976-12-24 | 1981-05-13 | Rolls Royce | Probe for use in measuring apparatus |
US4339714A (en) * | 1978-07-07 | 1982-07-13 | Rolls Royce Limited | Probe having passive means transmitting an output signal by reactive coupling |
US4443946A (en) * | 1980-07-01 | 1984-04-24 | Renishaw Electrical Limited | Probe for measuring workpieces |
DE3279249D1 (en) * | 1981-06-30 | 1989-01-05 | Renishaw Plc | Probe for measuring workpieces |
JPS5866801A (ja) * | 1981-10-16 | 1983-04-21 | Futaba Corp | 接触式センサ |
DE3210711C2 (de) * | 1982-03-24 | 1986-11-13 | Dr.-Ing. Höfler Meßgerätebau GmbH, 7505 Ettlingen | Mehrkoordinatentaster mit einstellbarer Meßkraft zum Abtasten von mehrdimensionalen, stillstehenden Gegenständen |
GB8409091D0 (en) * | 1984-04-09 | 1984-05-16 | Renishaw Plc | Probe for measuring workpieces |
DE3417991A1 (de) * | 1984-05-15 | 1985-11-21 | Mauser-Werke Oberndorf Gmbh, 7238 Oberndorf | Tastkopf einer messmaschine |
-
1986
- 1986-04-24 GB GB868610088A patent/GB8610088D0/en active Pending
-
1987
- 1987-04-09 US US07/036,464 patent/US4817362A/en not_active Expired - Lifetime
- 1987-04-11 DE DE8787105396T patent/DE3764850D1/de not_active Expired - Lifetime
- 1987-04-11 EP EP19870105396 patent/EP0242747B1/de not_active Expired
- 1987-04-24 JP JP62100254A patent/JP2539824B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB8610088D0 (en) | 1986-05-29 |
EP0242747A2 (de) | 1987-10-28 |
US4817362A (en) | 1989-04-04 |
EP0242747A3 (en) | 1988-04-06 |
JPS6324105A (ja) | 1988-02-01 |
EP0242747B1 (de) | 1990-09-12 |
JP2539824B2 (ja) | 1996-10-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3764850D1 (de) | Messprobe fuer werkstuecke und dazu gehoerige elektrische schaltungen. | |
DE3577921D1 (de) | Testvorrichtung fuer elektrische schaltungen. | |
DE69031551T2 (de) | Integrierte Halbleiterschaltung und Testmethode dafür | |
DE3686091D1 (de) | Integrierte halbleiterschaltungen mit schaltungselementen zur untersuchung der integrierten schaltungen sowie mittel zum pruefen der schaltungselemente. | |
DE3689538D1 (de) | Integrierte Schaltung und Optimierungsverfahren dafür. | |
DE3673775D1 (de) | Verfahren zur bildung von kontakten und gegenseitigen verbindungen fuer integrierte schaltungen. | |
DE432870T1 (de) | Elektrische testsonde. | |
DE3582752D1 (de) | Testeinrichtung fuer integrierte schaltungen. | |
DE69019402T2 (de) | Prüfverfahren und -gerät für integrierte Schaltungen. | |
DE3579198D1 (de) | Kontakte und fassung zur aufnahme von integrierten schaltungen. | |
DE3882689D1 (de) | Testprobe fuer elektrische signale. | |
DE3672955D1 (de) | Rechnerpruefeinrichtung und verfahren dazu. | |
DE3788029T2 (de) | Verbindungssystem für elektrische schaltungen. | |
DE3675236D1 (de) | Kontaktloses testen von integrierten schaltungen. | |
KR880700275A (ko) | 전자 장치 테스트 방법 및 테스트용 집적 회로 테스터 | |
DE69633695D1 (de) | Konfigurierbare Kontaktleiste zur bequemen parallellen Prüfung von integrierten Schaltungen | |
DE3668694D1 (de) | Kapazitives messverfahren fuer laengen und winkel. | |
DE69223786D1 (de) | Strommessanordnung zum Testen von integrierten Schaltungen | |
DE3667228D1 (de) | Schutzeinrichtung fuer elektrische schaltungen. | |
DE3580877D1 (de) | Elektrische schaltungen und komponenten. | |
DE3667547D1 (de) | Kontaktloses pruefen integrierter schaltungen. | |
DE68909735D1 (de) | Elektrische Testanordnung. | |
DE68915284D1 (de) | Testen von schaltungen. | |
DE68915781D1 (de) | Elektrische testsonde. | |
DE68918180T2 (de) | Abtast- und Halteschaltung. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |