DE3713505C2 - Verfahren zur Herstellung eines elektrischen Feuchtigkeitsfühlers - Google Patents
Verfahren zur Herstellung eines elektrischen FeuchtigkeitsfühlersInfo
- Publication number
- DE3713505C2 DE3713505C2 DE3713505A DE3713505A DE3713505C2 DE 3713505 C2 DE3713505 C2 DE 3713505C2 DE 3713505 A DE3713505 A DE 3713505A DE 3713505 A DE3713505 A DE 3713505A DE 3713505 C2 DE3713505 C2 DE 3713505C2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- temperature
- sensor
- aluminum
- minutes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 230000036571 hydration Effects 0.000 claims description 6
- 238000006703 hydration reaction Methods 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- VXAUWWUXCIMFIM-UHFFFAOYSA-M aluminum;oxygen(2-);hydroxide Chemical compound [OH-].[O-2].[Al+3] VXAUWWUXCIMFIM-UHFFFAOYSA-M 0.000 claims description 3
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 238000010410 dusting Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 239000012153 distilled water Substances 0.000 claims description 2
- 238000002791 soaking Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims 1
- 229910000403 monosodium phosphate Inorganic materials 0.000 claims 1
- 235000019799 monosodium phosphate Nutrition 0.000 claims 1
- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000011088 calibration curve Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 5
- 229910001593 boehmite Inorganic materials 0.000 description 4
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 238000005496 tempering Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 1
- 235000013405 beer Nutrition 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- BNIILDVGGAEEIG-UHFFFAOYSA-L disodium hydrogen phosphate Chemical compound [Na+].[Na+].OP([O-])([O-])=O BNIILDVGGAEEIG-UHFFFAOYSA-L 0.000 description 1
- 229910000397 disodium phosphate Inorganic materials 0.000 description 1
- 235000019800 disodium phosphate Nutrition 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
- C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
- C23C22/07—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 containing phosphates
- C23C22/08—Orthophosphates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
- C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
- C23C22/07—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 containing phosphates
- C23C22/08—Orthophosphates
- C23C22/18—Orthophosphates containing manganese cations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS855843A CS253788B1 (en) | 1985-08-13 | 1985-08-13 | Method for electric moisture-content sensor production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3713505A1 DE3713505A1 (de) | 1988-11-10 |
| DE3713505C2 true DE3713505C2 (de) | 1997-04-24 |
Family
ID=5404105
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE3713505A Expired - Fee Related DE3713505C2 (de) | 1985-08-13 | 1987-04-22 | Verfahren zur Herstellung eines elektrischen Feuchtigkeitsfühlers |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4765870A (en, 2012) |
| CS (1) | CS253788B1 (en, 2012) |
| DE (1) | DE3713505C2 (en, 2012) |
| FR (1) | FR2614700B1 (en, 2012) |
| GB (1) | GB2204597B (en, 2012) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5211663A (en) * | 1991-06-24 | 1993-05-18 | Smith & Nephew Richards, Inc. | Passivation methods for metallic medical implants |
| DE19548740A1 (de) * | 1995-12-23 | 1997-06-26 | Abb Research Ltd | Verfahren zur Oberflächenbehandlung von Aluminium und Aluminiumlegierungen |
| US5844125A (en) * | 1997-10-01 | 1998-12-01 | Millipore Corporation | Method and apparatus for measuring moisture content in a gas |
| US6500276B1 (en) * | 1998-12-15 | 2002-12-31 | Lynntech Coatings, Ltd. | Polymetalate and heteropolymetalate conversion coatings for metal substrates |
| WO2009144670A1 (en) * | 2008-05-30 | 2009-12-03 | Nxp B.V. | Sensor for determining humidity |
| RU197788U1 (ru) * | 2020-02-20 | 2020-05-28 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Поволжский государственный технологический университет" | Микроминиатюрный сорбционный датчик влажности газа |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3075385A (en) * | 1960-12-15 | 1963-01-29 | Clifford M Stover | Hygrometer |
| US3574681A (en) * | 1966-03-31 | 1971-04-13 | Texas Instruments Inc | Aluminum oxide humidity sensor |
| US3523244A (en) * | 1967-11-01 | 1970-08-04 | Panametrics | Device for measurement of absolute humidity |
| DE2211553C3 (de) * | 1972-03-10 | 1978-04-20 | Henkel Kgaa, 4000 Duesseldorf | Verfahren zum Verdichten von anodischen Oxidschichten auf Aluminium und Aluminiumlegierungen |
| GB1441245A (en) * | 1972-11-23 | 1976-06-30 | Kodak Ltd | Treating anodised aluminium |
| US4057823A (en) * | 1976-07-02 | 1977-11-08 | International Business Machines Corporation | Porous silicon dioxide moisture sensor and method for manufacture of a moisture sensor |
| CS197742B1 (cs) * | 1977-12-19 | 1980-05-30 | Ivan Emmer | Způsob výroby elektrického vlhkoměrného čidla |
| GB2017924B (en) * | 1978-02-20 | 1982-09-02 | Matsushita Electric Ind Co Ltd | Humidity sensing element of electric capacitance change type and method of producing same |
| US4204919A (en) * | 1979-05-02 | 1980-05-27 | Sprague Electric Company | Treating etched aluminum electrolytic capacitor foil |
| CS210174B1 (en) * | 1979-07-12 | 1982-01-29 | Ivan Emmer | Method of making the electric hygrometric sensor |
| US4470885A (en) * | 1983-02-07 | 1984-09-11 | Sprague Electric Company | Process for treating aluminum electrolytic capacitor foil |
-
1985
- 1985-08-13 CS CS855843A patent/CS253788B1/cs not_active IP Right Cessation
-
1987
- 1987-04-22 DE DE3713505A patent/DE3713505C2/de not_active Expired - Fee Related
- 1987-04-30 FR FR878706166A patent/FR2614700B1/fr not_active Expired - Fee Related
- 1987-05-08 US US07/047,805 patent/US4765870A/en not_active Expired - Fee Related
- 1987-05-14 GB GB8711458A patent/GB2204597B/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CS8505843A (en, 2012) | 1987-05-14 |
| GB2204597A (en) | 1988-11-16 |
| FR2614700B1 (fr) | 1990-07-20 |
| GB8711458D0 (en) | 1987-06-17 |
| GB2204597B (en) | 1991-11-20 |
| DE3713505A1 (de) | 1988-11-10 |
| FR2614700A1 (fr) | 1988-11-04 |
| CS253788B1 (en) | 1987-12-17 |
| US4765870A (en) | 1988-08-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3019870C2 (en, 2012) | ||
| DE3784734T2 (de) | Enzymatischer sensor. | |
| DE3750302T2 (de) | Sauerstoffsensor. | |
| DE69531961T2 (de) | Verfahren zur messung von gaskonzentrationen und mikrohergestellter sensor dafür | |
| DE2548402A1 (de) | Multifunktioneller elektrochemischer miniatursensor fuer gleichzeitige co tief 2 -/ph-messungen | |
| DE2806408C3 (de) | Verfahren zur Herstellung einer Sauerstoff-Konzentrationszelle | |
| DE3788215T2 (de) | Feste Messelektrode und Verfahren zu deren Herstellung. | |
| EP0544934A1 (de) | Verfahren zum Stabilisieren der Oberflächeneigenschaften von in Vakuum temperaturzubehandelnden Gegenständen | |
| DE2824609C2 (de) | Vorrichtung zur Feuchtigkeitsmessung durch elektrostatische Kapazitätsänderung | |
| DE3713505C2 (de) | Verfahren zur Herstellung eines elektrischen Feuchtigkeitsfühlers | |
| DE69123896T2 (de) | pH-Messelektrode und Verfahren zur Herstellung derselben | |
| EP0082934B1 (de) | Feuchtigkeitsfühler und Verfahren zu seiner Herstellung | |
| DE3247575C2 (en, 2012) | ||
| DE102019108890A1 (de) | Sensorelement für einen potentiometrischen Sensor | |
| DE68919243T2 (de) | Festkörpersensor zur Bestimmung der Wasserstoffkonzentration mit einer Festkörperreferenzelektrode und Herstellung eines solchen. | |
| DE2030394C3 (de) | Verfahren zur Herstellung eines Elektrolytkondensators | |
| DE2818829C2 (en, 2012) | ||
| DE69128128T2 (de) | Kleine Glaselektrode und Verfahren für deren Herstellung | |
| DE2600846C3 (de) | Ionenselektive Elektrode und Verfahren zu deren Herstellung | |
| DE3507183C1 (de) | Metall/Metalloxid-Messelektrode zur pH-Messung | |
| DE2040200C3 (de) | Membran für Elektroden zur Messung von Ionenkonzentrationen | |
| AT393327B (de) | Verfahren zur erzeugung eines elektrischen feuchtigkeitsfuehlers | |
| DE3521741A1 (de) | Verfahren zur herstellung einer fluoridsensitiven membran | |
| DE19611113C2 (de) | Redoxelektrode mit einer passiven Oberflächenschicht, Verfahren zu deren Herstellung und Verwendungen der Redoxelektrode | |
| DE102004041620A1 (de) | Gassensor und Herstellungsverfahren für einen Gassensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8110 | Request for examination paragraph 44 | ||
| 8125 | Change of the main classification |
Ipc: G01N 27/12 |
|
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |