DE3702412A1 - Druckaufnehmer mit einem siliziumkoerper - Google Patents

Druckaufnehmer mit einem siliziumkoerper

Info

Publication number
DE3702412A1
DE3702412A1 DE19873702412 DE3702412A DE3702412A1 DE 3702412 A1 DE3702412 A1 DE 3702412A1 DE 19873702412 DE19873702412 DE 19873702412 DE 3702412 A DE3702412 A DE 3702412A DE 3702412 A1 DE3702412 A1 DE 3702412A1
Authority
DE
Germany
Prior art keywords
membrane
resistance elements
cavity
pressure sensor
silicon body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19873702412
Other languages
German (de)
English (en)
Other versions
DE3702412C2 (enExample
Inventor
Volker Dr Graeger
Rolf Kobs
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Philips Patentverwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH filed Critical Philips Patentverwaltung GmbH
Priority to DE19873702412 priority Critical patent/DE3702412A1/de
Priority to DE8888200095T priority patent/DE3877006D1/de
Priority to EP88200095A priority patent/EP0276889B1/de
Priority to JP63014767A priority patent/JP2527779B2/ja
Publication of DE3702412A1 publication Critical patent/DE3702412A1/de
Priority to US07/411,193 priority patent/US5024097A/en
Application granted granted Critical
Publication of DE3702412C2 publication Critical patent/DE3702412C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
DE19873702412 1987-01-28 1987-01-28 Druckaufnehmer mit einem siliziumkoerper Granted DE3702412A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE19873702412 DE3702412A1 (de) 1987-01-28 1987-01-28 Druckaufnehmer mit einem siliziumkoerper
DE8888200095T DE3877006D1 (de) 1987-01-28 1988-01-20 Druckaufnehmer fuer statische druckbelastungen mit einem siliziumkoerper.
EP88200095A EP0276889B1 (de) 1987-01-28 1988-01-20 Druckaufnehmer für statische Druckbelastungen mit einem Siliziumkörper
JP63014767A JP2527779B2 (ja) 1987-01-28 1988-01-27 圧力センサ
US07/411,193 US5024097A (en) 1987-01-28 1989-09-20 Pressure sensor comprising a silicon body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19873702412 DE3702412A1 (de) 1987-01-28 1987-01-28 Druckaufnehmer mit einem siliziumkoerper

Publications (2)

Publication Number Publication Date
DE3702412A1 true DE3702412A1 (de) 1988-08-18
DE3702412C2 DE3702412C2 (enExample) 1990-01-04

Family

ID=6319654

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19873702412 Granted DE3702412A1 (de) 1987-01-28 1987-01-28 Druckaufnehmer mit einem siliziumkoerper
DE8888200095T Expired - Fee Related DE3877006D1 (de) 1987-01-28 1988-01-20 Druckaufnehmer fuer statische druckbelastungen mit einem siliziumkoerper.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8888200095T Expired - Fee Related DE3877006D1 (de) 1987-01-28 1988-01-20 Druckaufnehmer fuer statische druckbelastungen mit einem siliziumkoerper.

Country Status (4)

Country Link
US (1) US5024097A (enExample)
EP (1) EP0276889B1 (enExample)
JP (1) JP2527779B2 (enExample)
DE (2) DE3702412A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5600074A (en) * 1991-11-15 1997-02-04 Robert Bosch Gmbh Silicon chip for use in a force-detection sensor
DE102011112935A1 (de) * 2011-09-13 2013-03-14 Micronas Gmbh Kraftsensor

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0374883A (ja) * 1989-08-16 1991-03-29 Sanyo Electric Co Ltd 圧力センサのダイヤフラム製造方法
EP0430681A3 (en) * 1989-11-30 1992-05-20 Honeywell Inc. Thick diaphragm pressure transducer
DE59006238D1 (de) * 1989-12-06 1994-07-28 Siemens Ag Albis Kraftwandler.
JP3300060B2 (ja) * 1992-10-22 2002-07-08 キヤノン株式会社 加速度センサー及びその製造方法
NO179651C (no) * 1994-03-07 1996-11-20 Sinvent As Trykkmåler
NO304328B1 (no) * 1996-02-27 1998-11-30 Nyfotek As TrykkmÕler
US6240785B1 (en) 1996-07-22 2001-06-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Cryogenic, absolute, high pressure sensor
JP3206467B2 (ja) * 1996-12-25 2001-09-10 トヨタ自動車株式会社 太陽電池セルの冷却液封止構造
US6044711A (en) * 1997-01-10 2000-04-04 Psi-Tronix, Inc. Force sensing apparatus
DE19810756A1 (de) * 1998-03-12 1999-09-23 Fraunhofer Ges Forschung Sensoranordnung zur Messung von Druck, Kraft oder Meßgrößen, die sich auf Druck oder Kraft zurückführen lassen, Verfahren zur Herstellung der Sensoranordnung, Sensorelement und Verfahren zur Herstellung des Sensorelements
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
US7028552B2 (en) * 2004-05-17 2006-04-18 Kavlico Corporation Reliable piezo-resistive pressure sensor
CN101209382B (zh) * 2006-12-27 2010-06-23 鸿富锦精密工业（深圳）有限公司 动作传感装置
DE102011006922B4 (de) * 2011-04-07 2013-07-11 SIOS Meßtechnik GmbH Messwandler für die Sensortechnik
DE102014119400A1 (de) * 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Druckwandler und Verfahren zum Betreiben eines solchen

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2123690B2 (de) * 1970-05-20 1979-04-05 Conrac Corp., New York, N.Y. (V.St.A.) Druckwandler
US4511878A (en) * 1982-09-20 1985-04-16 Hitachi, Ltd. Pressure sensor with improved semiconductor diaphragm
US4528855A (en) * 1984-07-02 1985-07-16 Itt Corporation Integral differential and static pressure transducer

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3820401A (en) * 1972-11-07 1974-06-28 Sperry Rand Corp Piezoresistive bridge transducer
DE2617731C3 (de) * 1976-04-23 1979-06-07 Siemens Ag, 1000 Berlin Und 8000 Muenchen Miniaturdruckmeßwandler
JPS5750479A (en) * 1980-09-10 1982-03-24 Hitachi Ltd Detector for detecting pressure and pressure difference of semiconductor
US4444054A (en) * 1982-08-30 1984-04-24 Ametek, Inc. Temperature compensation for diffused semiconductor strain devices
GB2128806A (en) * 1982-09-29 1984-05-02 Itt Ind Ltd Pressure transducer
US4462018A (en) * 1982-11-05 1984-07-24 Gulton Industries, Inc. Semiconductor strain gauge with integral compensation resistors
US4592238A (en) * 1985-04-15 1986-06-03 Gould Inc. Laser-recrystallized diaphragm pressure sensor and method of making

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2123690B2 (de) * 1970-05-20 1979-04-05 Conrac Corp., New York, N.Y. (V.St.A.) Druckwandler
US4511878A (en) * 1982-09-20 1985-04-16 Hitachi, Ltd. Pressure sensor with improved semiconductor diaphragm
US4528855A (en) * 1984-07-02 1985-07-16 Itt Corporation Integral differential and static pressure transducer

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
messen prüfen automatisieren April 1985, S. 180-188 *
Siemens Forsch. Entw. Ber. Bd. 13/1984, No. 6, S. 294-302 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5600074A (en) * 1991-11-15 1997-02-04 Robert Bosch Gmbh Silicon chip for use in a force-detection sensor
DE102011112935A1 (de) * 2011-09-13 2013-03-14 Micronas Gmbh Kraftsensor
US8915152B2 (en) 2011-09-13 2014-12-23 Micronas Gmbh Force sensor with wings and force distribution component
DE102011112935B4 (de) * 2011-09-13 2015-02-12 Micronas Gmbh Kraftsensor

Also Published As

Publication number Publication date
JP2527779B2 (ja) 1996-08-28
EP0276889A3 (en) 1990-07-04
EP0276889B1 (de) 1992-12-30
US5024097A (en) 1991-06-18
EP0276889A2 (de) 1988-08-03
DE3877006D1 (de) 1993-02-11
JPS63191936A (ja) 1988-08-09
DE3702412C2 (enExample) 1990-01-04

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: ENVEC MESS- UND REGELTECHNIK GMBH + CO, 34123 KASS

8327 Change in the person/name/address of the patent owner

Owner name: ENVEC MESS- UND REGELTECHNIK GMBH + CO., 79576 WEI

8327 Change in the person/name/address of the patent owner

Owner name: ENDRESS + HAUSER GMBH + CO., 79689 MAULBURG, DE

8327 Change in the person/name/address of the patent owner

Owner name: ENDRESS + HAUSER GMBH + CO. KG, 79689 MAULBURG, DE

8339 Ceased/non-payment of the annual fee