JP2527779B2 - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JP2527779B2
JP2527779B2 JP63014767A JP1476788A JP2527779B2 JP 2527779 B2 JP2527779 B2 JP 2527779B2 JP 63014767 A JP63014767 A JP 63014767A JP 1476788 A JP1476788 A JP 1476788A JP 2527779 B2 JP2527779 B2 JP 2527779B2
Authority
JP
Japan
Prior art keywords
diaphragm
pressure sensor
cavity
silicon body
annular groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63014767A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63191936A (ja
Inventor
フォルケル・グレーガー
ロルフ・ウド・デーテル・コブス
Original Assignee
アンヴェク メス―ウント リーガルテクニク ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アンヴェク メス―ウント リーガルテクニク ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー filed Critical アンヴェク メス―ウント リーガルテクニク ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー
Publication of JPS63191936A publication Critical patent/JPS63191936A/ja
Application granted granted Critical
Publication of JP2527779B2 publication Critical patent/JP2527779B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP63014767A 1987-01-28 1988-01-27 圧力センサ Expired - Fee Related JP2527779B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19873702412 DE3702412A1 (de) 1987-01-28 1987-01-28 Druckaufnehmer mit einem siliziumkoerper
DE3702412.4 1987-01-28

Publications (2)

Publication Number Publication Date
JPS63191936A JPS63191936A (ja) 1988-08-09
JP2527779B2 true JP2527779B2 (ja) 1996-08-28

Family

ID=6319654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63014767A Expired - Fee Related JP2527779B2 (ja) 1987-01-28 1988-01-27 圧力センサ

Country Status (4)

Country Link
US (1) US5024097A (enExample)
EP (1) EP0276889B1 (enExample)
JP (1) JP2527779B2 (enExample)
DE (2) DE3702412A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0374883A (ja) * 1989-08-16 1991-03-29 Sanyo Electric Co Ltd 圧力センサのダイヤフラム製造方法
EP0430681A3 (en) * 1989-11-30 1992-05-20 Honeywell Inc. Thick diaphragm pressure transducer
ATE107770T1 (de) * 1989-12-06 1994-07-15 Siemens Ag Albis Kraftwandler.
DE4137624A1 (de) * 1991-11-15 1993-05-19 Bosch Gmbh Robert Silizium-chip zur verwendung in einem kraftsensor
JP3300060B2 (ja) * 1992-10-22 2002-07-08 キヤノン株式会社 加速度センサー及びその製造方法
NO179651C (no) * 1994-03-07 1996-11-20 Sinvent As Trykkmåler
NO304328B1 (no) * 1996-02-27 1998-11-30 Nyfotek As TrykkmÕler
US6240785B1 (en) 1996-07-22 2001-06-05 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Cryogenic, absolute, high pressure sensor
JP3206467B2 (ja) * 1996-12-25 2001-09-10 トヨタ自動車株式会社 太陽電池セルの冷却液封止構造
US6044711A (en) * 1997-01-10 2000-04-04 Psi-Tronix, Inc. Force sensing apparatus
DE19810756A1 (de) * 1998-03-12 1999-09-23 Fraunhofer Ges Forschung Sensoranordnung zur Messung von Druck, Kraft oder Meßgrößen, die sich auf Druck oder Kraft zurückführen lassen, Verfahren zur Herstellung der Sensoranordnung, Sensorelement und Verfahren zur Herstellung des Sensorelements
US7152478B2 (en) * 2000-07-20 2006-12-26 Entegris, Inc. Sensor usable in ultra pure and highly corrosive environments
US6612175B1 (en) 2000-07-20 2003-09-02 Nt International, Inc. Sensor usable in ultra pure and highly corrosive environments
US7028552B2 (en) * 2004-05-17 2006-04-18 Kavlico Corporation Reliable piezo-resistive pressure sensor
CN101209382B (zh) * 2006-12-27 2010-06-23 鸿富锦精密工业（深圳）有限公司 动作传感装置
DE102011006922B4 (de) * 2011-04-07 2013-07-11 SIOS Meßtechnik GmbH Messwandler für die Sensortechnik
DE102011112935B4 (de) * 2011-09-13 2015-02-12 Micronas Gmbh Kraftsensor
DE102014119400A1 (de) * 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Druckwandler und Verfahren zum Betreiben eines solchen

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3641812A (en) * 1970-05-20 1972-02-15 Conrac Corp Silicon diaphragm with integral bridge transducer
US3820401A (en) * 1972-11-07 1974-06-28 Sperry Rand Corp Piezoresistive bridge transducer
DE2617731C3 (de) * 1976-04-23 1979-06-07 Siemens Ag, 1000 Berlin Und 8000 Muenchen Miniaturdruckmeßwandler
JPS5750479A (en) * 1980-09-10 1982-03-24 Hitachi Ltd Detector for detecting pressure and pressure difference of semiconductor
US4444054A (en) * 1982-08-30 1984-04-24 Ametek, Inc. Temperature compensation for diffused semiconductor strain devices
JPS5952727A (ja) * 1982-09-20 1984-03-27 Hitachi Ltd 半導体圧力センサ
GB2128806A (en) * 1982-09-29 1984-05-02 Itt Ind Ltd Pressure transducer
US4462018A (en) * 1982-11-05 1984-07-24 Gulton Industries, Inc. Semiconductor strain gauge with integral compensation resistors
US4528855A (en) * 1984-07-02 1985-07-16 Itt Corporation Integral differential and static pressure transducer
US4592238A (en) * 1985-04-15 1986-06-03 Gould Inc. Laser-recrystallized diaphragm pressure sensor and method of making

Also Published As

Publication number Publication date
EP0276889B1 (de) 1992-12-30
DE3877006D1 (de) 1993-02-11
US5024097A (en) 1991-06-18
EP0276889A3 (en) 1990-07-04
DE3702412C2 (enExample) 1990-01-04
JPS63191936A (ja) 1988-08-09
DE3702412A1 (de) 1988-08-18
EP0276889A2 (de) 1988-08-03

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