DE3682535D1 - Verfahren und vorrichtung zum messen feiner schwebeteilchen. - Google Patents

Verfahren und vorrichtung zum messen feiner schwebeteilchen.

Info

Publication number
DE3682535D1
DE3682535D1 DE8686107281T DE3682535T DE3682535D1 DE 3682535 D1 DE3682535 D1 DE 3682535D1 DE 8686107281 T DE8686107281 T DE 8686107281T DE 3682535 T DE3682535 T DE 3682535T DE 3682535 D1 DE3682535 D1 DE 3682535D1
Authority
DE
Germany
Prior art keywords
measuring fine
hanging particles
particles
fine hanging
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686107281T
Other languages
English (en)
Inventor
Mitsuaki Iino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idemitsu Kosan Co Ltd
Original Assignee
Idemitsu Kosan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idemitsu Kosan Co Ltd filed Critical Idemitsu Kosan Co Ltd
Application granted granted Critical
Publication of DE3682535D1 publication Critical patent/DE3682535D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/05Flow-through cuvettes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/49Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042Investigating dispersion of solids
    • G01N2015/0053Investigating dispersion of solids in liquids, e.g. trouble
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03Cuvette constructions
    • G01N21/05Flow-through cuvettes
    • G01N2021/052Tubular type; cavity type; multireflective

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE8686107281T 1985-05-28 1986-05-28 Verfahren und vorrichtung zum messen feiner schwebeteilchen. Expired - Fee Related DE3682535D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60114565A JPH0640059B2 (ja) 1985-05-28 1985-05-28 浮遊微粒子測定方法及びその装置

Publications (1)

Publication Number Publication Date
DE3682535D1 true DE3682535D1 (de) 1992-01-02

Family

ID=14640996

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686107281T Expired - Fee Related DE3682535D1 (de) 1985-05-28 1986-05-28 Verfahren und vorrichtung zum messen feiner schwebeteilchen.

Country Status (6)

Country Link
US (1) US4848905A (de)
EP (1) EP0203600B1 (de)
JP (1) JPH0640059B2 (de)
KR (1) KR940002496B1 (de)
CA (1) CA1272043A (de)
DE (1) DE3682535D1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5164598A (en) * 1985-08-05 1992-11-17 Biotrack Capillary flow device
US5004923A (en) * 1985-08-05 1991-04-02 Biotrack, Inc. Capillary flow device
EP0231542B1 (de) * 1985-12-10 1990-09-26 High Yield Technology Teilchenerfasser für Waferbearbeitungsgerät und Verfahren zur Erfassung eines Teilchens
JP2560362B2 (ja) * 1987-12-18 1996-12-04 富士通株式会社 多重反射鏡
GB9005021D0 (en) * 1990-03-06 1990-05-02 Alfa Laval Sharples Ltd Turbidity measurement
DE4117243A1 (de) * 1991-05-27 1992-12-03 Grundig Emv Anordnung zur detektion von kohlenwasserstoffen, insbesondere oel, in wasserdurchstroemten rohrsystemen
US5565984A (en) * 1995-06-12 1996-10-15 Met One, Inc. Re-entrant illumination system for particle measuring device
KR100303161B1 (ko) * 1998-08-31 2001-10-19 장철주 실시간윤활유오염도측정장치
US6707551B2 (en) * 2000-01-24 2004-03-16 Amnis Corporation Multipass cavity for illumination and excitation of moving objects
WO2002031467A1 (en) 2000-10-12 2002-04-18 Amnis Corporation Multipass cavity for illumination and excitation of moving objects
JP3922365B2 (ja) * 2002-11-21 2007-05-30 栗田工業株式会社 粒子状態検出装置および粒子状態検出方法
GB0308771D0 (en) * 2003-04-16 2003-05-21 Univ Loughborough Pulmonary drug delivery
JP5498145B2 (ja) * 2009-12-11 2014-05-21 Jx日鉱日石エネルギー株式会社 潤滑油劣化モニター装置
WO2014176366A1 (en) * 2013-04-26 2014-10-30 Van Den Engh Gerrit J Methods and systems for the collection of light using total internal reflectance
CN106370564B (zh) * 2016-10-08 2023-04-14 苏州曼德克光电有限公司 一种粉尘测试光路元件的射流保护装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE7617247U1 (de) * 1900-01-01 Cerberus Ag, Maennedorf, Zuerich (Schweiz)
US3462608A (en) * 1966-12-19 1969-08-19 Dynac Corp Method and apparatus for detecting suspended particles
CH490010A (de) * 1967-10-26 1970-05-15 Ciba Geigy Schädlingsbekämpfungsmittel
US3578867A (en) * 1969-04-11 1971-05-18 Alfred E Barrington Device for measuring light scattering wherein the measuring beam is successively reflected between a pair of parallel reflectors
US3953127A (en) * 1974-01-23 1976-04-27 Battelle Development Corporation Photon-counting integrating nephelometer
US4023909A (en) * 1976-01-15 1977-05-17 The United States Of America As Represented By The Secretary Of The Navy Null balance alphameter
GB2010479A (en) * 1977-09-21 1979-06-27 Partech Ltd Turbidity Measurement
JPS56103353A (en) * 1980-01-22 1981-08-18 Akitoshi Murakami Image pickup device of constant angle light scattering image
JPS5742842A (en) * 1980-08-27 1982-03-10 Nittan Co Ltd Photoelectric smoke sensor
DE3221867C2 (de) * 1982-06-09 1985-11-28 R & Z Biologicals GmbH & Co KG, 4050 Mönchengladbach Vorrichtung zur Messung der Konzentration von Teilchen in Flüssigkeiten
US4690560A (en) * 1983-06-30 1987-09-01 Commonwealth Scientific And Industrial Research Organization Optically based measurement of fluid parameters

Also Published As

Publication number Publication date
EP0203600B1 (de) 1991-11-21
EP0203600A2 (de) 1986-12-03
JPH0640059B2 (ja) 1994-05-25
KR940002496B1 (ko) 1994-03-25
CA1272043A (en) 1990-07-31
JPS61271438A (ja) 1986-12-01
EP0203600A3 (en) 1987-10-21
US4848905A (en) 1989-07-18
KR860009303A (ko) 1986-12-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee