DE3624217C2 - - Google Patents

Info

Publication number
DE3624217C2
DE3624217C2 DE3624217A DE3624217A DE3624217C2 DE 3624217 C2 DE3624217 C2 DE 3624217C2 DE 3624217 A DE3624217 A DE 3624217A DE 3624217 A DE3624217 A DE 3624217A DE 3624217 C2 DE3624217 C2 DE 3624217C2
Authority
DE
Germany
Prior art keywords
metal oxide
titanium dioxide
gas sensor
layer
oxide layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE3624217A
Other languages
German (de)
English (en)
Other versions
DE3624217A1 (de
Inventor
Fumio Munakata
Masayuki Yokosuka Jp Touda
Masaaki Yokohama Jp Uchida
Fumio Yokosuka Jp Yukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60155889A external-priority patent/JPH0692950B2/ja
Priority claimed from JP60184078A external-priority patent/JPH0692951B2/ja
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Publication of DE3624217A1 publication Critical patent/DE3624217A1/de
Application granted granted Critical
Publication of DE3624217C2 publication Critical patent/DE3624217C2/de
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE19863624217 1985-07-17 1986-07-17 Gassensorelement Granted DE3624217A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60155889A JPH0692950B2 (ja) 1985-07-17 1985-07-17 ガス成分検出素子
JP60184078A JPH0692951B2 (ja) 1985-08-23 1985-08-23 ガス成分検出素子

Publications (2)

Publication Number Publication Date
DE3624217A1 DE3624217A1 (de) 1987-01-29
DE3624217C2 true DE3624217C2 (US07321065-20080122-C00160.png) 1988-12-29

Family

ID=26483787

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863624217 Granted DE3624217A1 (de) 1985-07-17 1986-07-17 Gassensorelement

Country Status (2)

Country Link
US (1) US4786476A (US07321065-20080122-C00160.png)
DE (1) DE3624217A1 (US07321065-20080122-C00160.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3723051A1 (de) * 1987-07-11 1989-01-19 Kernforschungsz Karlsruhe Halbleiter fuer einen resistiven gassensor mit hoher ansprechgeschwindigkeit

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3817052A1 (de) * 1988-05-19 1989-11-30 Draegerwerk Ag Verfahren zur ueberwachung von patientendaten und schaltungsanordnung hierzu
GB9306594D0 (en) * 1993-03-30 1993-05-26 Univ Keele Sensor
DE4333898C2 (de) * 1993-10-05 1996-02-22 Bosch Gmbh Robert Meßfühler zur Erfassung von Gaszusammensetzungen
DE4334672C2 (de) * 1993-10-12 1996-01-11 Bosch Gmbh Robert Sensor zum Nachweis von Stickoxid
US5827415A (en) * 1994-09-26 1998-10-27 The Board Of Trustees Of Leland Stanford Jun. Univ. Oxygen sensor
DE4445359A1 (de) * 1994-12-20 1996-06-27 Bosch Gmbh Robert Sensor zum Nachweis von brennbaren Gasen
US5948361A (en) * 1996-08-27 1999-09-07 Motorola, Inc. Chemical sensor and method of making same
US6719950B2 (en) 2001-11-14 2004-04-13 Robert Bosch Corporation Miniaturized exhaust gas sensor
AU2003240513B8 (en) * 2002-06-04 2008-04-17 Scott Technologies, Inc. Combustible-gas measuring instrument
DE10319664A1 (de) * 2003-05-02 2004-11-18 Robert Bosch Gmbh Sensor zur Detektion von Teilchen
DE102012108997A1 (de) * 2012-09-24 2014-03-27 Heinrich-Heine-Universität Düsseldorf Sensoranordnung und Verfahren zum Herstellen einer Sensoranordnung
US10670554B2 (en) * 2015-07-13 2020-06-02 International Business Machines Corporation Reconfigurable gas sensor architecture with a high sensitivity at low temperatures

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3576730A (en) * 1968-04-19 1971-04-27 Gen Electric Nickel/nickel oxide reference electrodes for oxygen partial preddure measurements
US3751968A (en) * 1971-01-22 1973-08-14 Inficon Inc Solid state sensor
SE387444B (sv) * 1974-09-09 1976-09-06 C M Svensson Detektor for pavisande av vete
US4045178A (en) * 1975-11-08 1977-08-30 Matsushita Electric Industrial Co., Ltd. Reducing gas sensor
JPS5439197A (en) * 1977-09-02 1979-03-26 Shibaura Denshi Seisakushiyo K Method of making gas detector
EP0055104B1 (en) * 1980-12-19 1986-04-16 Matsushita Electric Industrial Co., Ltd. Sensor element and method for fabricating same
JPS58148946A (ja) * 1982-02-27 1983-09-05 Nissan Motor Co Ltd 空燃比検出器
US4387165A (en) * 1982-04-22 1983-06-07 Youngblood James L H2 S Detector having semiconductor and noncontinuous inert film deposited thereon
JPH05311226A (ja) * 1992-05-07 1993-11-22 Nippon Steel Corp 溶融金属の減圧・真空脱ガス精錬方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3723051A1 (de) * 1987-07-11 1989-01-19 Kernforschungsz Karlsruhe Halbleiter fuer einen resistiven gassensor mit hoher ansprechgeschwindigkeit

Also Published As

Publication number Publication date
US4786476A (en) 1988-11-22
DE3624217A1 (de) 1987-01-29

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee