DE3621332A1 - Mikroventil - Google Patents

Mikroventil

Info

Publication number
DE3621332A1
DE3621332A1 DE19863621332 DE3621332A DE3621332A1 DE 3621332 A1 DE3621332 A1 DE 3621332A1 DE 19863621332 DE19863621332 DE 19863621332 DE 3621332 A DE3621332 A DE 3621332A DE 3621332 A1 DE3621332 A1 DE 3621332A1
Authority
DE
Germany
Prior art keywords
valve
micro
disc
chamber
micro valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19863621332
Other languages
German (de)
English (en)
Other versions
DE3621332C2 (enExample
Inventor
Laszlo Dipl Ing Csepregi
Karl Dipl Ing Kuehl
Helmut Dipl Phys Seidel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV filed Critical Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung eV
Priority to DE19863621332 priority Critical patent/DE3621332A1/de
Publication of DE3621332A1 publication Critical patent/DE3621332A1/de
Application granted granted Critical
Publication of DE3621332C2 publication Critical patent/DE3621332C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/08—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet
    • F16K31/082—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet using a electromagnet and a permanent magnet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0009—Lift valves the valve element held by multiple arms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F2007/068—Electromagnets; Actuators including electromagnets using printed circuit coils

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Fluid Mechanics (AREA)
  • Electromagnetism (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Magnetically Actuated Valves (AREA)
DE19863621332 1986-06-26 1986-06-26 Mikroventil Granted DE3621332A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19863621332 DE3621332A1 (de) 1986-06-26 1986-06-26 Mikroventil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863621332 DE3621332A1 (de) 1986-06-26 1986-06-26 Mikroventil

Publications (2)

Publication Number Publication Date
DE3621332A1 true DE3621332A1 (de) 1988-01-14
DE3621332C2 DE3621332C2 (enExample) 1993-04-15

Family

ID=6303697

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863621332 Granted DE3621332A1 (de) 1986-06-26 1986-06-26 Mikroventil

Country Status (1)

Country Link
DE (1) DE3621332A1 (enExample)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
DE3802545A1 (de) * 1988-01-28 1989-08-10 Fraunhofer Ges Forschung Mikropumpe zur foerderung kleinster gasmengen
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
WO1990013750A1 (de) * 1989-04-28 1990-11-15 Messerschmitt-Bölkow-Blohm Gmbh Mikromechanischer aktuator
EP0485739A1 (de) * 1990-11-10 1992-05-20 Robert Bosch Gmbh Mikroventil in Mehrschichtenaufbau
EP0719951A1 (fr) * 1994-12-30 1996-07-03 CROUZET Automatismes (Société Anonyme) Micro-électro aimant à circuit magnétique et bobine intégrés
DE19504689A1 (de) * 1995-02-13 1996-08-14 Thomas Dr Grauer Mikromechanisches Sitzventil
DE19534137A1 (de) * 1995-09-14 1997-03-20 Univ Ilmenau Tech Mikro-Ventilanordnung
DE29722085U1 (de) * 1997-12-13 1998-02-26 Festo AG & Co, 73734 Esslingen Ventil
EP0845728A3 (en) * 1996-11-27 1998-07-22 Xerox Corporation Printed dielectric substrate for microelectromechanical systems
EP0878013A4 (en) * 1995-01-20 2000-04-12 Univ California MICROMECHANICAL MAGNETIC ACTUATOR AND METHOD FOR PRODUCING THE SAME
WO2009034007A1 (de) * 2007-09-11 2009-03-19 Technische Universität Ilmenau Stellventil mit einem resonanten magnetischen aktorsystem
EP1852615A3 (en) * 2006-05-01 2011-11-02 Delphi Technologies, Inc. Microfluidic valve structure
EP1766642A4 (en) * 2004-06-14 2012-08-29 Honda Motor Co Ltd BISTABLE MINIATURE VALVE
WO2012098257A3 (de) * 2011-01-21 2013-03-28 Mgb Endoskopische Geräte Gmbh Berlin Leiterplatte mit überdruckventil, insufflator
WO2014003882A1 (en) * 2012-06-25 2014-01-03 Carrier Corporation Electro-magnetic check valve
CN107191657A (zh) * 2016-03-15 2017-09-22 盾安美斯泰克股份有限公司 基于mems的电磁阀
WO2019219600A1 (de) * 2018-05-18 2019-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und haltevorrichtung zum herstellen einer mikropumpe mit mechanisch vorgespanntem membranaktor
DE102022101791A1 (de) 2022-01-26 2023-07-27 Westfälische Hochschule Gelsenkirchen Bocholt Recklinghausen Ventilanordnung und Verfahren zum Kühlen eines Wärmetauschers eines Fahrzeugs

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10249938A1 (de) * 2002-10-24 2004-05-13 Abb Research Ltd. Ventilanordnung
DE102017220229A1 (de) 2017-11-14 2019-05-16 Audi Ag Rückschlagventilelement für eine Rückschlagventilbaugruppe sowie entsprechende Rückschlagventilbaugruppe

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2246624A1 (de) * 1972-09-22 1974-03-28 Bosch Gmbh Robert Membranventil fuer die steuerung von stroemenden medien
DE2303450A1 (de) * 1973-01-25 1974-08-22 Kirchheim E Heinrich Dipl Kfm Magnetventil
US3921670A (en) * 1974-07-01 1975-11-25 Clippard Instr Lab Inc Magnetically operated valve with spider armature
DE2638879A1 (de) * 1976-08-28 1978-03-02 Daimler Benz Ag Rueckschlagventil
US4089348A (en) * 1976-04-06 1978-05-16 Toyota Jidosha Kogyo Kabushiki Kaisha Reed valve
US4196751A (en) * 1976-01-15 1980-04-08 Johnson Controls, Inc. Electric to fluid signal valve unit
DE2933545A1 (de) * 1979-08-18 1981-03-26 Festo Kg, 73734 Esslingen Magnetventil
GB2155152A (en) * 1984-03-01 1985-09-18 Allied Corp A microminiature valve
DE2910660C2 (enExample) * 1979-03-17 1988-11-17 Kurt Dipl.-Ing. 7300 Esslingen De Stoll

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2246624A1 (de) * 1972-09-22 1974-03-28 Bosch Gmbh Robert Membranventil fuer die steuerung von stroemenden medien
DE2303450A1 (de) * 1973-01-25 1974-08-22 Kirchheim E Heinrich Dipl Kfm Magnetventil
US3921670A (en) * 1974-07-01 1975-11-25 Clippard Instr Lab Inc Magnetically operated valve with spider armature
US4196751A (en) * 1976-01-15 1980-04-08 Johnson Controls, Inc. Electric to fluid signal valve unit
US4089348A (en) * 1976-04-06 1978-05-16 Toyota Jidosha Kogyo Kabushiki Kaisha Reed valve
DE2638879A1 (de) * 1976-08-28 1978-03-02 Daimler Benz Ag Rueckschlagventil
DE2910660C2 (enExample) * 1979-03-17 1988-11-17 Kurt Dipl.-Ing. 7300 Esslingen De Stoll
DE2933545A1 (de) * 1979-08-18 1981-03-26 Festo Kg, 73734 Esslingen Magnetventil
GB2155152A (en) * 1984-03-01 1985-09-18 Allied Corp A microminiature valve

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Forschungsbericht T84-209 des Bundesministeriums für Forschung und Technologie Sept. 84 *
James B. ANGELL, Stephan C. TERRY und Phillip W. BARTH Mikromechanik aus Silicium in: Spektrum der Wissenschaft, Juni 1983 *

Cited By (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3802545A1 (de) * 1988-01-28 1989-08-10 Fraunhofer Ges Forschung Mikropumpe zur foerderung kleinster gasmengen
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
US5029805A (en) * 1988-04-27 1991-07-09 Dragerwerk Aktiengesellschaft Valve arrangement of microstructured components
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
WO1990013750A1 (de) * 1989-04-28 1990-11-15 Messerschmitt-Bölkow-Blohm Gmbh Mikromechanischer aktuator
US5322258A (en) * 1989-04-28 1994-06-21 Messerschmitt-Bolkow-Blohm Gmbh Micromechanical actuator
EP0485739A1 (de) * 1990-11-10 1992-05-20 Robert Bosch Gmbh Mikroventil in Mehrschichtenaufbau
US5216273A (en) * 1990-11-10 1993-06-01 Robert Bosch Gmbh Microvalve of multilayer silicon construction
US5863024A (en) * 1994-12-30 1999-01-26 Crouzet Automatismes Micro-Electromagnet including an integrated magnetic circuit and coil
FR2729003A1 (fr) * 1994-12-30 1996-07-05 Crouzet Automatismes Micro-electroaimant a circuit magnetique et bobine integres
EP0719951A1 (fr) * 1994-12-30 1996-07-03 CROUZET Automatismes (Société Anonyme) Micro-électro aimant à circuit magnétique et bobine intégrés
EP0878013A4 (en) * 1995-01-20 2000-04-12 Univ California MICROMECHANICAL MAGNETIC ACTUATOR AND METHOD FOR PRODUCING THE SAME
DE19504689A1 (de) * 1995-02-13 1996-08-14 Thomas Dr Grauer Mikromechanisches Sitzventil
DE19534137A1 (de) * 1995-09-14 1997-03-20 Univ Ilmenau Tech Mikro-Ventilanordnung
EP0845728A3 (en) * 1996-11-27 1998-07-22 Xerox Corporation Printed dielectric substrate for microelectromechanical systems
DE29722085U1 (de) * 1997-12-13 1998-02-26 Festo AG & Co, 73734 Esslingen Ventil
EP1766642A4 (en) * 2004-06-14 2012-08-29 Honda Motor Co Ltd BISTABLE MINIATURE VALVE
EP1852615A3 (en) * 2006-05-01 2011-11-02 Delphi Technologies, Inc. Microfluidic valve structure
WO2009034007A1 (de) * 2007-09-11 2009-03-19 Technische Universität Ilmenau Stellventil mit einem resonanten magnetischen aktorsystem
WO2012098257A3 (de) * 2011-01-21 2013-03-28 Mgb Endoskopische Geräte Gmbh Berlin Leiterplatte mit überdruckventil, insufflator
CN103534521A (zh) * 2011-01-21 2014-01-22 Mgb内窥镜设备柏林有限责任公司 带有过压阀的印刷电路板，吹入器
WO2014003882A1 (en) * 2012-06-25 2014-01-03 Carrier Corporation Electro-magnetic check valve
CN104364594A (zh) * 2012-06-25 2015-02-18 开利公司 电磁止回阀
CN104364594B (zh) * 2012-06-25 2017-05-17 开利公司 电磁止回阀
US10240829B2 (en) 2012-06-25 2019-03-26 Carrier Corporation Electro-magnetic check valve
CN107191657A (zh) * 2016-03-15 2017-09-22 盾安美斯泰克股份有限公司 基于mems的电磁阀
CN107191657B (zh) * 2016-03-15 2020-04-14 盾安美斯泰克股份有限公司 基于mems的电磁阀
WO2019219600A1 (de) * 2018-05-18 2019-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und haltevorrichtung zum herstellen einer mikropumpe mit mechanisch vorgespanntem membranaktor
US12404850B2 (en) 2018-05-18 2025-09-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for producing a micropump with mechanically biased diaphragm actuator
DE102022101791A1 (de) 2022-01-26 2023-07-27 Westfälische Hochschule Gelsenkirchen Bocholt Recklinghausen Ventilanordnung und Verfahren zum Kühlen eines Wärmetauschers eines Fahrzeugs

Also Published As

Publication number Publication date
DE3621332C2 (enExample) 1993-04-15

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8181 Inventor (new situation)

Free format text: NOVAK, PAVEL, DR., 8000 MUENCHEN, DE

D2 Grant after examination
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8305 Restricted maintenance of patent after opposition
D4 Patent maintained restricted
8330 Complete disclaimer