DE3621332C2 - - Google Patents

Info

Publication number
DE3621332C2
DE3621332C2 DE19863621332 DE3621332A DE3621332C2 DE 3621332 C2 DE3621332 C2 DE 3621332C2 DE 19863621332 DE19863621332 DE 19863621332 DE 3621332 A DE3621332 A DE 3621332A DE 3621332 C2 DE3621332 C2 DE 3621332C2
Authority
DE
Germany
Prior art keywords
valve
substrate
electromagnetic coil
microvalve
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE19863621332
Other languages
German (de)
English (en)
Other versions
DE3621332A1 (de
Inventor
Pavel Dr. 8000 Muenchen De Novak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to DE19863621332 priority Critical patent/DE3621332A1/de
Publication of DE3621332A1 publication Critical patent/DE3621332A1/de
Application granted granted Critical
Publication of DE3621332C2 publication Critical patent/DE3621332C2/de
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/08—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet
    • F16K31/082—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet using a electromagnet and a permanent magnet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0009—Lift valves the valve element held by multiple arms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F2007/068—Electromagnets; Actuators including electromagnets using printed circuit coils

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Fluid Mechanics (AREA)
  • Electromagnetism (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Magnetically Actuated Valves (AREA)
DE19863621332 1986-06-26 1986-06-26 Mikroventil Granted DE3621332A1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19863621332 DE3621332A1 (de) 1986-06-26 1986-06-26 Mikroventil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863621332 DE3621332A1 (de) 1986-06-26 1986-06-26 Mikroventil

Publications (2)

Publication Number Publication Date
DE3621332A1 DE3621332A1 (de) 1988-01-14
DE3621332C2 true DE3621332C2 (enExample) 1993-04-15

Family

ID=6303697

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19863621332 Granted DE3621332A1 (de) 1986-06-26 1986-06-26 Mikroventil

Country Status (1)

Country Link
DE (1) DE3621332A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10249938A1 (de) * 2002-10-24 2004-05-13 Abb Research Ltd. Ventilanordnung
US11079029B2 (en) 2017-11-14 2021-08-03 Audi Ag Check valve element for a check valve assembly and corresponding check valve assembly

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3802545A1 (de) * 1988-01-28 1989-08-10 Fraunhofer Ges Forschung Mikropumpe zur foerderung kleinster gasmengen
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
US4826131A (en) * 1988-08-22 1989-05-02 Ford Motor Company Electrically controllable valve etched from silicon substrates
DE3914031C2 (de) * 1989-04-28 1993-10-28 Deutsche Aerospace Mikromechanischer Aktuator
DE4035852A1 (de) * 1990-11-10 1992-05-14 Bosch Gmbh Robert Mikroventil in mehrschichtenaufbau
FR2729003B1 (fr) * 1994-12-30 1997-03-21 Crouzet Automatismes Micro-electroaimant a circuit magnetique et bobine integres
US5629918A (en) * 1995-01-20 1997-05-13 The Regents Of The University Of California Electromagnetically actuated micromachined flap
DE19504689A1 (de) * 1995-02-13 1996-08-14 Thomas Dr Grauer Mikromechanisches Sitzventil
DE19534137A1 (de) * 1995-09-14 1997-03-20 Univ Ilmenau Tech Mikro-Ventilanordnung
JPH10176768A (ja) * 1996-11-27 1998-06-30 Xerox Corp マイクロデバイス支持システム及びマイクロデバイスのアレイ
DE29722085U1 (de) * 1997-12-13 1998-02-26 Festo AG & Co, 73734 Esslingen Ventil
US7422191B2 (en) * 2004-06-14 2008-09-09 The Board Of Trustees Of The Leland Stanford Junior University Bistable miniature valve
US8256465B2 (en) * 2006-05-01 2012-09-04 Google Inc. Microfluidic valve structure
DE102008030258A1 (de) * 2007-09-11 2009-03-12 Steinbeis GmbH & Co. für Technologietransfer Transferzentrum Mechatronik Ilmenau Resonantes magnetisches Aktorsystem zur Verwendung in der Industriepneumatik
DE102011003007A1 (de) * 2011-01-21 2012-07-26 Mgb Endoskopische Geräte Gmbh Berlin Leiterplatte mit Überdruckventil, Insufflator
WO2014003882A1 (en) * 2012-06-25 2014-01-03 Carrier Corporation Electro-magnetic check valve
US10190702B2 (en) * 2016-03-15 2019-01-29 Dunan Microstaq, Inc. MEMS based solenoid valve
DE102018207858B4 (de) * 2018-05-18 2021-06-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Haltevorrichtung zum Herstellen einer Mikropumpe mit mechanisch vorgespanntem Membranaktor
DE102022101791A1 (de) 2022-01-26 2023-07-27 Westfälische Hochschule Gelsenkirchen Bocholt Recklinghausen Ventilanordnung und Verfahren zum Kühlen eines Wärmetauschers eines Fahrzeugs

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2246624C2 (de) * 1972-09-22 1983-05-26 Robert Bosch Gmbh, 7000 Stuttgart Membranventil für die Steuerung von strömenden Medien
DE2303450A1 (de) * 1973-01-25 1974-08-22 Kirchheim E Heinrich Dipl Kfm Magnetventil
US3921670A (en) * 1974-07-01 1975-11-25 Clippard Instr Lab Inc Magnetically operated valve with spider armature
US4196751A (en) * 1976-01-15 1980-04-08 Johnson Controls, Inc. Electric to fluid signal valve unit
JPS52121820A (en) * 1976-04-06 1977-10-13 Toyota Motor Co Ltd Reed valve
DE2638879A1 (de) * 1976-08-28 1978-03-02 Daimler Benz Ag Rueckschlagventil
DE2933545A1 (de) * 1979-08-18 1981-03-26 Festo Kg, 73734 Esslingen Magnetventil
DE2910660A1 (de) * 1979-03-17 1980-09-25 Stoll Kurt Magnetventil
US4581624A (en) * 1984-03-01 1986-04-08 Allied Corporation Microminiature semiconductor valve

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10249938A1 (de) * 2002-10-24 2004-05-13 Abb Research Ltd. Ventilanordnung
US11079029B2 (en) 2017-11-14 2021-08-03 Audi Ag Check valve element for a check valve assembly and corresponding check valve assembly

Also Published As

Publication number Publication date
DE3621332A1 (de) 1988-01-14

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8181 Inventor (new situation)

Free format text: NOVAK, PAVEL, DR., 8000 MUENCHEN, DE

D2 Grant after examination
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8305 Restricted maintenance of patent after opposition
D4 Patent maintained restricted
8330 Complete disclaimer