DE3536780A1 - Verfahren zur herstellung eines planaren lichtwellenleiters - Google Patents
Verfahren zur herstellung eines planaren lichtwellenleitersInfo
- Publication number
- DE3536780A1 DE3536780A1 DE19853536780 DE3536780A DE3536780A1 DE 3536780 A1 DE3536780 A1 DE 3536780A1 DE 19853536780 DE19853536780 DE 19853536780 DE 3536780 A DE3536780 A DE 3536780A DE 3536780 A1 DE3536780 A1 DE 3536780A1
- Authority
- DE
- Germany
- Prior art keywords
- refractive index
- core
- light
- substrate
- strips
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000011162 core material Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 21
- 238000000151 deposition Methods 0.000 claims description 6
- 239000002019 doping agent Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000005253 cladding Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 241000162682 Heterogen Species 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000005495 cold plasma Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000005373 porous glass Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
- Glass Melting And Manufacturing (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853536780 DE3536780A1 (de) | 1985-10-16 | 1985-10-16 | Verfahren zur herstellung eines planaren lichtwellenleiters |
| FR868614234A FR2592723B1 (fr) | 1985-10-16 | 1986-10-14 | Procede de production d'un guide d'ondes lumineuses plan |
| GB8624679A GB2181862B (en) | 1985-10-16 | 1986-10-15 | Method of making a planar lightwave guide |
| NL8602602A NL8602602A (nl) | 1985-10-16 | 1986-10-16 | Werkwijze voor het vervaardigen van een vlakke lichtgolfgeleider. |
| US06/919,401 US4765819A (en) | 1985-10-16 | 1986-10-16 | Method for making planar lightwave guides |
| JP61244342A JPS6291434A (ja) | 1985-10-16 | 1986-10-16 | 平面状光導波路の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19853536780 DE3536780A1 (de) | 1985-10-16 | 1985-10-16 | Verfahren zur herstellung eines planaren lichtwellenleiters |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE3536780A1 true DE3536780A1 (de) | 1987-04-16 |
| DE3536780C2 DE3536780C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-10-22 |
Family
ID=6283644
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19853536780 Granted DE3536780A1 (de) | 1985-10-16 | 1985-10-16 | Verfahren zur herstellung eines planaren lichtwellenleiters |
Country Status (6)
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3926023A1 (de) * | 1988-09-06 | 1990-03-15 | Schott Glaswerke | Cvd-beschichtungsverfahren zur herstellung von schichten und vorrichtung zur durchfuehrung des verfahrens |
| DE19831719A1 (de) * | 1998-07-15 | 2000-01-20 | Alcatel Sa | Verfahren zur Herstellung planarer Wellenleiterstrukturen sowie Wellenleiterstruktur |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2191603A (en) * | 1986-06-13 | 1987-12-16 | Northern Telecom Ltd | Optical conductor having at least three layers |
| DE3641285A1 (de) * | 1986-12-03 | 1988-06-09 | Schott Glaswerke | Verfahren zur messung von (alpha) und ss-strahlen geringer intensitaet |
| JP2585332B2 (ja) * | 1987-12-25 | 1997-02-26 | 株式会社日立製作所 | 導波路型光デバイス |
| US4901329A (en) * | 1988-10-31 | 1990-02-13 | International Business Machines Corporation | Integrated laser arrays and support circuits |
| JP2755471B2 (ja) * | 1990-06-29 | 1998-05-20 | 日立電線株式会社 | 希土類元素添加光導波路及びその製造方法 |
| FI86226C (fi) * | 1990-07-10 | 1992-07-27 | Nokia Oy Ab | Foerfarande foer framstaellning av ljusvaogsledare medelst jonbytesteknik pao ett glassubstrat. |
| US5178658A (en) * | 1991-09-17 | 1993-01-12 | The Charles Stark Draper Laboratory, Inc. | Method for forming an optical waveguide by selective volatization |
| US5194079A (en) * | 1991-09-17 | 1993-03-16 | The Charles Stark Draper Laboratory, Inc. | Method of forming an optical channel waveguide by thermal diffusion |
| US5196041A (en) * | 1991-09-17 | 1993-03-23 | The Charles Stark Draper Laboratory, Inc. | Method of forming an optical channel waveguide by gettering |
| GB2309096A (en) * | 1996-01-09 | 1997-07-16 | Northern Telecom Ltd | Optical waveguide pair with cladding on buffered substrate |
| GB2346452A (en) * | 1999-02-05 | 2000-08-09 | Univ Glasgow | Waveguides |
| US20080011107A1 (en) * | 2004-06-07 | 2008-01-17 | Leventhal Margret E | Laboratory Spatula |
| DE102005016435A1 (de) * | 2005-04-05 | 2006-10-12 | Würth Elektronik Rot am See GmbH & Co. KG | Optische Leiterplatte und Verfahren zu ihrer Herstellung |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0052901A1 (en) * | 1980-11-25 | 1982-06-02 | Koninklijke Philips Electronics N.V. | Method of producing integrated optical waveguide circuits and circuits obtained by means of this method |
| DE3232888A1 (de) * | 1982-09-04 | 1984-03-08 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zur herstellung eines lichtwellenleiters |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1279464A (en) * | 1968-10-03 | 1972-06-28 | Nippon Selfoc Co Ltd | Production of light conducting glass fibres |
| US3647406A (en) * | 1968-11-04 | 1972-03-07 | Bell Telephone Labor Inc | Method of achieving surface refractive index changes in a glass light guide element |
| US3817730A (en) * | 1969-12-29 | 1974-06-18 | Nippon Electric Co | Method of making optical lines in dielectric body |
| DE2363253A1 (de) * | 1973-12-19 | 1975-06-26 | Siemens Ag | Koppelvorrichtung und verfahren zu deren herstellung |
| JPS5127944A (ja) * | 1974-09-02 | 1976-03-09 | Mitsubishi Electric Corp | Hikaridoharo |
| US4070516A (en) * | 1976-10-18 | 1978-01-24 | International Business Machines Corporation | Multilayer module having optical channels therein |
| JPS5947281B2 (ja) * | 1978-06-20 | 1984-11-17 | 日本電信電話株式会社 | 光導波回路の製造方法 |
| US4652290A (en) * | 1983-07-05 | 1987-03-24 | Motorola, Inc. | Method for making optical channel waveguides and product manufactured thereby |
-
1985
- 1985-10-16 DE DE19853536780 patent/DE3536780A1/de active Granted
-
1986
- 1986-10-14 FR FR868614234A patent/FR2592723B1/fr not_active Expired - Lifetime
- 1986-10-15 GB GB8624679A patent/GB2181862B/en not_active Expired
- 1986-10-16 JP JP61244342A patent/JPS6291434A/ja active Pending
- 1986-10-16 NL NL8602602A patent/NL8602602A/nl not_active Application Discontinuation
- 1986-10-16 US US06/919,401 patent/US4765819A/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0052901A1 (en) * | 1980-11-25 | 1982-06-02 | Koninklijke Philips Electronics N.V. | Method of producing integrated optical waveguide circuits and circuits obtained by means of this method |
| DE3232888A1 (de) * | 1982-09-04 | 1984-03-08 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zur herstellung eines lichtwellenleiters |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3926023A1 (de) * | 1988-09-06 | 1990-03-15 | Schott Glaswerke | Cvd-beschichtungsverfahren zur herstellung von schichten und vorrichtung zur durchfuehrung des verfahrens |
| DE19831719A1 (de) * | 1998-07-15 | 2000-01-20 | Alcatel Sa | Verfahren zur Herstellung planarer Wellenleiterstrukturen sowie Wellenleiterstruktur |
Also Published As
| Publication number | Publication date |
|---|---|
| US4765819A (en) | 1988-08-23 |
| GB2181862B (en) | 1989-09-13 |
| GB2181862A (en) | 1987-04-29 |
| JPS6291434A (ja) | 1987-04-25 |
| GB8624679D0 (en) | 1986-11-19 |
| FR2592723B1 (fr) | 1990-06-22 |
| NL8602602A (nl) | 1987-05-18 |
| FR2592723A1 (fr) | 1987-07-10 |
| DE3536780C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-10-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| D2 | Grant after examination | ||
| 8364 | No opposition during term of opposition | ||
| 8330 | Complete disclaimer |